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    • 6. 发明授权
    • Enhanced gate replacement process for high-K metal gate technology
    • 用于高K金属栅极技术的增强栅极替换工艺
    • US09177870B2
    • 2015-11-03
    • US13328382
    • 2011-12-16
    • Hak-Lay ChuangMing Zhu
    • Hak-Lay ChuangMing Zhu
    • H01L29/76H01L29/94H01L31/062H01L31/113H01L31/119H01L21/8238
    • H01L29/66545H01L21/02186H01L21/02192H01L21/3212H01L21/823842H01L21/823857
    • The present disclosure provides a method of fabricating a semiconductor device. A high-k dielectric layer is formed over a substrate. A first capping layer is formed over a portion of the high-k dielectric layer. A second capping layer is formed over the first capping layer and the high-k dielectric layer. A dummy gate electrode layer is formed over the second capping layer. The dummy gate electrode layer, the second capping layer, the first capping layer, and the high-k dielectric layer are patterned to form an NMOS gate and a PMOS gate. The NMOS gate includes the first capping layer, and the PMOS gate is free of the first capping layer. The dummy gate electrode layer of the PMOS gate is removed, thereby exposing the second capping layer of the PMOS gate. The second capping layer of the PMOS gate is transformed into a third capping layer.
    • 本公开提供了制造半导体器件的方法。 在衬底上形成高k电介质层。 在高k电介质层的一部分上形成第一覆盖层。 在第一覆盖层和高k电介质层上形成第二覆盖层。 在第二盖层上形成虚拟栅电极层。 对虚拟栅极电极层,第二覆盖层,第一覆盖层和高k电介质层进行构图以形成NMOS栅极和PMOS栅极。 NMOS栅极包括第一覆盖层,PMOS栅极不含第一覆盖层。 去除PMOS栅极的伪栅极电极层,从而暴露PMOS栅极的第二覆盖层。 PMOS栅极的第二覆盖层被转换成第三覆盖层。
    • 10. 发明申请
    • Multi-Node Synchronous On-Site Test Method
    • 多节点同步现场测试方法
    • US20150019156A1
    • 2015-01-15
    • US14378954
    • 2012-05-02
    • Maolin PeiPing SunChunqiang ZhangJian LiuHaimei HuMing Zhu
    • Maolin PeiPing SunChunqiang ZhangJian LiuHaimei HuMing Zhu
    • G01R31/40G01R21/133
    • G01R31/40G01R21/133H02J13/0079
    • A multi-node synchronous on-site test method, the method comprising: using GPS time as time reference, and conducting synchronous on-site tests on the devices to be tested and systems distributed at different places at an appointed time; controlling the synchronous phase control simulation devices distributed at multiple nodes via a synchronous test control center; within a uniform time section, synchronously outputting secondary side AC simulation signals, and simulating various actual operating conditions, thus achieving the detection of the monitoring and control performances of various dynamic monitoring and control systems, and ensuring the normal functions of the systems. The method of the present invention is able to conduct multi-node dynamic simulation test with synchronized GPS time, and achieves the detection of large-area multi-node monitoring and control systems. The present invention is suitable for the test of a wide area measurement system (WAMS) function, the simulation test of a damping control function, the simulation test of transiently stable state analysis and control functions, the simulation test of voltage stabilization and control functions, the simulation test of an islanding control function, the simulation test of wide area protection system functions and the like.
    • 一种多节点同步现场测试方法,该方法包括:使用GPS时间作为时间参考,并对被测设备进行同步现场测试,并在指定时间内在不同地点分配系统; 通过同步测试控制中心控制分布在多个节点的同步相位控制仿真设备; 在均匀时间段内同步输出二次侧交流仿真信号,模拟各种实际运行状况,实现对各种动态监控系统的监控性能的检测,确保系统的正常功能。 本发明的方法能够进行同步GPS时间的多节点动态模拟测试,实现了大面积多节点监控系统的检测。 本发明适用于广域测量系统(WAMS)功能的测试,阻尼控制功能的仿真测试,瞬态稳态分析和控制功能的仿真测试,稳压控制功能的仿真测试, 孤岛控制功能的仿真测试,广域保护系统功能的仿真测试等。