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1. 发明授权

US08550710B2 Sample cell for fluorescent X-ray analysis and sample cell assembly instrument 失效
标题翻译：用于荧光X射线分析和样品池组装仪器的样品池
公开(公告)号：US08550710B2
公开(公告)日：2013-10-08
申请号：US12900171
申请日：2010-10-07
申请人： Mayuko Kishida , Shintaro Komatani , Sumito Ohzawa , Takuji Kurozumi , Satoru Goto , Takashi Kinba , Kimihiko Arimoto
发明人： Mayuko Kishida , Shintaro Komatani , Sumito Ohzawa , Takuji Kurozumi , Satoru Goto , Takashi Kinba , Kimihiko Arimoto
IPC分类号： G01N23/223 , B65D6/00 , B65D8/14
CPC分类号： G01N23/223 , G01N2223/076 , G01N2223/307
摘要： In a sample cell that is sealed with an X-ray transmission sheet after a sample such as a liquid fuel or the like is contained therein, when an internal pressure is increased, a cup end surface is deformed so as to increase an internal capacity of the sample cell before the X-ray transmission sheet serving as a window part is expanded. The cup end surface is formed by folding a film-like material and, when the internal pressure of the sample cell is increased, the cup end surface is unfolded outwardly of the sample cell to increase the internal capacity of the sample cell. The increase in pressure is relieved by the increase in capacity, and the expansion of the X-ray transmission sheet is thereby prevented.
摘要翻译：在容纳有液体燃料等样品之后，用X射线透射片密封的样品池中，当内压增加时，杯端面变形，从而增加内部容量在作为窗口部分的X射线透射片之前的样品池被扩大。通过折叠膜状材料形成杯端面，并且当样品池的内部压力增加时，杯端面在样品池外展开，以增加样品池的内部容量。通过容量的增加来减轻压力的增加，由此防止了X射线透射片的膨胀。

2. 发明申请

US20110317166A1 OPTICAL MEASUREMENT DEVICE 有权
标题翻译：光学测量装置
公开(公告)号：US20110317166A1
公开(公告)日：2011-12-29
申请号：US13170057
申请日：2011-06-27
申请人： Kimihiko Arimoto , So Takagi
发明人： Kimihiko Arimoto , So Takagi
IPC分类号： G01N21/59
CPC分类号： G01N21/0303 , G01N21/03 , G01N21/59
摘要： An optical measurement device is adapted to measure characteristics of a measurement targeted fluid based on a transmitted inspection light. The device comprises a cell having an internal space for accommodating the measurement targeted fluid to flow therein and having a pair of opposing through holes for transmitting the inspection light, each of the through holes sealed with a transparent member. The device includes a projection optical system member having a port for projecting the inspection light and a light-receiving optical system member having a port for receiving the inspection light transmitted through the internal space. A base member is provided for supporting the cell, the projection optical system member, and the light-receiving optical system member in a configuration with gaps between the cell and the respective optical system members to accommodate movement in a predetermined range along a direction perpendicular to an optical axis of the inspection light.
摘要翻译：光学测量装置适于基于传输的检查光来测量测量目标流体的特性。该装置包括具有用于容纳测量对象流体在其中流动的内部空间的单元，并且具有用于透射检查光的一对相对的通孔，每个通孔用透明构件密封。该装置包括具有用于投射检查光的端口的投影光学系统构件和具有用于接收透过内部空间的检查光的端口的光接收光学系统构件。提供了一种基座构件，用于将电池，投影光学系统构件和受光光学系统构件支撑在具有电池单元和各个光学系统构件之间的间隙的构造中，以适应沿着垂直于电池的方向在预定范围内的移动检查光的光轴。

3. 发明申请

US20110043792A1 ANALYZER 有权
标题翻译：分析仪
公开(公告)号：US20110043792A1
公开(公告)日：2011-02-24
申请号：US12858709
申请日：2010-08-18
申请人： Kimihiko ARIMOTO , Kunio OHTSUKI , Yoko NAKAI
发明人： Kimihiko ARIMOTO , Kunio OHTSUKI , Yoko NAKAI
IPC分类号： G01N21/00
CPC分类号： G01J3/02 , G01J3/0208 , G01J3/0218 , G01J3/0232
摘要： This invention is to make the detection sensitivities as even as possible among a plurality of specimens to be inspected in an analyzer that leads light transmitted from the plurality of specimens to be inspected to a single spectrometer via optical fibers, the analyzer includes first and second light guide members provided for every first and second specimen to be inspected so as to lead the light obtained from each of the specimens to be inspected to a photo-detecting part, and light projection side end portions of a plurality of optical fiber elements composing the first and second light guide members are arranged in mixture.
摘要翻译：本发明是为了使检测灵敏度尽可能地在通过光纤将检测到的多个试样的光传输到单个光谱仪的分析仪中进行检查的多个试样中，检测器包括第一和第二光引导构件，其被设置用于要检查的每个第一和第二样本，以将从每个待检查的样本获得的光引导到光检测部分;以及构成第一检测部件的多个光纤元件的光投射侧端部并且第二导光构件被布置成混合。

