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    • 1. 发明授权
    • High performance one-transistor DRAM cell device and manufacturing method thereof
    • 高性能单晶体管DRAM单元器件及其制造方法
    • US08143656B2
    • 2012-03-27
    • US12200929
    • 2008-08-28
    • Jong-Ho LeeKi-Heung Park
    • Jong-Ho LeeKi-Heung Park
    • H01L29/94
    • H01L29/7841G11C11/404G11C2211/4016H01L27/108H01L27/10802
    • Provided are a high-performance one-transistor floating-body DRAM cell device and a manufacturing method thereof. The one-transistor floating-body DRAM cell device includes: a semiconductor substrate; a gate stack which is formed on the semiconductor substrate; a control electrode which is formed on the semiconductor substrate and surrounded by the gate stack; a floating body which is formed on the control electrode that is surrounded by the gate stack; source/drain which are formed at left and right sides of the floating body; an insulating layer which insulates the source/drain from the semiconductor substrate and the control electrode; a gate insulating layer which is formed on the floating body and the source/drain; and a gate electrode which is formed on the gate insulating layer. In the cell device having a double-gate structure, charges can be stored in a non-volatile manner by the control electrodes, so that it is possible to improve a degree of integration of devices, a uniformity of characteristic, and a sensing margin.
    • 提供一种高性能单晶体体浮体DRAM单元装置及其制造方法。 单晶体体浮体DRAM单元装置包括:半导体基板; 形成在所述半导体基板上的栅极叠层; 控制电极,其形成在所述半导体基板上并被所述栅极堆叠包围; 浮动体,其形成在所述控制电极上,所述浮体被所述栅极叠层包围; 在浮体的左侧和右侧形成的源极/漏极; 绝缘层,其使源极/漏极与半导体衬底和控制电极绝缘; 形成在浮体和源极/漏极上的栅极绝缘层; 以及形成在栅极绝缘层上的栅电极。 在具有双栅极结构的电池装置中,可以通过控制电极以非易失性的方式存储电荷,使得可以提高器件的集成度,特性的均匀性和感测裕度。
    • 3. 发明申请
    • HIGH PERFORMANCE ONE-TRANSISTOR DRAM CELL DEVICE AND MANUFACTURING METHOD THEREOF
    • 高性能单晶体管DRAM器件及其制造方法
    • US20100102372A1
    • 2010-04-29
    • US12200929
    • 2008-08-28
    • Jong-Ho LeeKi-Heung Park
    • Jong-Ho LeeKi-Heung Park
    • H01L27/108H01L21/84
    • H01L29/7841G11C11/404G11C2211/4016H01L27/108H01L27/10802
    • Provided are a high-performance one-transistor floating-body DRAM cell device and a manufacturing method thereof. The one-transistor floating-body DRAM cell device includes: a semiconductor substrate; a gate stack which is formed on the semiconductor substrate; a control electrode which is formed on the semiconductor substrate and surrounded by the gate stack; a floating body which is formed on the control electrode that is surrounded by the gate stack; source/drain which are formed at left and right sides of the floating body; an insulating layer which insulates the source/drain from the semiconductor substrate and the control electrode; a gate insulating layer which is formed on the floating body and the source/drain; and a gate electrode which is formed on the gate insulating layer. In the cell device having a double-gate structure, charges can be stored in a non-volatile manner by the control electrodes, so that it is possible to improve a degree of integration of devices, a uniformity of characteristic, and a sensing margin.
    • 提供一种高性能单晶体体浮体DRAM单元装置及其制造方法。 单晶体体浮体DRAM单元装置包括:半导体基板; 形成在所述半导体基板上的栅极叠层; 控制电极,其形成在所述半导体基板上并被所述栅极堆叠包围; 浮动体,其形成在所述控制电极上,所述浮体被所述栅极叠层包围; 在浮体的左侧和右侧形成的源极/漏极; 绝缘层,其使源极/漏极与半导体衬底和控制电极绝缘; 形成在浮体和源极/漏极上的栅极绝缘层; 以及形成在栅极绝缘层上的栅电极。 在具有双栅极结构的电池装置中,可以通过控制电极以非易失性的方式存储电荷,使得可以提高器件的集成度,特性的均匀性和感测裕度。