专利快速检索-快速检索全球专利，免费商用专利数据库-IPRDB

1. 发明授权

US08515701B2 Method for detecting particulate contamination under a workpiece 有权
标题翻译：检测工件下颗粒污染的方法
公开(公告)号：US08515701B2
公开(公告)日：2013-08-20
申请号：US12052475
申请日：2008-03-20
申请人： Stephen Neal Swaringen , Kelly Bruland , Andrew Wells
发明人： Stephen Neal Swaringen , Kelly Bruland , Andrew Wells
IPC分类号： G01D18/00
CPC分类号： B23K26/04 , B23K2101/40
摘要： A method for detecting particulate contamination under a workpiece fixtured by a calibrated material handling system includes performing 3D measurements of a workpiece at multiple of positions to construct a 3D map of the workpiece, calibrating the 3D map by comparing a pre-computed calibration map to the 3D measurements, and detecting particulate contamination by processing the calibrated map.
摘要翻译：用于通过校准的材料处理系统检测在工件夹具下的颗粒污染物的方法包括在多个位置处执行工件的3D测量以构建工件的3D图，通过将预先计算的校准图与 3D测量，并通过处理校准的地图来检测微粒污染物。

2. 发明授权

US08497450B2 On-the fly laser beam path dithering for enhancing throughput 有权
标题翻译：用于增强吞吐量的飞行激光束路径抖动
公开(公告)号：US08497450B2
公开(公告)日：2013-07-30
申请号：US11925562
申请日：2007-10-26
申请人： Kelly Bruland , Mark Unrath , Stephen Swaringen , Ho Wai Lo , Clint Vandergiessen , Keith Grant
发明人： Kelly Bruland , Mark Unrath , Stephen Swaringen , Ho Wai Lo , Clint Vandergiessen , Keith Grant
IPC分类号： B23K26/00 , B23K26/06 , B23K26/16
CPC分类号： G02B26/101
摘要： A laser-based workpiece processing system includes sensors connected to a sensor controller that converts sensor signals into focused spot motion commands for actuating a beam steering device, such as a two-axis steering mirror. The sensors may include a beam position sensor for correcting errors detected in the optical path, such as thermally-induced beam wandering in response to laser or acousto-optic modulator pointing stability, or optical mount dynamics.
摘要翻译：基于激光的工件处理系统包括连接到传感器控制器的传感器，传感器控制器将传感器信号转换成聚焦点运动命令，用于致动诸如双轴转向镜的光束转向装置。传感器可以包括用于校正在光路中检测到的误差的光束位置传感器，例如响应于激光或声光调制器指向稳定性的热感应波束漂移或光学安装动态。

3. 发明授权

US08238007B2 On-the-fly laser beam path error correction for specimen target location processing 有权
标题翻译：用于样本目标位置处理的实时激光束路径误差校正
公开(公告)号：US08238007B2
公开(公告)日：2012-08-07
申请号：US11616070
申请日：2006-12-26
申请人： Kelly Bruland , Mark Unrath , Stephen Swaringen , Ho Wai Lo , Clint Vandergiessen , Keith Grant
发明人： Kelly Bruland , Mark Unrath , Stephen Swaringen , Ho Wai Lo , Clint Vandergiessen , Keith Grant
IPC分类号： G02B26/08 , B23K26/08
CPC分类号： G02B26/101 , B23K26/042 , B23K26/082 , G02B26/0816 , H01L23/5258 , H01L2924/0002 , Y10S359/90 , H01L2924/00
摘要： A laser-based workpiece processing system includes sensors connected to a sensor controller that converts sensor signals into focused spot motion commands for actuating a beam steering device, such as a two-axis steering mirror. The sensors may include a beam position sensor for correcting errors detected in the optical path, such as thermally-induced beam wandering in response to laser or acousto-optic modulator pointing stability, or optical mount dynamics.
摘要翻译：基于激光的工件处理系统包括连接到传感器控制器的传感器，传感器控制器将传感器信号转换成聚焦点运动命令，用于致动诸如双轴转向镜的光束转向装置。传感器可以包括用于校正在光路中检测到的误差的光束位置传感器，例如响应于激光或声光调制器指向稳定性的热感应波束漂移或光学安装动态。

