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1. 发明授权

US06651678B2 Method of manufacturing semiconductor device 失效
标题翻译：制造半导体器件的方法
公开(公告)号：US06651678B2
公开(公告)日：2003-11-25
申请号：US10124729
申请日：2002-04-18
申请人： Kenji Shintani , Mutumi Tuda , Junji Tanimura , Takahiro Maruyama , Ryoichi Yoshifuku
发明人： Kenji Shintani , Mutumi Tuda , Junji Tanimura , Takahiro Maruyama , Ryoichi Yoshifuku
IPC分类号： H01L21302
CPC分类号： H01L21/32137 , H01L21/28123
摘要： A method of etching a semiconductor device preventing tapering of a gate electrode edge includes a main etching of an electrode or wiring material supported by a dielectric film at a semiconductor substrate surface to expose the dielectric film. After the main etching step, residues of the electrode or the wiring material by sequentially etching utilizing a first gas mixture including a halogen-containing gas and an additive gas suppressing etching of the dielectric film by the halogen-containing gas, and in a second gas mixture gas including the halogen-containing gas and the additive gas and having the additive gas amount in a larger concentration than the first gas mixture.
摘要翻译：蚀刻半导体装置防止栅电极边缘变窄的方法包括在半导体衬底表面上由电介质膜支撑的电极或布线材料的主蚀刻以暴露电介质膜。在主蚀刻步骤之后，通过使用包含含卤素气体的第一气体混合物和通过含卤素气体抑制介电膜蚀刻的附加气体，并且在第二气体中依次蚀刻电极或布线材料的残留物包含含卤素气体和添加气体的混合气体，其添加气体量比第一气体混合物浓度大。

2. 发明授权

US06246041B1 Apparatus and method for measuring focusing characteristics of optical pickup and/or optical disc and apparatus and method for recording and/or reproducing optical disc 失效
标题翻译：用于测量光学拾取器和/或光盘的聚焦特性的装置和方法以及用于记录和/或再现光盘的装置和方法
公开(公告)号：US06246041B1
公开(公告)日：2001-06-12
申请号：US09182845
申请日：1998-10-29
申请人： Akihito Nakayama , Kenji Shintani , Shunsuke Kohama , Yukari Hashimoto
发明人： Akihito Nakayama , Kenji Shintani , Shunsuke Kohama , Yukari Hashimoto
IPC分类号： G02B2740
CPC分类号： G11B7/094 , G11B7/0945 , G11B2007/0006
摘要： A device for measuring focusing characteristics of an optical pickup and/or an optical disc capable of measuring characteristics of focusing states with high accuracy by a simplified circuit. An arithmetic-logic unit 12d controls an offset supplying circuit 23 for applying an offset voltage to a focusing servo control signal. This arithmetic-logic unit 12d detects an error rate of the playback data in such a state in which the focusing position of the laser light is deviated by a pre-set offset amount. The arithmetic-logic unit 12d sequentially varies the offset voltage to repeat the above processing for detecting the error rate. The arithmetic-logic unit 12d approximates the relationship of the error rate to the offset amount by a quadratic curve based on detected data. The offset amount which minimizes the error rate is found from this equation of approximation.
摘要翻译：一种用于测量能够通过简化电路以高精度测量聚焦状态的特性的光学拾取器和/或光盘的聚焦特性的装置。算术逻辑单元12d控制向聚焦伺服控制信号施加偏移电压的偏移供给电路23。该算术逻辑单元12d在激光的聚焦位置偏移预设偏移量的状态下检测回放数据的错误率。算术逻辑单元12d顺序地改变偏移电压，以重复上述用于检测错误率的处理。算术逻辑单元12d基于检测到的数据，通过二次曲线近似误差率与偏移量的关系。从这个近似方程式可以看出误差率最小化的偏移量。

