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    • 1. 发明申请
    • METHOD FOR HIGH VOLUME MANUFACTURING OF THIN FILM BATTERIES
    • 薄膜电池高容量制造方法
    • US20090148764A1
    • 2009-06-11
    • US12257049
    • 2008-10-23
    • Byung Sung KwakNety M. KrishnaKurt EisenbelserWilliam J. DauksherJon Candelaria
    • Byung Sung KwakNety M. KrishnaKurt EisenbelserWilliam J. DauksherJon Candelaria
    • H01M6/18B05D5/12
    • H01M10/0585H01M6/40H01M10/0436H01M10/052H01M2300/0068
    • Concepts and methods are provided to reduce the cost and complexity of thin film battery (TFB) high volume manufacturing by eliminating and/or minimizing the use of conventional physical (shadow) masks. Laser scribing and other alternative physical maskless patterning techniques meet certain or all of the patterning requirements. In one embodiment, a method of manufacturing thin film batteries comprises providing a substrate, depositing layers corresponding to a thin film battery structure on the substrate, the layers including, in order of deposition, a cathode, an electrolyte and an anode, wherein at least one of the deposited layers is unpatterned by a physical mask during deposition, depositing a protective coating, and scribing the layers and the protective coating. Further, the edges of the layers may be covered by an encapsulation layer. Furthermore, the layers may be deposited on two substrates and then laminated to form the thin film battery.
    • 提供了概念和方法,以通过消除和/或最小化常规物理(阴影)掩模的使用来降低薄膜电池(TFB)大批量制造的成本和复杂性。 激光划线和其他可选的物理无掩模图案化技术满足某些或所有图案化要求。 在一个实施例中,制造薄膜电池的方法包括提供衬底,在衬底上沉积与薄膜电池结构相对应的层,所述层按沉积顺序包括阴极,电解质和阳极,其中至少 沉积层中的一个在沉积期间由物理掩模未图案化,沉积保护涂层,以及划刻层和保护涂层。 此外,层的边缘可以被封装层覆盖。 此外,可以将这些层沉积在两个基板上,然后层压以形成薄膜电池。