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1. 发明授权

US6024814A Method for processing ingots 失效
标题翻译：锭的加工方法
公开(公告)号：US6024814A
公开(公告)日：2000-02-15
申请号：US753387
申请日：1996-11-26
申请人： Yoshiaki Banzawa , Nobuaki Hayashi , Kiyoakira Shimizu
发明人： Yoshiaki Banzawa , Nobuaki Hayashi , Kiyoakira Shimizu
IPC分类号： B28D5/00 , B32B31/00
CPC分类号： B28D5/0082 , Y10S156/942 , Y10T156/1052 , Y10T156/1089 , Y10T156/12 , Y10T156/125 , Y10T156/1317 , Y10T156/1761 , Y10T156/1776 , Y10T156/1978
摘要： A method for connecting a cylindrical ingot to a support plate includes measuring a crystal orientation of the ingot based on a diffraction of x-rays, rotating the ingot about a center axis based on the crystal orientation so that a center axis of the ingot is held parallel to a first plane and an orientation axis based on the crystal orientation is placed in a plane parallel to the first plane, adhering an intermediate plate to the ingot, adjusting a position of one of the support plate and the ingot in a plane parallel to the first plane based on the crystal orientation so that a mounting axis of the support plate is in a specific relationship with the orientation axis, and attaching the support plate to the intermediate plate.
摘要翻译：用于将圆柱形锭连接到支撑板的方法包括基于X射线的衍射测量锭的晶体取向，基于晶体取向使锭围绕中心轴旋转，使得锭的中心轴保持平行于第一平面和基于晶体取向的取向轴被放置在与第一平面平行的平面中，将中间板粘附到锭，将支撑板和锭中的一个的位置调整在平行于基于晶体取向的第一平面，使得支撑板的安装轴线与取向轴线具有特定关系，并将支撑板附接到中间板。

2. 发明授权

US06182729B2 System and method for processing ingots 失效
标题翻译：锭的加工系统及方法
公开(公告)号：US06182729B2
公开(公告)日：2001-02-06
申请号：US09166949
申请日：1998-01-29
申请人： Yoshiaki Banzawa , Nobuaki Hayashi , Kiyoakira Shimizu
发明人： Yoshiaki Banzawa , Nobuaki Hayashi , Kiyoakira Shimizu
IPC分类号： B32B3100
CPC分类号： B28D5/0082 , Y10S156/942 , Y10T156/1052 , Y10T156/1089 , Y10T156/12 , Y10T156/125 , Y10T156/1317 , Y10T156/1761 , Y10T156/1776 , Y10T156/1978
摘要： An apparatus for manufacturing a plurality of wafers by slicing a cylindrical ingot with a wire saw. The apparatus includes a measuring device for measuring the crystal orientation of the ingot; an adhering device for adhering a support to the surface of the ingot based on the orientation where the support includes an intermediate plate and a support plate, where the support plate is adapted to fit the wire saw, and where the adhering device includes an auxiliary adhering element for adhering the intermediate plate to the surface of the ingot and an adhering element for adhering the support plate to the intermediate plate; a dryer for drying and solidifying an adhesive applied between the ingot and the intermediate plate and an adhesive applied between the intermediate plate and the support plate; and the wire saw for slicing the ingot into the plurality of wafers while the ingot is supported on the support. The apparatus may include stockers for storing the ingot and transferring devices for transferring the ingot within the apparatus.
摘要翻译：一种通过用线锯切割圆柱形锭来制造多个晶片的装置。该装置包括用于测量锭的晶体取向的测量装置; 基于载体包括中间板和支撑板的取向，将载体粘附到锭的表面的粘合装置，其中支撑板适于装配线锯，并且其中粘附装置包括辅助粘附用于将中间板粘附到锭的表面的元件和用于将支撑板粘附到中间板的粘合元件; 用于干燥和固化施加在锭和中间板之间的粘合剂的干燥器以及施加在中间板和支撑板之间的粘合剂; 以及用于将锭切割成多个晶片的线锯，同时该锭被支撑在支撑件上。该装置可以包括用于存储锭的储料器和用于在装置内转移锭的转移装置。

3. 发明授权

US6056031A System and method for processing ingots 有权
标题翻译：锭的加工系统及方法
公开(公告)号：US6056031A
公开(公告)日：2000-05-02
申请号：US186929
申请日：1998-11-06
申请人： Yoshiaki Banzawa , Nobuaki Hayashi , Kiyoakira Shimizu
发明人： Yoshiaki Banzawa , Nobuaki Hayashi , Kiyoakira Shimizu
IPC分类号： B28D5/00 , B32B31/00
CPC分类号： B28D5/0082 , Y10S156/942 , Y10T156/1052 , Y10T156/1089 , Y10T156/12 , Y10T156/125 , Y10T156/1317 , Y10T156/1761 , Y10T156/1776 , Y10T156/1978
摘要： An apparatus for connecting a cylindrical ingot to a support plate includes means for measuring a crystal orientation of the ingot based on a diffraction of x-rays, means for rotating the ingot about a center axis based on the crystal orientation so that a center axis of the ingot is held parallel to a first plane and an orientation axis based on the crystal orientation is placed in a plane parallel to the first plane, means for adhering an intermediate plate to the ingot, means for adjusting a position of one of the support plate and the ingot in a plane parallel to the first plane based on the crystal orientation so that a mounting axis of the support plate is in a specific relationship with the orientation axis, and means for attaching the support plate to the intermediate plate.
摘要翻译：用于将圆柱形铸锭连接到支撑板的装置包括：用于基于X射线的衍射来测量锭的晶体取向的装置，用于基于晶体取向使铸锭围绕中心轴旋转的装置，所述锭保持平行于第一平面，并且基于所述晶体取向的取向轴被放置在平行于所述第一平面的平面中，用于将中间板粘附到所述锭的装置，用于调节所述支撑板之一的位置的装置并且所述锭在与所述第一平面平行的平面中，基于所述晶体取向使得所述支撑板的安装轴线与所述定向轴线具有特定关系，以及用于将所述支撑板附接到所述中间板的装置。

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