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    • 7. 发明授权
    • Semiconductor device having gate-gate, drain-drain, and drain-gate connecting layers and method of fabricating the same
    • 具有栅极栅极,漏极 - 漏极和漏极 - 栅极连接层的半导体器件及其制造方法
    • US06404023B1
    • 2002-06-11
    • US09758388
    • 2001-01-12
    • Katsumi MoriKei KawaharaYoshikazu Kasuya
    • Katsumi MoriKei KawaharaYoshikazu Kasuya
    • H01L2976
    • H01L27/11H01L27/1104Y10S257/903
    • A semiconductor device comprising a peripheral circuit portion and a memory cell portion including a plurality of memory cells. Each memory cell has first and second gate-gate connecting layers, first and second drain-drain connecting layers, and first and second drain-gate connecting layers. The first and second gate-gate connecting layers respectively connect the gates of driver transistors to the gates of load transistors. The first and second drain-drain connecting layers are formed over a first interlayer dielectric and respectively connect the drains of driver transistors to the drains of load transistors. The first and second drain-gate connecting layers are formed over a second interlayer dielectric and respectively connect the first drain-drain connecting layer to the second gate-gate connecting layer and the second drain-drain connecting layer to the first gate-gate connecting layer.
    • 一种半导体器件,包括外围电路部分和包括多个存储单元的存储单元部分。 每个存储单元具有第一和第二栅极栅极连接层,第一和第二漏极 - 漏极连接层以及第一和第二漏极 - 栅极连接层。 第一和第二栅极连接层分别将驱动晶体管的栅极连接到负载晶体管的栅极。 第一和第二漏极 - 漏极连接层形成在第一层间电介质上,并分别将驱动晶体管的漏极连接到负载晶体管的漏极。 第一和第二漏极 - 栅极连接层形成在第二层间电介质上,并且将第一漏极 - 漏极连接层与第二栅极 - 栅极连接层和第二漏极 - 漏极连接层分别连接到第一栅极 - 栅极连接层 。