3. 发明授权

US6020570A Plasma processing apparatus 失效
标题翻译：等离子体处理装置
公开(公告)号：US6020570A
公开(公告)日：2000-02-01
申请号：US3784
申请日：1998-01-07
申请人： Masakazu Taki , Hiroki Ootera , Tatsuo Oomori , Kazuyasu Nishikawa , Kenji Shintani
发明人： Masakazu Taki , Hiroki Ootera , Tatsuo Oomori , Kazuyasu Nishikawa , Kenji Shintani
IPC分类号： C23C16/50 , C23C16/511 , C23F4/00 , H01J37/32 , H01L21/302 , H01L21/3065 , H01L21/31 , H05H1/46 , B23K9/00
CPC分类号： H01J37/32229 , H01J37/321 , H05H1/46
摘要： A plasma is supplied from a plasma source to a space between an upper electrode plate and a lower electrode plate disposed opposite to and in parallel with the upper electrode plate when producing a plasma in the space between the electrode plates for plasma processing by applying radio-frequency power to the electrode plates. The plasma source produce a plasma by inductively coupled discharge, radio-frequency discharge or microwave discharge. A plasma processing apparatus is obtained which is capable of producing a parallel-plate plasma by discharge in a space of a relatively low pressure and is capable of processing a large diameter workpiece uniformly at a high processing rate.
摘要翻译：当在等离子体处理用电极板之间的空间中产生等离子体时，等离子体从等离子体源供给到与上电极板相对并平行设置的上电极板和下电极板之间的空间，向电极板施加频率功率。等离子体源通过电感耦合放电，射频放电或微波放电产生等离子体。得到等离子体处理装置，其能够通过在相对低压的空间中排放而产生平行板等离子体，并且能够以高处理速率均匀地处理大直径工件。

4. 发明授权

US4449213A Optical reading apparatus 失效
标题翻译：光学读取装置
公开(公告)号：US4449213A
公开(公告)日：1984-05-15
申请号：US330875
申请日：1981-12-15
申请人： Kazutaka Noborimoto , Keiji Maruta , Junichi Suzuki , Kenji Shintani
发明人： Kazutaka Noborimoto , Keiji Maruta , Junichi Suzuki , Kenji Shintani
IPC分类号： G02B7/04 , G11B7/08 , G11B7/09 , G11B21/02
CPC分类号： B82Y15/00 , G02B7/04 , G11B21/02 , G11B7/0932
摘要： A device for supporting and positioning the objective lens in an optical reading apparatus, such as, a video disc player, comprises a first pair of parallel leaf springs attached at one end thereof to a fixed support member for motion parallel to a record medium surface. A movable frame is attached to the other ends of the first springs, and a second pair of leaf springs movable perpendicularly to the record medium surface extend from the frame, the second springs being generally parallel to and between the first pair but with their faces perpendicular to those of the first pair. The objective lens is mounted at the free ends of the second pair of springs, and is movable electromagnetically in orthogonally related directions by means of coils and magnets associated with the objective lens and with the frame.
摘要翻译：用于将物镜支撑和定位在诸如视频盘播放器的光学读取装置中的装置包括：第一对平行板簧，其一端连接到固定的支撑构件，用于平行于记录介质表面运动。可移动框架附接到第一弹簧的另一端，并且可垂直于记录介质表面移动的第二对板簧从框架延伸，第二弹簧大致平行于第一对之间并且在第一对之间，但是它们的面垂直到第一对的那些。物镜安装在第二对弹簧的自由端，并通过与物镜相关联的线圈和磁体与框架在正交相关方向上以电磁方式移动。

5. 发明申请

US20070223792A1 PORTABLE TELEPHONE AND ELECTRONIC DEVICE 失效
标题翻译：便携式电话和电子设备
公开(公告)号：US20070223792A1
公开(公告)日：2007-09-27
申请号：US11690551
申请日：2007-03-23
申请人： Junji Morimoto , Kenji Shintani , Katsunori Ishii , Masashi Torimoto , Tsutomu Nagumo , Takashi Yamaguchi , Hidekazu Takahashi
发明人： Junji Morimoto , Kenji Shintani , Katsunori Ishii , Masashi Torimoto , Tsutomu Nagumo , Takashi Yamaguchi , Hidekazu Takahashi
IPC分类号： G06K9/00
CPC分类号： G06K9/00033 , G06K9/00919 , G06K2009/0006 , G06K2009/00932
摘要： A portable telephone and electronic device are provided. The portable telephone includes a casing having a first surface: a finger guide section that is provided in the first surface and guides a finger of a user to allow the finger to be placed so that a side portion of the finger faces the first surface; an illuminating section provided in the first surface so as to be adjacent to the finger guide section, the illuminating section being capable of radiating light of a predetermined wavelength that transmits through the placed finger; an imaging section provided in the casing so as to be spaced at a predetermined distance from the first surface with respect to a perpendicular direction, the imaging section being capable of imaging the light that has transmitted through the finger; and a control section that performs authentication of the user on the basis of an image obtained by the imaging.
摘要翻译：提供便携式电话和电子设备。便携式电话机包括具有第一表面的外壳，手指引导部分设置在第一表面中并且引导使用者的手指以允许手指放置成使得手指的侧部面向第一表面; 照明部，其设置在与所述手指引导部相邻的所述第一面上，所述照明部能够照射通过所述放置的手指透过的预定波长的光; 成像部，其设置在所述壳体中，以相对于垂直方向与所述第一表面间隔预定距离，所述成像部能够对已经透过所述手指的光进行成像; 以及基于通过成像获得的图像来执行用户的认证的控制部分。

