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    • 2. 发明授权
    • Method of fabricating nanostructure array and device including nanostructure array
    • 制造纳米结构阵列的方法和包括纳米结构阵列的器件
    • US08758985B2
    • 2014-06-24
    • US13198892
    • 2011-08-05
    • Kyeong Seok LeeWon Mok KimIn Ho Kim
    • Kyeong Seok LeeWon Mok KimIn Ho Kim
    • G03F7/26
    • G03F7/2016G03F7/201
    • Provided are a method of fabricating a nanostructure array and a device including the nanostructure array. Nanoscale patterning is caused at an interface of a resist layer by light passed through a focusing layer. By such nanoscale patterning, a nanostructure array is fabricated on a substrate in various ways. As the focusing layer, an array of beads or lenses is used, and a pattern of the resist layer may include a nanoscale pore-opening and an undercut structure connected to a lower portion of the opening. The method facilitates adjustment of the size and shape of nanostructures and the interval between the nanostructures. Also, performance of the device including the nanostructure array can be improved. In particular, the method and device result in a sensor having improved sensitivity and reliability optimized for an environment and purpose to be used.
    • 提供制造纳米结构阵列的方法和包括纳米结构阵列的器件。 通过穿过聚焦层的光在抗蚀剂层的界面处引起纳米级图案化。 通过这种纳米尺度的图案化,以各种方式在衬底上制造纳米结构阵列。 作为聚焦层,使用珠或透镜的阵列,并且抗蚀剂层的图案可以包括连接到开口的下部的纳米级孔隙和底切结构。 该方法有助于调整纳米结构的尺寸和形状以及纳米结构之间的间隔。 此外,可以提高包括纳米结构阵列的器件的性能。 特别地,该方法和装置导致传感器具有针对要使用的环境和目的优化的改进的灵敏度和可靠性。
    • 5. 发明授权
    • Waveguide type optical device using large third order non-linearity optical material and method for operating the same
    • 使用大型三阶非线性光学材料的波导型光学器件及其操作方法
    • US07181114B2
    • 2007-02-20
    • US10987709
    • 2004-11-12
    • Taek-Sung LeeKyeong Seok LeeWon-Mok KimByung-Ki CheongIn-Ho Kim
    • Taek-Sung LeeKyeong Seok LeeWon-Mok KimByung-Ki CheongIn-Ho Kim
    • G02B6/26
    • G02F1/3517G02B2006/12142G02B2006/12145G02B2006/12147G02F1/3521
    • Disclosed is a waveguide type optical device utilizing a nonlinear refractive index change according to a large 3rd order nonlinear optical phenomenon. The waveguide type optical device includes a signal beam waveguide through which a signal beam propagates; and a pump beam waveguide through which a pump beam propagates, wherein the pump beam waveguide is disposed adjacent to the signal beam waveguide so that the pump beam can be coupled to the signal beam waveguide, the signal beam waveguide is made of nonlinear optical materials with large 3rd order nonlinear optical property and the pump beam waveguide is made of linear optical materials, and the wavelength range of the signal beam is different from that of the pump beam. By such a structure, the pump beam is coupled to one arm of the signal beam waveguide, thereby generating a 3rd nonlinear phenomenon on one arm of the waveguide through which the signal beam passes. Therefore, the waveguide optical device which implements an all-optical communication device operating as an optical device and can be integrated is provided.
    • 公开了一种使用根据大的3阶非线性光学现象的非线性折射率变化的波导型光学器件。 波导型光学器件包括信号光束波导,信号光束通过该波导波导传播; 以及泵浦光束通过其传播的泵浦波导,其中所述泵浦波导与所述信号光束波导相邻设置,使得所述泵浦波束可以耦合到所述信号波导管,所述信号波束波导由非线性光学材料制成, 大的3阶非线性光学特性和泵浦波导由线性光学材料制成,信号光束的波长范围与泵浦光束的波长范围不同。 通过这种结构,泵浦光束耦合到信号光束波导的一个臂,从而在信号光束通过的波导的一个臂上产生第三个非线性现象。 因此,提供了实现作为光学装置工作并可以集成的全光通信装置的波导光学装置。
    • 9. 发明申请
    • METHOD OF FABRICATING NANOSTRUCTURE ARRAY AND DEVICE INCLUDING NANOSTRUCTURE ARRAY
    • 制造纳米结构阵列的方法和包括纳米结构阵列的器件
    • US20120258289A1
    • 2012-10-11
    • US13198892
    • 2011-08-05
    • Kyeong Seok LEEWon Mok KIMIn Ho KIM
    • Kyeong Seok LEEWon Mok KIMIn Ho KIM
    • B32B3/00H01L21/20G03F7/20
    • G03F7/2016G03F7/201
    • Provided are a method of fabricating a nanostructure array and a device including the nanostructure array. Nanoscale patterning is caused at an interface of a resist layer by light passed through a focusing layer. By such nanoscale patterning, a nanostructure array is fabricated on a substrate in various ways. As the focusing layer, an array of beads or lenses is used, and a pattern of the resist layer may include a nanoscale pore-opening and an undercut structure connected to a lower portion of the opening. The method facilitates adjustment of the size and shape of nanostructures and the interval between the nanostructures. Also, performance of the device including the nanostructure array can be improved. In particular, the method and device result in a sensor having improved sensitivity and reliability optimized for an environment and purpose to be used.
    • 提供制造纳米结构阵列的方法和包括纳米结构阵列的器件。 通过穿过聚焦层的光在抗蚀剂层的界面处引起纳米级图案化。 通过这种纳米尺度的图案化,以各种方式在衬底上制造纳米结构阵列。 作为聚焦层,使用珠或透镜的阵列,并且抗蚀剂层的图案可以包括连接到开口的下部的纳米级孔隙和底切结构。 该方法有助于调整纳米结构的尺寸和形状以及纳米结构之间的间隔。 此外,可以提高包括纳米结构阵列的器件的性能。 特别地,该方法和装置导致传感器具有针对要使用的环境和目的优化的改进的灵敏度和可靠性。