4. 发明授权

US07760331B2 Decoupled, multiple stage positioning system 有权
标题翻译：解耦，多级定位系统
公开(公告)号：US07760331B2
公开(公告)日：2010-07-20
申请号：US11676937
申请日：2007-02-20
申请人： Mark T. Kosmowski , Kelly Bruland
发明人： Mark T. Kosmowski , Kelly Bruland
IPC分类号： G03B27/58
CPC分类号： H01L21/68785 , B23K26/02 , B23K26/082 , B23K26/083 , B23K26/0869 , B23K2101/40 , H01L21/68
摘要： A split axis stage architecture is implemented as a multiple stage positioning system that is capable of vibrationally and thermally stable material transport at high speed and rates of acceleration. A split axis design decouples stage motion along two perpendicular axes lying in separate, parallel planes. A dimensionally stable substrate in the form of a granite, or other stone slab, or of ceramic material or cast iron, is used as the base for lower and upper stages. The substrate is precisely cut (“lapped”) such that its upper and lower stage surface portions are flat and parallel to each other.
摘要翻译：分裂轴台架构被实现为能够以高速和加速度的振动和热稳定材料输送的多级定位系统。分裂轴设计使位于分离的平行平面中的两个垂直轴分离舞台运动。用作花岗岩或其他石板或陶瓷材料或铸铁的形状的尺寸稳定的基材用作下层和上层的基材。衬底被精确地切割（“研磨”），使得其上部和下部表面部分是平的并且彼此平行。

5. 发明申请

US20080223837A1 USE OF PREDICTIVE PULSE TRIGGERING TO IMPROVE ACCURACY IN LINK PROCESSING 有权
标题翻译：使用预测脉冲触发来提高链接处理中的精度
公开(公告)号：US20080223837A1
公开(公告)日：2008-09-18
申请号：US11687578
申请日：2007-03-16
申请人： Kelly Bruland , Clint Vandergiessen
发明人： Kelly Bruland , Clint Vandergiessen
IPC分类号： B23K26/02
CPC分类号： B23K26/0648 , B23K26/034 , B23K26/0344 , B23K26/04 , B23K26/0622 , B23K26/0643 , B23K26/08 , B23K26/40 , B23K2101/40 , B23K2103/50
摘要： A predictive pulse triggering (PPT) method enables precise triggering of a laser beam in a link-processing system. The PPT method entails triggering the laser beam based on estimated relative motion parameters of the target and laser beam axis. The PPT method allows for a six-fold improvement in laser positioning accuracy over the conventional, entirely measurement-based method.
摘要翻译：预测脉冲触发（PPT）方法能够在链路处理系统中精确触发激光束。 PPT方法需要基于目标和激光束轴的估计的相对运动参数触发激光束。与传统的完全基于测量的方法相比，PPT方法可以提高激光定位精度的六倍。

