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1. 发明授权

US10060812B2 Miniature pressure sensor having a metallic membrane for measuring a pressure of a fluid 有权
公开(公告)号：US10060812B2
公开(公告)日：2018-08-28
申请号：US15046244
申请日：2016-02-17
申请人： L'ESSOR FRANÇAIS ELECTRONIQUE
发明人： Fabien Lemery , Stéphane Jourdan , David Cayez
IPC分类号： G01L7/08 , G01L9/00 , G01L9/04 , G01L19/00 , G01L19/14 , G01L19/06
CPC分类号： G01L9/0042 , G01L9/0051 , G01L19/0061 , G01L19/0084 , G01L19/0681 , G01L19/143
摘要： A pressure sensor to measure the pressure of a fluid comprises: a metallic membrane to be in contact with the fluid and on which are stacked an electrical insulator and at least one gauge for measuring the deformation of the membrane, the whole forming a sensitive measuring element a cap comprising: a cover comprising a cavity and holes; conductors located in the holes, the sensitive element exhibiting a face opposite the cap and located in a plane P; wherein the sensor comprises: at least one metallic zone, located in a plane parallel to said plane P, for hermetic sealing of the cap on the sensitive measuring element; continuous metallic tracks comprising parts for picking up contact with the conductors and parts for picking up contact with at least the gauge. A method for manufacturing the pressure sensor is also provided.

2. 发明申请

US20160238477A1 Unknown 审中-公开
标题翻译：未知
公开(公告)号：US20160238477A1
公开(公告)日：2016-08-18
申请号：US15046244
申请日：2016-02-17
申请人： L'ESSOR FRANÇAIS ELECTRONIQUE
发明人： Fabien LEMERY , Stéphane JOURDAN , David CAYEZ
IPC分类号： G01L9/00 , G01L19/00 , G01L19/06
CPC分类号： G01L9/0042 , G01L9/0051 , G01L19/0061 , G01L19/0084 , G01L19/0681 , G01L19/143
摘要： A pressure sensor to measure the pressure of a fluid comprises: a metallic membrane to be in contact with the fluid and on which are stacked an electrical insulator and at least one gauge for measuring the deformation of the membrane, the whole forming a sensitive measuring element a cap comprising: a cover comprising a cavity and holes; conductors located in the holes, the sensitive element exhibiting a face opposite the cap and located in a plane P; wherein the sensor comprises: at least one metallic zone, located in a plane parallel to said plane P, for hermetic sealing of the cap on the sensitive measuring element; continuous metallic tracks comprising parts for picking up contact with the conductors and parts for picking up contact with at least the gauge. A method for manufacturing the pressure sensor is also provided.
摘要翻译：用于测量流体压力的压力传感器包括：与流体接触的金属膜，并在其上堆叠电绝缘体和至少一个用于测量膜的变形的量规，整体形成敏感的测量元件帽，包括：包括腔和孔的盖; 导体位于孔中，敏感元件呈现与盖相对的面并位于平面P中; 其中所述传感器包括：位于平行于所述平面P的平面中的至少一个金属区，用于密封所述敏感测量元件上的盖; 连续的金属轨道包括用于拾取与导体接触的部件和用于拾取与至少量规的接触的部件。还提供了一种用于制造压力传感器的方法。

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