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    • 5. 发明授权
    • Focused ion beam system
    • 聚焦离子束系统
    • US06459082B1
    • 2002-10-01
    • US09611995
    • 2000-07-07
    • Kiyoshi Sakaguchi
    • Kiyoshi Sakaguchi
    • H01J3708
    • H01J37/08H01J37/3056
    • There is disclosed a focused ion beam (FIB) system which has an ion gun equipped with no suppressor electrode but which produces a regulated emission current. The extraction voltage is controlled to regulate the emission current. The FIB system has a control system that controls the extraction voltage as a function of (i) the difference between a measured current and a target current, (ii) the accumulated emission time from the last flashing of an emitter to the present time, and (iii) an accumulated emission pause time during which no emission is performed.
    • 公开了一种聚焦离子束(FIB)系统,其具有不具有抑制电极但产生稳定的发射电流的离子枪。 控制提取电压以调节发射电流。 FIB系统具有控制系统,其控制提取电压作为(i)测量电流和目标电流之间的差异的函数,(ii)从发射器的最后闪烁到当前时间的累积发射时间,以及 (iii)不进行排放的累计排放暂停时间。