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    • 2. 发明授权
    • Vibration sensor and external detection device
    • 振动传感器和外部检测装置
    • US09134168B2
    • 2015-09-15
    • US14362230
    • 2012-08-16
    • Tatsuakira MasakiToru YokoyamaKeiki Matsuura
    • Tatsuakira MasakiToru YokoyamaKeiki Matsuura
    • H02N1/00G01H11/06H02N1/08
    • G01H11/06H02N1/00H02N1/08
    • A vibration sensor has a first substrate, a second substrate relatively movable by an external vibration while opposed to the first substrate, an electret group having a plurality of electrets that are arrayed in a relative movement direction on a side of one of surfaces of the first substrate, and an electrode group having a plurality of electrodes that are arrayed in the relative movement direction on a side of a surface of the second substrate. The surface of the second substrate is opposed to the electret group. A positional relationship between the electret group and the electrode group changes with a relative change in position of the first and second substrates by the external vibration to output an external vibration detection signal.
    • 振动传感器具有第一基板,与第一基板相对的外部振动相对移动的第二基板,具有多个驻极体的驻极体组,所述驻极体组在所述第一基板的一个表面的一侧的相对移动方向上排列 基板,以及具有在第二基板的表面侧的相对移动方向排列的多个电极的电极组。 第二基板的表面与驻极体组相对。 驻极体组与电极组之间的位置关系随着第一和第二衬底的位置相对变化而随外部振动而变化,从而输出外部振动检测信号。
    • 3. 发明申请
    • VIBRATION SENSOR AND EXTERNAL DETECTION DEVICE
    • 振动传感器和外部检测装置
    • US20140327337A1
    • 2014-11-06
    • US14362230
    • 2012-08-16
    • Tatsuakira MasakiToru YokoyamaKeiki Matsuura
    • Tatsuakira MasakiToru YokoyamaKeiki Matsuura
    • G01H11/06H02N1/08
    • G01H11/06H02N1/00H02N1/08
    • A vibration sensor has a first substrate, a second substrate relatively movable by an external vibration while opposed to the first substrate, an electret group having a plurality of electrets that are arrayed in a relative movement direction on a side of one of surfaces of the first substrate, and an electrode group having a plurality of electrodes that are arrayed in the relative movement direction on a side of a surface of the second substrate. The surface of the second substrate is opposed to the electret group. A positional relationship between the electret group and the electrode group changes with a relative change in position of the first and second substrates by the external vibration to output an external vibration detection signal.
    • 振动传感器具有第一基板,与第一基板相对的外部振动相对移动的第二基板,具有多个驻极体的驻极体组,所述驻极体组在所述第一基板的一个表面的一侧的相对移动方向上排列 基板,以及具有在第二基板的表面侧的相对移动方向排列的多个电极的电极组。 第二基板的表面与驻极体组相对。 驻极体组与电极组之间的位置关系随着第一和第二衬底的位置相对变化而随外部振动而变化,从而输出外部振动检测信号。