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    • 5. 发明授权
    • Method and apparatus for measurement of microscopic electrical characteristics
    • 用于测量微电气特性的方法和装置
    • US06208151B1
    • 2001-03-27
    • US09216204
    • 1998-12-18
    • Thomas John AtonLeigh Ann Files
    • Thomas John AtonLeigh Ann Files
    • G01R3100
    • G01R1/071
    • The improved method for microscopic measurement of electrical characteristics comprises a standard atomic force microscope (AFM). The AFM includes a pointed, conductively coated tip attached to one end of a softly compliant cantilever arm, also capable of conducting electricity. The other end of the cantilever arm is attached to the top of a piezo-electric z-axis driver which will raise and lower the cantilever arm as the AFM tip is scanned across the surface of a sample. A piezo-electric X-Y scanstage controller may also be provided and connected to the bottom of the z-axis driver. The X-Y scanstage is preferably capable of scanning the movement of the entire system including the Z-axis driver, cantilever arm and AFM tip.
    • 用于显微测量电特性的改进方法包括标准原子力显微镜(AFM)。 AFM包括一个尖头的,导电涂层的尖端,其附着在轻柔柔顺的悬臂上的一端,也能够导电。 悬臂的另一端连接到压电z轴驱动器的顶部,该驱动器将随着AFM尖端扫描样品表面而升高和降低悬臂。 还可以提供压电X-Y扫描台控制器并连接到z轴驱动器的底部。 X-Y扫描台优选地能够扫描包括Z轴驱动器,悬臂和AFM尖端的整个系统的运动。