6. 发明申请

US20050282319A1 Semiconductor structure processing using multiple laser beam spots overlapping lengthwise on a structure 有权
标题翻译：使用在结构上纵向重叠的多个激光束点的半导体结构处理
公开(公告)号：US20050282319A1
公开(公告)日：2005-12-22
申请号：US11051261
申请日：2005-02-04
申请人： Kelly Bruland , Brian Baird , Ho Lo , Richard Harris , Yunlong Sun
发明人： Kelly Bruland , Brian Baird , Ho Lo , Richard Harris , Yunlong Sun
IPC分类号： B23K26/06 , B23K26/067 , H01L21/00 , H01L21/26 , H01L21/302 , H01L21/324 , H01L21/42 , H01L21/461 , H01L21/477 , H01L21/84 , H01L23/525
CPC分类号： B23K26/067 , B23K26/0604 , B23K26/0613 , H01L21/76894 , H01L23/5258 , H01L27/1052 , H01L27/10894 , H01L2924/0002 , H01L2924/00
摘要： Methods and systems use laser pulses to process a selected structure on or within a semiconductor substrate. The structure has a surface, a width, and a length. The laser pulses propagate along axes that move along a scan beam path relative to the substrate as the laser pulses process the selected structure. The method simultaneously generates on the selected structure first and second laser beam pulses that propagate along respective first and second laser beam axes intersecting the selected structure at distinct first and second locations. The first and second laser beam pulses impinge on the surface of the selected structure respective first and second beam spots. Each beam spot encompasses at least the width of the selected link. The first and second beam spots are spatially offset from one another along the length of the selected structure to define an overlapping region covered by both the first and the second beam spots and a total region covered by one or both of the first and second beam spots. The total region is larger than the first beam spot and also larger than the second beam spot. The method sets respective first and second energy values of the first and second laser beam pulses to cause complete depthwise processing of the selected structure across the width of the structure in at least a portion of the total region.
摘要翻译：方法和系统使用激光脉冲来处理半导体衬底上或其中的选定结构。该结构具有表面，宽度和长度。随着激光脉冲处理所选择的结构，激光脉冲沿着沿扫描光束路径相对于衬底移动的轴传播。所述方法同时在所选择的结构上产生沿相应的第一和第二激光束轴线在不同的第一和第二位置与所选择的结构相交的第一和第二激光束脉冲。第一和第二激光束脉冲冲击所选结构的表面上相应的第一和第二光束点。每个光束点至少包含所选链接的宽度。第一和第二光束斑点沿着所选择的结构的长度在空间上彼此偏移以限定由第一和第二光束点两者覆盖的重叠区域，以及由第一和第二光束斑点中的一个或两个覆盖的总区域。总区域大于第一束斑，并且大于第二束斑。该方法设置第一和第二激光束脉冲的相应的第一和第二能量值，以便在整个区域的至少一部分中跨结构的宽度对所选结构进行完全深度处理。

7. 发明申请

US20050279736A1 Semiconductor structure processing using multiple laser beam spots spaced on-axis with cross-axis offset 有权
标题翻译：半导体结构的处理使用多个激光束点间隔轴上与横轴偏移
公开(公告)号：US20050279736A1
公开(公告)日：2005-12-22
申请号：US11051958
申请日：2005-02-04
申请人： Kelly Bruland , Brian Baird , Ho Lo , Stephen Swaringen , Frank Evans
发明人： Kelly Bruland , Brian Baird , Ho Lo , Stephen Swaringen , Frank Evans
IPC分类号： B23K26/00 , B23K26/06 , B23K26/067 , B23K26/08 , B23K26/10 , B23K26/38 , B23K26/40 , H01L21/768 , H01L23/525
CPC分类号： H01L23/5258 , B23K26/0613 , B23K26/0624 , B23K26/067 , B23K26/10 , B23K2101/40 , H01L21/76894 , H01L2924/0002 , H01L2924/00
摘要： Methods and systems selectively irradiate structures on or within a semiconductor substrate using a plurality of laser beams. The structures are arranged in a row extending in a generally lengthwise direction. The method generates a first laser beam that propagates along a first laser beam axis that intersects the semiconductor substrate and a second laser beam that propagates along a second laser beam axis that intersects the semiconductor substrate. The method directs the first and second laser beams onto distinct first and second structures in the row. The second spot is offset from the first spot by some amount in a direction perpendicular to the lengthwise direction of the row. The method moves the first and second laser beam axes relative to the semiconductor substrate along the row substantially in unison in a direction substantially parallel to the lengthwise direction of the row.
摘要翻译：方法和系统使用多个激光束选择性地照射半导体衬底上或内部的结构。这些结构被布置成在大体上沿长度方向延伸的一排。该方法产生沿着与半导体衬底相交的第一激光束轴传播的第一激光束和沿着与半导体衬底相交的第二激光束轴传播的第二激光束。该方法将第一和第二激光束引导到行中不同的第一和第二结构。第二点在与行长度方向垂直的方向上偏离第一点一定量。该方法使第一激光束和第二激光束相对于半导体衬底在基本上平行于该行的长度方向的方向上大致一齐地沿着行移动。

