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    • 1. 发明授权
    • Semiconductor device
    • 半导体器件
    • US07714383B2
    • 2010-05-11
    • US12258135
    • 2008-10-24
    • Keiko KawamuraKenji Maeyama
    • Keiko KawamuraKenji Maeyama
    • H01L29/94
    • H01L29/7811H01L27/088H01L29/0634H01L29/0653H01L29/0661H01L29/0696H01L29/407H01L29/66734H01L29/7813H01L29/861
    • A semiconductor device includes: a semiconductor layer, a first semiconductor region provided on a major surface of the semiconductor layer, a second semiconductor region provided in a surface portion of the first semiconductor region, a trench extending through the second semiconductor region and the first semiconductor region to the semiconductor layer, a first insulating film provided on an inner wall of the trench, a third semiconductor region filling the trench below an interface between the semiconductor layer and the first semiconductor region, a second insulating film provided on the third semiconductor region, a gate electrode filling the trench above the second insulating film. A portion of the first insulating film in contact with the semiconductor layer is opened. The semiconductor layer is in contact with the third semiconductor region through the opened portion.
    • 半导体器件包括:半导体层,设置在半导体层的主表面上的第一半导体区域,设置在第一半导体区域的表面部分中的第二半导体区域,延伸穿过第二半导体区域的沟槽和第一半导体 设置在所述沟槽的内壁上的第一绝缘膜,在所述半导体层和所述第一半导体区域之间的界面下方填充所述沟槽的第三半导体区域,设置在所述第三半导体区域上的第二绝缘膜, 栅电极填充第二绝缘膜上方的沟槽。 与半导体层接触的第一绝缘膜的一部分被打开。 半导体层通过开口部分与第三半导体区域接触。
    • 2. 发明申请
    • SEMICONDUCTOR DEVICE
    • 半导体器件
    • US20070138546A1
    • 2007-06-21
    • US11608003
    • 2006-12-07
    • Keiko KawamuraKenji Maeyama
    • Keiko KawamuraKenji Maeyama
    • H01L29/94
    • H01L29/7811H01L27/088H01L29/0634H01L29/0653H01L29/0661H01L29/0696H01L29/407H01L29/66734H01L29/7813H01L29/861
    • A semiconductor device includes: a semiconductor layer, a first semiconductor region provided on a major surface of the semiconductor layer, a second semiconductor region provided in a surface portion of the first semiconductor region, a trench extending through the second semiconductor region and the first semiconductor region to the semiconductor layer, a first insulating film provided on an inner wall of the trench, a third semiconductor region filling the trench below an interface between the semiconductor layer and the first semiconductor region, a second insulating film provided on the third semiconductor region, a gate electrode filling the trench above the second insulating film. A portion of the first insulating film in contact with the semiconductor layer is opened. The semiconductor layer is in contact with the third semiconductor region through the opened portion.
    • 半导体器件包括:半导体层,设置在半导体层的主表面上的第一半导体区域,设置在第一半导体区域的表面部分中的第二半导体区域,延伸穿过第二半导体区域的沟槽和第一半导体 设置在所述沟槽的内壁上的第一绝缘膜,在所述半导体层和所述第一半导体区域之间的界面下方填充所述沟槽的第三半导体区域,设置在所述第三半导体区域上的第二绝缘膜, 栅电极填充第二绝缘膜上方的沟槽。 与半导体层接触的第一绝缘膜的一部分被打开。 半导体层通过开口部分与第三半导体区域接触。
    • 3. 发明申请
    • SEMICONDUCTOR DEVICE
    • 半导体器件
    • US20090121285A1
    • 2009-05-14
    • US12258135
    • 2008-10-24
    • Keiko KAWAMURAKenji Maeyama
    • Keiko KAWAMURAKenji Maeyama
    • H01L29/78
    • H01L29/7811H01L27/088H01L29/0634H01L29/0653H01L29/0661H01L29/0696H01L29/407H01L29/66734H01L29/7813H01L29/861
    • A semiconductor device includes: a semiconductor layer, a first semiconductor region provided on a major surface of the semiconductor layer, a second semiconductor region provided in a surface portion of the first semiconductor region, a trench extending through the second semiconductor region and the first semiconductor region to the semiconductor layer, a first insulating film provided on an inner wall of the trench, a third semiconductor region filling the trench below an interface between the semiconductor layer and the first semiconductor region, a second insulating film provided on the third semiconductor region, a gate electrode filling the trench above the second insulating film. A portion of the first insulating film in contact with the semiconductor layer is opened. The semiconductor layer is in contact with the third semiconductor region through the opened portion.
    • 半导体器件包括:半导体层,设置在半导体层的主表面上的第一半导体区域,设置在第一半导体区域的表面部分中的第二半导体区域,延伸穿过第二半导体区域的沟槽和第一半导体 设置在所述沟槽的内壁上的第一绝缘膜,在所述半导体层和所述第一半导体区域之间的界面下方填充所述沟槽的第三半导体区域,设置在所述第三半导体区域上的第二绝缘膜, 栅电极填充第二绝缘膜上方的沟槽。 与半导体层接触的第一绝缘膜的一部分被打开。 半导体层通过开口部分与第三半导体区域接触。