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    • 4. 发明申请
    • Carbon nanotube manufacturing apparatus and method for manufacturing carbon nanotube
    • 碳纳米管制造装置及其制造方法
    • US20070031317A1
    • 2007-02-08
    • US10564408
    • 2003-07-18
    • Norio AkamatsuHiroshi NishikadoKensuke Yano
    • Norio AkamatsuHiroshi NishikadoKensuke Yano
    • D01F9/12
    • B82Y40/00B82Y30/00C01B32/162C01B2202/08
    • A carbon nanotube manufacturing method is employed, in which a carbon nanotube manufacturing apparatus (1000, 2000, 3000) comprises an ionizing means (e.g., a negative ion generator (10)) for ionizing a vapor of a certain carbon-containing compound, an electric field generating means (e.g., a direct-current power supply (21), a cathode (22) and an anode (23)) for generating an electric field and a heating means (e.g., a high-frequency heater (30)) for heating a growth substrate (50, 55) disposed within the electric field generated by the electric field generating means, and in which a vaporized gas of the carbon-containing compound, the vaporized gas being ionized, is caused to pass through the electric field and to come into contact with the heated growth substrate, so that a well aligned growth of carbon nanotube (4) on the growth substrate can be obtained.
    • 使用碳纳米管制造方法,其中碳纳米管制造装置(1000,2000,3000)包括用于电离某些含碳化合物的蒸气的电离装置(例如,负离子发生器(10)), 用于产生电场的电场产生装置(例如,直流电源(21),阴极(22)和阳极(23))和加热装置(例如,高频加热器)), 用于加热设置在由电场产生装置产生的电场内的生长衬底(50,55),并且使含碳化合物的汽化气体(被电离的汽化气体)通过电场 并且与加热的生长衬底接触,从而可以获得生长衬底上的碳纳米管(4)的良好对准生长。