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1. 发明授权

US5784161A Heterodyne interferometer arrangement with tunable lasers, a heterodyne interferometer, a comparison interferometer and a reference interferometer 失效
标题翻译：具有可调激光器的外差干涉仪布置，外差干涉仪，比较干涉仪和参考干涉仪
公开(公告)号：US5784161A
公开(公告)日：1998-07-21
申请号：US668263
申请日：1996-06-20
申请人： Karl-Heinz Bechstein , Beate Moeller , Klaus Dieter Salewski , Andreas Wolfram
发明人： Karl-Heinz Bechstein , Beate Moeller , Klaus Dieter Salewski , Andreas Wolfram
IPC分类号： G01B9/02 , G01J9/04
CPC分类号： G01B9/02004 , G01B9/02003 , G01B9/02007 , G01B9/02027 , G01B9/02069 , G01J9/04 , G01B2290/45 , G01B2290/60 , G01B2290/70
摘要： The present invention is directed to a heterodyne interferometer arrangement with tunable laser light sources for absolute distance measurement. The phase angle changes which occur in the synthetic interference signals when varying the laser frequencies are recorded and evaluated. The arrangement also enables error-free distance measurement in the event of a change in the mathematical sign of the phase changes due to frequency jitter.
摘要翻译：本发明涉及一种具有可调激光源的绝对距离测量的外差干涉仪装置。记录和评估在改变激光频率时在合成干涉信号中发生的相位角变化。在由于频率抖动引起的相位变化的数学符号发生变化的情况下，该装置还能够实现无误差距离测量。

2. 发明授权

US5781295A Interferometer for absolute distance measurement 失效
标题翻译：用于绝对距离测量的干涉仪
公开(公告)号：US5781295A
公开(公告)日：1998-07-14
申请号：US693624
申请日：1996-08-08
申请人： Werner Fuchs , Andreas Wolfram , Karl-Heinz Bechstein , Klaus Dieter Salewski
发明人： Werner Fuchs , Andreas Wolfram , Karl-Heinz Bechstein , Klaus Dieter Salewski
IPC分类号： G01B9/02
CPC分类号： G01B9/02004 , G01B9/02003 , G01B9/02007 , G01B2290/60
摘要： An interferometer for absolute distance measurement with two lasers, one of which is tunable with respect to frequency. A device for collinear superposition of the laser beams is arranged downstream of the lasers. Further, interferometer units are provided whose optical path lengths differ from one another. An individual acousto-optical modulator (AOM) is arranged downstream of the device for superposing the beams. Light-conducting elements for guiding the beams are arranged between the AOM, between the AOM and at least one first beam splitter arranged downstream of the AOM, and between the light outputs of the first beam splitter and the light inputs of one or more interferometer units arranged downstream and/or within these interferometer units.
摘要翻译：用两个激光器进行绝对距离测量的干涉仪，其中一个可以相对于频率调节。激光束的共线叠加装置设置在激光器的下游。此外，提供其光路长度彼此不同的干涉仪单元。单独的声光调制器（AOM）被布置在用于叠加梁的装置的下游。用于引导光束的导光元件布置在AOM之间，在AOM和布置在AOM下游的至少一个第一分束器之间以及第一分束器的光输出和一个或多个干涉仪单元的光输入之间布置在这些干涉仪单元的下游和/或内部。

3. 发明授权

US5715057A Reference interferometer with variable wavelength and folded measurement beam path 失效
标题翻译：具有可变波长和折叠测量光束路径的参考干涉仪
公开(公告)号：US5715057A
公开(公告)日：1998-02-03
申请号：US666245
申请日：1996-06-20
申请人： Karl-Heinz Bechstein , Beate Moeller , Klaus-Dieter Salewski
发明人： Karl-Heinz Bechstein , Beate Moeller , Klaus-Dieter Salewski
IPC分类号： G01B9/02
CPC分类号： G01B9/02004 , G01B9/02056
摘要： The invention is directed to a reference interferometer with variable wavelength, with an interferometer splitter, a reference beam path, and a folded measurement beam path passing between two plane mirrors. At least one spacer element 10 is provided for realizing a fixed position of the plane mirrors relative to one another. The two plane mirrors are arranged in a plurality of planes in a defined manner in relation to one another such that a light beam coming from the interferometer splitter and coupled into the space between the plane mirrors at an entrance point at a slight angle is reflected repeatedly at the plane mirrors, and the reflection points lie along a parabola on the surfaces of the plane mirrors. A retroreflector is arranged downstream of the first plane mirror in such a way that the light beam striking it can be returned to the entrance point or in the vicinity thereof along the same path or almost the same path.
摘要翻译：本发明涉及具有可变波长的参考干涉仪，其具有干涉仪分离器，参考光束路径和经过两个平面镜之间的折叠测量光束路径。提供至少一个间隔元件10用于实现平面镜相对于彼此的固定位置。两个平面镜以相对于彼此限定的方式布置在多个平面中，使得来自干涉仪分离器的光束以小角度在入射点处被耦合到平面镜之间的空间中被反复反射在平面镜上，反射点位于平面镜的表面上的抛物线上。后向反射器布置在第一平面镜的下游，使得撞击它的光束可以沿着相同的路径或几乎相同的路径返回到入口点或其附近。

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