4. 发明授权

US08305574B2 Analyzer 有权
标题翻译：分析仪
公开(公告)号：US08305574B2
公开(公告)日：2012-11-06
申请号：US12858709
申请日：2010-08-18
申请人： Kimihiko Arimoto , Kunio Ohtsuki , Yoko Nakai
发明人： Kimihiko Arimoto , Kunio Ohtsuki , Yoko Nakai
IPC分类号： G01J3/427
CPC分类号： G01J3/02 , G01J3/0208 , G01J3/0218 , G01J3/0232
摘要： This invention is to make the detection sensitivities as even as possible among a plurality of specimens to be inspected in an analyzer that leads light transmitted from the plurality of specimens to be inspected to a single spectrometer via optical fibers, the analyzer includes first and second light guide members provided for every first and second specimen to be inspected so as to lead the light obtained from each of the specimens to be inspected to a photo-detecting part, and light projection side end portions of a plurality of optical fiber elements composing the first and second light guide members are arranged in mixture.
摘要翻译：本发明是为了使检测灵敏度尽可能地在通过光纤将检测到的多个试样的光传输到单个光谱仪的分析仪中进行检查的多个试样中，检测器包括第一和第二光引导构件，其被设置用于要检查的每个第一和第二样本，以将从每个待检查的样本获得的光引导到光检测部分;以及构成第一检测部件的多个光纤元件的光投射侧端部并且第二导光构件被布置成混合。

5. 发明申请

US20110299067A1 OPTICAL MEASUREMENT CELL 失效
标题翻译：光学测量单元
公开(公告)号：US20110299067A1
公开(公告)日：2011-12-08
申请号：US13153228
申请日：2011-06-03
申请人： Issei Yokoyama , Kimihiko Arimoto
发明人： Issei Yokoyama , Kimihiko Arimoto
IPC分类号： G01J1/00
CPC分类号： G01N21/05 , G01N21/09 , G01N2021/0346 , G01N2021/058
摘要： To make it possible to alter a cell length with reduction of a manufacturing cost so that a spacer can be securely positioned at a desired position, a cell includes: a pair of optical windows sandwiching a flow channel; a cell body provided with an accommodating recess and a solution introduction part and a solution deriving part; a pair of light transmitting members in the accommodating recess and forming the pair of optical windows; a spacer defining a distance between the opposing surfaces of the pair of light transmitting members; and a pressing mechanism for pressing the light transmitting members and the spacer toward the bottom surface of the accommodating recess so as to form the flow channel, wherein a positioning recess having a shape corresponding to the spacer is provided on at least one of the opposing surfaces and the spacer is fitted therein.
摘要翻译：为了能够以减少制造成本来改变电池长度，从而可以将间隔件牢固地定位在期望的位置，电池包括：夹持流动通道的一对光学窗口; 设置有容纳凹部的池体，溶液导入部和溶液导出部; 一对在所述容纳凹部中的透光构件，并形成所述一对光学窗; 限定所述一对光透射构件的相对表面之间的距离的间隔件; 以及用于将光透射构件和间隔件朝向容纳凹部的底表面按压以形成流动通道的按压机构，其中具有与间隔件相对应的形状的定位凹槽设置在至少一个相对表面并且间隔件装配在其中。

