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    • 5. 发明授权
    • Apparatus for releasing pressure in a vacuum exhaust system of semiconductor equipment
    • 用于在半导体设备的真空排气系统中释放压力的装置
    • US07172731B2
    • 2007-02-06
    • US10318185
    • 2002-12-13
    • Chen-Tai PengLeo LinEric T. Chuang
    • Chen-Tai PengLeo LinEric T. Chuang
    • B32B5/02
    • C23C16/4412A62C4/02B01D53/74C23C16/4401Y02C20/30Y10T137/1624
    • An apparatus for protecting a vacuum system of semiconductor equipment is disclosed. The apparatus comprises a process tool and a gas-exploding unit. The process tool includes a gas reaction chamber, and the process tool is connected with a first gas piping to exhaust a waste gas in the gas reaction chamber. The gas-exploding unit includes a gas-exploding chamber, a gas valve, a pressure sensor, and a gas-exploding device for sealing an opening in a wall of the gas-exploding chamber. The gas-exploding chamber is connected with the first gas piping to receive the waste gas. The waste gas in the gas-exploding chamber is transported to a local scrubber through a second gas piping, and then exhausted to a central scrubber. The pressure sensor is used to detect a pressure in the gas-exploding chamber. While the pressure in the gas-exploding chamber detected by the pressure sensor is larger than a reference value, the process tool is shutdown, and the gas valve is then opened to release the waste gas to the central scrubber through a third gas piping.
    • 公开了一种用于保护半导体设备的真空系统的装置。 该装置包括处理工具和气体爆炸装置。 处理工具包括气体反应室,并且处理工具与第一气体管道连接以排出气体反应室中的废气。 气体爆炸装置包括气体爆炸室,气阀,压力传感器和用于密封气体爆炸室的壁中的开口的气体爆炸装置。 气体爆炸室与第一气体管道连接以接收废气。 气体爆炸室中的废气通过第二气体管道输送到局部洗涤器,然后排放到中央洗涤器。 压力传感器用于检测气体爆炸室内的压力。 当由压力传感器检测到的气体爆炸室中的压力大于参考值时,处理工具关闭,然后打开气阀,通过第三气体管道将废气释放到中央洗涤器。
    • 6. 发明授权
    • Structure of flash movable decorating lamp
    • 闪光手提灯的结构
    • US06439737B1
    • 2002-08-27
    • US09585794
    • 2000-06-05
    • Leo LinChin Yung Hsu
    • Leo LinChin Yung Hsu
    • F21L700
    • F21S10/06F21L15/02
    • A structure of a flash movable decorating lamp comprises at least one first unit and at least one second unit. Each first unit is formed by a hollow tube with a high pressure converting circuit and an actuation circuit, stopping rings, rubber water-proof rings, plastic male threaded tube seats, connector fixing seats, water-proof rubber rings, a male threaded tube seat for assisting in fixing, connecting line fixing sleeves, a female threaded tube seat for assisting in fixing, a connector male seat, and plastic female threaded tube seats, etc. Each second unit is formed by a transparent tube with movable decorating lamp flash circuit, a plastic male threaded tube seat assisting a fixing, a connector fixing seat, a water-proof rubber ring, a male threaded tube seat for assisting in fixing, a connecting line fixing sleeve, a female threaded tube seat for assisting in fixing, a connector male seat, and a plastic female threaded tube seat, etc., thereby, no screw is necessary in fixing. A structure of a flash movable decorating lamp is formed, by which, a flash circuit can be detachably attached thereto, and a serial system or a serial and parallel system with many variation can be formed. Many variations in controlling with very complex patterns can be achieved.
    • 闪光可移动装饰灯的结构包括至少一个第一单元和至少一个第二单元。 每个第一单元由具有高压转换电路和致动电路的中空管形成,止动环,橡胶防水环,塑料阳螺纹管座,连接器固定座,防水橡胶环,阳螺纹管座 用于辅助固定,连接线固定套,用于辅助固定的阴螺纹管座,连接器阳座和塑料阴螺纹管座等。每个第二单元由具有可移动装饰灯闪光电路的透明管形成, 辅助固定的塑料外螺纹管座,连接器固定座,防水橡胶环,用于辅助固定的阳螺纹管座,连接线固定套,用于辅助固定的内螺纹管座,连接器 阳座,塑胶内螺纹管座等,固定时不需要螺丝。 形成闪光可移动装饰灯的结构,通过该结构可以将闪光电路可拆卸地附接到其上,并且可以形成具有许多变化的串行系统或串并联系统。 可以实现具有非常复杂图案的控制中的许多变化。
    • 7. 发明授权
    • Control device of a flash type movable decorating lamp
    • 闪光式可移动装饰灯的控制装置
    • US06335596B1
    • 2002-01-01
    • US09587324
    • 2000-06-05
    • Chin Yung HsuLeo Lin
    • Chin Yung HsuLeo Lin
    • H05B3700
    • H05B41/34
    • A control device of a flash type movable decorating lamp comprises a high voltage converting circuit, an actuating circuit, a high voltage storage capacitor, a flash displaying circuit and other units. The time difference between charging and discharging of the high voltage converting circuit to the high voltage storage capacitor and the voltage difference for the triggering of the flash lamp tubes are used to replaced a movable decorating lamp sequential control circuit. Part of the storage capacitor and each the flash lamp high voltage generating circuit are used in common so as to achieve the object of simplifying part of the circuit and the manufacturing process becomes more economic.
    • 闪光型可移动装饰灯的控制装置包括高压转换电路,致动电路,高压存储电容器,闪光显示电路和其它单元。 使用高电压转换电路对高电压存储电容器的充放电之间的时间差和用于触发闪光灯管的电压差来代替可移动装饰灯顺序控制电路。 存储电容器和每个闪光灯高压发生电路的一部分被共同使用,以便实现简化电路的一部分的目的,并且制造过程变得更加经济。