6. 发明授权

US06929712B2 Plasma processing apparatus capable of evaluating process performance 失效
标题翻译：能够评估工艺性能的等离子体处理装置
公开(公告)号：US06929712B2
公开(公告)日：2005-08-16
申请号：US10235783
申请日：2002-09-06
申请人： Minoru Hanazaki , Keiichi Sugahara , Toshihiko Noguchi , Toshio Komemura , Masakazu Taki , Mutumi Tuda , Kenji Shintani
发明人： Minoru Hanazaki , Keiichi Sugahara , Toshihiko Noguchi , Toshio Komemura , Masakazu Taki , Mutumi Tuda , Kenji Shintani
IPC分类号： H05H1/00 , H01J37/32 , H01L21/3065 , H05H1/46 , H01L21/00 , C23C16/00
CPC分类号： H01J37/32082 , H01J37/32935
摘要： A high-frequency current detector of a plasma processing apparatus detects a high-frequency current produced when high-frequency power in the range that does not cause generation of plasma in a chamber is supplied from a high-frequency power supply source to the chamber. The high-frequency current detector outputs the detected high-frequency current to a computer. The computer compares the high-frequency current received from the high-frequency current detector with a reference high-frequency current. When the received high-frequency current matches the reference high-frequency current, the computer determines that the process performance is normal. Otherwise, the computer determines that the process performance is abnormal. In this way, high-frequency characteristics specific to the apparatus are detected and the process performance are evaluated based on the detected high-frequency characteristics.
摘要翻译：等离子体处理装置的高频电流检测器检测从高频电源向腔室供给不在室内产生等离子体的范围内的高频电力时产生的高频电流。高频电流检测器将检测到的高频电流输出到计算机。计算机将从高频电流检测器接收的高频电流与参考高频电流进行比较。当接收的高频电流与参考高频电流相匹配时，计算机确定处理性能正常。否则，计算机会确定进程性能异常。以这种方式，检测到对装置特有的高频特性，并且基于检测到的高频特性来评估处理性能。

7. 发明授权

US07112746B2 Data transmission cable 有权
公开(公告)号：US07112746B2
公开(公告)日：2006-09-26
申请号：US10531666
申请日：2003-10-08
申请人： Nobuhiko Tsukahara , Yoichi Toriumi , Kenji Shintani , Hirofumi Hashimoto
发明人： Nobuhiko Tsukahara , Yoichi Toriumi , Kenji Shintani , Hirofumi Hashimoto
IPC分类号： H01B7/08
CPC分类号： H02G3/305 , G02B6/4471 , H01B7/08 , H01B7/40 , H02G3/26
摘要： There is provided a cable for data transmission which can be wired and constructed without damaging a surface of a wall, ceiling, floor or the like, without using any clamps and which does not degrade appearance of a wired space, and further, allows the wiring construction of the cable provided with a plurality of core wires in a state of less crosstalk. A cable (1) for data transmission includes a core wire (2) having a medium that transmits data and a coating member (4) having adhesiveness and coating at least part of the core wire (2). In this way, because of the adhesiveness of the coating member (4), it is easy to stick the cable onto a wall (6) or the like. Moreover, since a wiring construction of the cable on a surface of the wall (6) or the like without using a clamp, screw or nail is made possible, only the cable is exposed on the surface of the wall (6) or the like and the appearance thereof is improved.

8. 发明授权

US06076483A Plasma processing apparatus using a partition panel 失效
标题翻译：使用隔板的等离子体处理装置
公开(公告)号：US06076483A
公开(公告)日：2000-06-20
申请号：US48067
申请日：1998-03-26
申请人： Kenji Shintani , Masakazu Taki , Hiroki Ootera , Kazuyasu Nishikawa
发明人： Kenji Shintani , Masakazu Taki , Hiroki Ootera , Kazuyasu Nishikawa
IPC分类号： H05H1/46 , C23C16/50 , C23F4/00 , H01J37/32 , H01L21/205 , H01L21/302 , H01L21/3065 , H01L21/31 , C23C16/00
CPC分类号： H01J37/321 , H01J37/32623 , H01J37/32688
摘要： A plasma processing apparatus has a plurality of annular permanent magnets arranged concentrically with the same polarity in the circumferential direction at the atmosphere side of a second electrode arranged opposite to a stage on which a specimen is placed. Arrangement is provided so that the magnets located adjacent radially have opposite polarity. Furthermore, permanent magnets are arranged at the outer circumference of a vacuum vessel corresponding to a plasma generation chamber portion. A plasma processing apparatus can be provided that allows formation of uniform plasma over a large area and uniform processing of a specimen of a large diameter.
摘要翻译：一种等离子体处理装置具有多个环状永磁体，该多个环形永久磁铁在与放置试样的阶段相对布置的第二电极的气氛侧沿圆周方向具有相同的极性。提供了布置，使得位于径向相邻的磁体具有相反的极性。此外，永久磁铁布置在对应于等离子体产生室部分的真空容器的外周。可以提供等离子体处理装置，其允许在大面积上形成均匀的等离子体并且对大直径的样品进行均匀的处理。