6. 发明授权

US07327444B2 Substrate inspection apparatus and method 有权
标题翻译：基板检查装置及方法
公开(公告)号：US07327444B2
公开(公告)日：2008-02-05
申请号：US11196947
申请日：2005-08-04
申请人： Nobuyuki Naka , Akihiro Katanishi , Masaaki Magari , Yoshiyuki Nakajima , Kimihiko Arimoto
发明人： Nobuyuki Naka , Akihiro Katanishi , Masaaki Magari , Yoshiyuki Nakajima , Kimihiko Arimoto
IPC分类号： G01B11/06 , G01N21/21 , G01N21/65
CPC分类号： H01L22/20 , G01N21/65 , G01N21/9501 , H01L22/12
摘要： The present invention provides a method and substrate examining device that sequentially and automatically measures at least the thickness and the internal stress of the thin film at a predetermined measurement point on the surface of every manufactured semiconductor substrate to perform quality control on each substrate, and reliably recognizes the cause of defects to improve productivity. The examining device and method accurately analyzes the correlation between film thickness and stress to establish the manufacturing processes necessary for manufacturing a semiconductor substrate of higher performance, and measures the distribution of a physical quantity such as internal stress, index of refraction, and composition of the semiconductor substrate in the film thickness direction, without being influenced by change in ambient environmental temperature thereby further improving examination precision.
摘要翻译：本发明提供了一种方法和基板检查装置，其在每个制造的半导体基板的表面上的预定测量点处至少依次测量薄膜的厚度和内部应力，以对每个基板执行质量控制，并且可靠地认识到缺陷的原因，以提高生产力。检查装置和方法准确地分析膜厚和应力之间的相关性，以建立制造具有更高性能的半导体衬底所需的制造工艺，并且测量诸如内应力，折射率和物理量的物理量的分布半导体衬底在膜厚度方向上，而不受周围环境温度的变化的影响，从而进一步提高检查精度。

7. 发明申请

US20060038980A1 Substrate inspection apparatus and method 有权
标题翻译：基板检查装置及方法
公开(公告)号：US20060038980A1
公开(公告)日：2006-02-23
申请号：US11196947
申请日：2005-08-04
申请人： Nobuyuki Naka , Akihiro Katanishi , Masaaki Magari , Yoshiyuki Nakajima , Kimihiko Arimoto
发明人： Nobuyuki Naka , Akihiro Katanishi , Masaaki Magari , Yoshiyuki Nakajima , Kimihiko Arimoto
IPC分类号： G01N21/00
CPC分类号： H01L22/20 , G01N21/65 , G01N21/9501 , H01L22/12
摘要： The present invention provides a method and substrate examining device that sequentially and automatically measures at least the thickness and the internal stress of the thin film at a predetermined measurement point on the surface of every manufactured semiconductor substrate to perform quality control on each substrate, and reliably recognizes the cause of defects to improve productivity. The examining device and method accurately analyzes the correlation between film thickness and stress to establish the manufacturing processes necessary for manufacturing a semiconductor substrate of higher performance, and measures the distribution of a physical quantity such as internal stress, index of refraction, and composition of the semiconductor substrate in the film thickness direction, without being influenced by change in ambient environmental temperature thereby further improving examination precision.
摘要翻译：本发明提供了一种方法和基板检查装置，其在每个制造的半导体基板的表面上的预定测量点处至少依次测量薄膜的厚度和内部应力，以对每个基板执行质量控制，并且可靠地认识到缺陷的原因，以提高生产力。检查装置和方法准确地分析膜厚和应力之间的相关性，以建立制造具有更高性能的半导体衬底所需的制造工艺，并且测量诸如内应力，折射率和物理量的物理量的分布半导体衬底在膜厚度方向上，而不受周围环境温度的变化的影响，从而进一步提高检查精度。

8. 发明授权

US08699031B2 Optical measurement device 有权
标题翻译：光学测量装置
公开(公告)号：US08699031B2
公开(公告)日：2014-04-15
申请号：US13170057
申请日：2011-06-27
申请人： Kimihiko Arimoto , So Takagi
发明人： Kimihiko Arimoto , So Takagi
IPC分类号： G01N21/00 , G01N21/03
CPC分类号： G01N21/0303 , G01N21/03 , G01N21/59
摘要： An optical measurement device is adapted to measure characteristics of a measurement targeted fluid based on a transmitted inspection light. The device comprises a cell having an internal space for accommodating the measurement targeted fluid to flow therein and having a pair of opposing through holes for transmitting the inspection light, each of the through holes sealed with a transparent member. The device includes a projection optical system member having a port for projecting the inspection light and a light-receiving optical system member having a port for receiving the inspection light transmitted through the internal space. A base member is provided for supporting the cell, the projection optical system member, and the light-receiving optical system member in a configuration with gaps between the cell and the respective optical system members to accommodate movement in a predetermined range along a direction perpendicular to an optical axis of the inspection light.
摘要翻译：光学测量装置适于基于传输的检查光来测量测量目标流体的特性。该装置包括具有用于容纳测量对象流体在其中流动的内部空间的单元，并且具有用于透射检查光的一对相对的通孔，每个通孔用透明构件密封。该装置包括具有用于投射检查光的端口的投影光学系统构件和具有用于接收透过内部空间的检查光的端口的光接收光学系统构件。提供了一种基座构件，用于将电池，投影光学系统构件和受光光学系统构件支撑在具有电池单元和各个光学系统构件之间的间隙的构造中，以适应沿着垂直于电池的方向在预定范围内的移动检查光的光轴。