8. 发明申请

US20080196631A1 DECOUPLED, MULTIPLE STAGE POSITIONING SYSTEM 有权
标题翻译：解码，多级定位系统
公开(公告)号：US20080196631A1
公开(公告)日：2008-08-21
申请号：US11676937
申请日：2007-02-20
申请人： Mark T. Kosmowski , Kelly Bruland
发明人： Mark T. Kosmowski , Kelly Bruland
IPC分类号： A47B9/00 , H01L21/00
CPC分类号： H01L21/68785 , B23K26/02 , B23K26/082 , B23K26/083 , B23K26/0869 , B23K2101/40 , H01L21/68
摘要： A split axis stage architecture is implemented as a multiple stage positioning system that is capable of vibrationally and thermally stable material transport at high speed and rates of acceleration. A split axis design decouples stage motion along two perpendicular axes lying in separate, parallel planes. A dimensionally stable substrate in the form of a granite, or other stone slab, or of ceramic material or cast iron, is used as the base for lower and upper stages. The substrate is precisely cut (“lapped”) such that its upper and lower stage surface portions are flat and parallel to each other.
摘要翻译：分裂轴台架构被实现为能够以高速和加速度的振动和热稳定材料输送的多级定位系统。分裂轴设计使位于分离的平行平面中的两个垂直轴分离舞台运动。用作花岗岩或其他石板或陶瓷材料或铸铁的形状的尺寸稳定的基材用作下层和上层的基材。衬底被精确地切割（“研磨”），使得其上部和下部表面部分是平的并且彼此平行。

9. 发明申请

US20080035618A1 METHODS AND SYSTEMS FOR POSITIONING A LASER BEAM SPOT RELATIVE TO A SEMICONDUCTOR INTEGRATED CIRCUIT USING A PROCESSING TARGET AS A METROLOGY TARGET 有权
标题翻译：使用加工目标作为计量学目标定位与半导体集成电路相关的激光光束点的方法和系统
公开(公告)号：US20080035618A1
公开(公告)日：2008-02-14
申请号：US11874786
申请日：2007-10-18
申请人： Kelly BRULAND
发明人： Kelly BRULAND
IPC分类号： B23K26/00
CPC分类号： B23K26/04 , H01L23/5258 , H01L23/544 , H01L2223/5442 , H01L2223/54453 , H01L2223/5446 , H01L2924/0002 , H01L2924/00
摘要： Various methods and systems measure, determine, or align a position of a laser beam spot relative to a semiconductor substrate having structures on or within the semiconductor substrate to be selectively processed by delivering a processing laser beam to a processing laser beam spot. The various methods and systems utilize those structures themselves to perform the measurement, determination, or alignment.
摘要翻译：各种方法和系统相对于具有在半导体衬底上或半导体衬底内的结构的半导体衬底来测量，确定或对准激光束点的位置，以通过将处理激光束传送到处理激光束点来进行选择性处理。各种方法和系统利用这些结构本身进行测量，确定或对准。

10. 发明申请

US20080017618A1 ON-THE-FLY LASER BEAM PATH ERROR CORRECTION FOR SPECIMEN TARGET LOCATION PROCESSING 有权
标题翻译：用于样本目标位置处理的飞行激光束路径误差校正
公开(公告)号：US20080017618A1
公开(公告)日：2008-01-24
申请号：US11616070
申请日：2006-12-26
申请人： Kelly Bruland , Clint Vandergiessen , Keith Grant , Stephen Swaringen
发明人： Kelly Bruland , Clint Vandergiessen , Keith Grant , Stephen Swaringen
IPC分类号： B23K26/04 , B23K26/38
CPC分类号： G02B26/101 , B23K26/042 , B23K26/082 , G02B26/0816 , H01L23/5258 , H01L2924/0002 , Y10S359/90 , H01L2924/00
摘要： A laser-based workpiece processing system includes sensors connected to a sensor controller that converts sensor signals into focused spot motion commands for actuating a beam steering device, such as a two-axis steering mirror. The sensors may include a beam position sensor for correcting errors detected in the optical path, such as thermally-induced beam wandering in response to laser or acousto-optic modulator pointing stability, or optical mount dynamics.
摘要翻译：基于激光的工件处理系统包括连接到传感器控制器的传感器，传感器控制器将传感器信号转换成聚焦点运动命令，用于致动诸如双轴转向镜的光束转向装置。传感器可以包括用于校正在光路中检测到的误差的光束位置传感器，例如响应于激光或声光调制器指向稳定性的热感应波束漂移或光学安装动态。

你已经成功收藏专利！

检索式保存成功!

IPRDB

热门服务

关于我们

友情链接

联系方式