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1. 发明授权

US08669534B2 Electrostatic lens for charged particle radiation 有权
标题翻译：用于带电粒子辐射的静电透镜
公开(公告)号：US08669534B2
公开(公告)日：2014-03-11
申请号：US12934966
申请日：2009-03-23
申请人： Kenichi Obori , Koichi Matsumoto , Shogo Awata , Satoshi Ohashi , Kyoko Onoguchi
发明人： Akira Onoguchi , Kenichi Obori , Koichi Matsumoto , Shogo Awata , Satoshi Ohashi
IPC分类号： H01J37/12
CPC分类号： H01J37/12 , H01J2237/121 , H01J2237/28
摘要： Provided is an electrostatic lens for charged particle radiation with a lens performance relatively comparable to that of a magnetic type lens. A plurality of electrodes arranged on the incident side of charged particles form a first electric field area, wherein orbit radii of the charged particles are reduced without exceeding, on the way, the initial orbit radii that are orbit radii at the incident time, and a second electric field area, wherein force in the direction advancing in parallel with a central axis is applied to the charged particles that have passed through the first electric field area. A plurality of electrodes arranged on the projection side form a third electric field area, wherein the orbit radii of the charged particles do not exceed the initial orbit radii on the way and are curved to intersect with a central axis at angles larger than orbit angles defined with respect to the central axis of when the charged particles are projected from the second electric field area.
摘要翻译：提供一种用于带电粒子辐射的静电透镜，其具有与磁性透镜相当的透镜性能。布置在带电粒子的入射侧的多个电极形成第一电场区域，其中带电粒子的轨道半径减小而不超过在入射时为轨道半径的初始轨道半径，第二电场区域，其中在与中心轴平行的方向上的力施加到已经通过第一电场区域的带电粒子。布置在投影侧的多个电极形成第三电场区域，其中带电粒子的轨道半径在途中不超过初始轨道半径，并且弯曲成与中心轴相交，角度大于所定义的轨道角度相对于带电粒子从第二电场区域突出时的中心轴线。

2. 发明申请

US20130009070A1 ELECTROSTATIC LENS FOR CHARGED PARTICLE RADIATION 有权
标题翻译：用于充电颗粒辐射的静电镜
公开(公告)号：US20130009070A1
公开(公告)日：2013-01-10
申请号：US12934966
申请日：2009-03-23
申请人： Akira Onoguchi , Kyoko Onoguchi , Kenichi Obori , Koichi Matsumoto , Shogo Awata , Satoshi Ohashi
发明人： Akira Onoguchi , Kyoko Onoguchi , Kenichi Obori , Koichi Matsumoto , Shogo Awata , Satoshi Ohashi
IPC分类号： H01J3/18
CPC分类号： H01J37/12 , H01J2237/121 , H01J2237/28
摘要： Provided is an electrostatic lens for charged particle radiation with a lens performance relatively comparable to that of a magnetic type lens. A plurality of electrodes arranged on the incident side of charged particles form a first electric field area, wherein orbit radii of the charged particles are reduced without exceeding, on the way, the initial orbit radii that are orbit radii at the incident time, and a second electric field area, wherein force in the direction advancing in parallel with a central axis is applied to the charged particles that have passed through the first electric field area. A plurality of electrodes arranged on the projection side form a third electric field area, wherein the orbit radii of the charged particles do not exceed the initial orbit radii on the way and are curved to intersect with a central axis at angles larger than orbit angles defined with respect to the central axis of when the charged particles are projected from the second electric field area.
摘要翻译：提供一种用于带电粒子辐射的静电透镜，其具有与磁性透镜相当的透镜性能。布置在带电粒子的入射侧的多个电极形成第一电场区域，其中带电粒子的轨道半径减小而不超过在入射时为轨道半径的初始轨道半径，第二电场区域，其中在与中心轴平行的方向上的力施加到已经通过第一电场区域的带电粒子。布置在投影侧的多个电极形成第三电场区域，其中带电粒子的轨道半径在途中不超过初始轨道半径，并且弯曲成与中心轴相交，角度大于所定义的轨道角度相对于带电粒子从第二电场区域突出时的中心轴线。

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