9. 发明授权

US08390812B2 Optical measurement cell 失效
标题翻译：光学测量单元
公开(公告)号：US08390812B2
公开(公告)日：2013-03-05
申请号：US13153228
申请日：2011-06-03
申请人： Issei Yokoyama , Kimihiko Arimoto
发明人： Issei Yokoyama , Kimihiko Arimoto
IPC分类号： G01N21/00
CPC分类号： G01N21/05 , G01N21/09 , G01N2021/0346 , G01N2021/058
摘要： To make it possible to alter a cell length with reduction of a manufacturing cost so that a spacer can be securely positioned at a desired position, a cell includes: a pair of optical windows sandwiching a flow channel; a cell body provided with an accommodating recess and a solution introduction part and a solution deriving part; a pair of light transmitting members in the accommodating recess and forming the pair of optical windows; a spacer defining a distance between the opposing surfaces of the pair of light transmitting members; and a pressing mechanism for pressing the light transmitting members and the spacer toward the bottom surface of the accommodating recess so as to form the flow channel, wherein a positioning recess having a shape corresponding to the spacer is provided on at least one of the opposing surfaces and the spacer is fitted therein.
摘要翻译：为了能够以减少制造成本来改变电池长度，从而可以将间隔件牢固地定位在期望的位置，电池包括：夹持流动通道的一对光学窗口; 设置有容纳凹部的池体，溶液导入部和溶液导出部; 一对在所述容纳凹部中的透光构件，并形成所述一对光学窗; 限定所述一对光透射构件的相对表面之间的距离的间隔件; 以及用于将光透射构件和间隔件朝向容纳凹部的底表面按压以形成流动通道的按压机构，其中具有与间隔件相对应的形状的定位凹槽设置在至少一个相对表面并且间隔件装配在其中。

10. 发明申请

US20110085638A1 SAMPLE CELL FOR FLUORESCENT X-RAY ANALYSIS AND SAMPLE CELL ASSEMBLY INSTRUMENT 失效
标题翻译：用于荧光X射线分析和样品细胞装配仪的样品池
公开(公告)号：US20110085638A1
公开(公告)日：2011-04-14
申请号：US12900171
申请日：2010-10-07
申请人： Mayuko Kishida , Shintaro Komatani , Sumito Ohzawa , Takuji Kurozumi , Satoru Goto , Takashi Kinba , Kimihiko Arimoto
发明人： Mayuko Kishida , Shintaro Komatani , Sumito Ohzawa , Takuji Kurozumi , Satoru Goto , Takashi Kinba , Kimihiko Arimoto
IPC分类号： G01N23/223 , H05G1/00
CPC分类号： G01N23/223 , G01N2223/076 , G01N2223/307
摘要： In a sample cell that is sealed with an X-ray transmission sheet after a sample such as a liquid fuel or the like is contained therein, when an internal pressure is increased, a cup end surface is deformed so as to increase an internal capacity of the sample cell before the X-ray transmission sheet serving as a window part is expanded. The cup end surface is formed by folding a film-like material and, when the internal pressure of the sample cell is increased, the cup end surface is unfolded outwardly of the sample cell to increase the internal capacity of the sample cell. The increase in pressure is relieved by the increase in capacity, and the expansion of the X-ray transmission sheet is thereby prevented.
摘要翻译：在容纳有液体燃料等样品之后，用X射线透射片密封的样品池中，当内压增加时，杯端面变形，从而增加内部容量在作为窗口部分的X射线透射片之前的样品池被扩大。通过折叠膜状材料形成杯端面，并且当样品池的内部压力增加时，杯端面在样品池外展开，以增加样品池的内部容量。通过容量的增加来减轻压力的增加，由此防止了X射线透射片的膨胀。

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