9. 发明授权

US4408311A Optical tracking apparatus 失效
标题翻译：光学跟踪装置
公开(公告)号：US4408311A
公开(公告)日：1983-10-04
申请号：US261514
申请日：1981-05-07
申请人： Junichi Suzuki , Kenji Shintani
发明人： Junichi Suzuki , Kenji Shintani
IPC分类号： G11B7/09 , G11B7/08 , G11B7/085 , G11B7/12 , G11B7/00 , G11B21/10
CPC分类号： G11B7/08576 , G11B7/12
摘要： An optical tracking apparatus for tracing a spiral track on a recording disk includes an optical pickup device having a semiconductor laser and a photoelectric conversion element; an arm device pivotally mounted to an arm shaft with the pickup device being mounted to the free end thereof to thereby move substantially along the radial direction of the recording disk; sectorial arm drive coil attached to a rear end portion of the arm device and having a current path loop in parallel with the rotational plane of the arm device; and a pair of stationary magnetic field forming devices, each formed of a respective yoke and permanent magnet assembly, the yokes having respective air gaps in which magnetic fields in opposite directions to each other are formed, the arm drive coil being arranged to move in the air gaps and being supplied with an arm drive signal and a tracking error correction signal for causing the pickup device to trace the track.
摘要翻译：用于跟踪记录盘上的螺旋轨道的光学跟踪装置包括具有半导体激光器和光电转换元件的光学拾取装置; 手臂装置枢转地安装到臂轴上，拾取装置安装到其自由端，从而基本沿着记录盘的径向方向移动; 臂部驱动线圈附接到臂装置的后端部并且具有与臂装置的旋转平面平行的电流路径环路; 以及一对固定磁场形成装置，每个由各自的磁轭和永磁体组件形成，所述磁轭具有各自的空气间隙，在所述磁隙中形成彼此相反方向的磁场，所述臂驱动线圈被布置成在并且被提供有臂驱动信号和用于使拾取装置跟踪轨道的跟踪误差校正信号。

10. 发明申请

US20060042819A1 Data transmission cable 有权
标题翻译：数据传输电缆
公开(公告)号：US20060042819A1
公开(公告)日：2006-03-02
申请号：US10531666
申请日：2003-10-08
申请人： Nobuhiko Tsukahara , Yoichi Toriumi , Kenji Shintani , Hirofumi Hashimoto
发明人： Nobuhiko Tsukahara , Yoichi Toriumi , Kenji Shintani , Hirofumi Hashimoto
IPC分类号： H01B7/00
CPC分类号： H02G3/305 , G02B6/4471 , H01B7/08 , H01B7/40 , H02G3/26
摘要： There is provided a cable for data transmission which can be wired and constructed without damaging a surface of a wall, ceiling, floor or the like, without using any clamps and which does not degrade appearance of a wired space, and further, allows the wiring construction of the cable provided with a plurality of core wires in a state of less crosstalk. A cable (1) for data transmission includes a core wire (2) having a medium that transmits data and a coating member (4) having adhesiveness and coating at least part of the core wire (2). In this way, because of the adhesiveness of the coating member (4), it is easy to stick the cable onto a wall (6) or the like. Moreover, since a wiring construction of the cable on a surface of the wall (6) or the like without using a clamp, screw or nail is made possible, only the cable is exposed on the surface of the wall (6) or the like and the appearance thereof is improved.
摘要翻译：提供用于数据传输的电缆，其可以被布线和构造而不损坏墙壁，天花板，地板等的表面，而不使用任何夹具，并且不会降低有线空间的外观，并且还允许布线在串扰较小的状态下设置多根芯线的电缆的结构。用于数据传输的电缆（1）包括具有传输数据的介质的芯线（2）和具有粘合性并涂覆至少部分芯线（2）的涂层构件（4）。以这种方式，由于涂覆部件（4）的粘附性，容易将电缆粘到壁（6）等上。此外，由于在不使用夹具，螺钉或钉子的情况下，在壁（6）等的表面上的电缆的布线结构成为可能，所以只有电缆暴露在壁（6）等的表面上并且其外观得到改善。

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