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1. 发明授权

US07727317B2 Scrubber and exhaust gas treatment apparatus 有权
标题翻译：洗涤器和排气处理装置
公开(公告)号：US07727317B2
公开(公告)日：2010-06-01
申请号：US11203151
申请日：2005-08-15
申请人： Kazutaka Okuda , Kotaro Kawamura
发明人： Kazutaka Okuda , Kotaro Kawamura
IPC分类号： B01D47/16
CPC分类号： B01D47/18 , B01D47/08 , F23J15/022 , F23J2217/50
摘要： A scrubber removes dust from an exhaust gas. The scrubber includes a casing having an exhaust gas inlet and an exhaust gas outlet, an impeller housed in the casing and supported by a shaft, and a cleaning liquid supply tube for ejecting a cleaning liquid by which the dust contained in the exhaust gas is captured. The scrubber further includes a plurality of protrusions provided around the impeller such that the exhaust gas and the cleaning liquid which are discharged from the impeller impinge upon the protrusions.
摘要翻译：洗涤器从废气中除去灰尘。洗涤器包括具有排气入口和废气出口的壳体，容纳在壳体中并由轴支撑的叶轮以及用于喷射捕集在废气中的灰尘的清洗液的清洗液供给管。洗涤器还包括围绕叶轮设置的多个突起，使得从叶轮排出的废气和清洁液体撞击在突起上。

2. 发明申请

US20070160946A1 Combustion type waste gas treatment system 有权
标题翻译：燃烧式废气处理系统
公开(公告)号：US20070160946A1
公开(公告)日：2007-07-12
申请号：US11709811
申请日：2007-02-23
申请人： Tetsuo Komai , Kohtaro Kawamura , Takeshi Tsuji , Rikiya Nakamura , Kazutaka Okuda , Keiichi Ishikawa , Tomonori Ohashi , Yoshiro Takemura , Yasutaka Muroga , Tadakazu Nishikawa , Yuji Shirao
发明人： Tetsuo Komai , Kohtaro Kawamura , Takeshi Tsuji , Rikiya Nakamura , Kazutaka Okuda , Keiichi Ishikawa , Tomonori Ohashi , Yoshiro Takemura , Yasutaka Muroga , Tadakazu Nishikawa , Yuji Shirao
IPC分类号： F23G7/08 , F23D14/62
CPC分类号： F23C5/32 , F23D14/04 , F23G5/32 , F23G7/065 , F23G2209/142 , F23L7/007 , Y02E20/344
摘要： A combustion type waste gas treatment system capable of oxidatively decomposing a hazardous combustible waste gas while heating efficiently with a structure which allows the waste gas to mix with an auxiliary burning gas efficiently without the occurrence of backfire in a waste gas inlet pipe. The combustion type waste gas treatment system has a burner part and a combustion chamber. Combustion flames are formed to extend from the burner part toward the combustion chamber, and a combustible waste gas is introduced into the combustion flames from waste gas inlet pipes thereby oxidatively decomposing the waste gas. A flow velocity accelerating device makes the flow velocity of the combustible waste gas flowing through the waste gas inlet pipe higher than the burning velocity of the combustible waste gas.
摘要翻译：一种燃烧式废气处理系统，其能够在使废气与辅助燃烧气体高效混合的结构的同时有效地氧化分解有害的可燃性废气，而不会在废气导入管中发生回火。燃烧式废气处理系统具有燃烧器部分和燃烧室。燃烧火焰形成为从燃烧器部分朝向燃烧室延伸，并且可燃废气从废气入口管道引入燃烧火焰中，从而氧化分解废气。流速加速装置使流过废气入口管的可燃废气的流速高于可燃废气的燃烧速度。

3. 发明授权

US07112060B2 Burner for treating waste gas 有权
标题翻译：用于处理废气的燃烧器
公开(公告)号：US07112060B2
公开(公告)日：2006-09-26
申请号：US10821980
申请日：2004-04-12
申请人： Yoshiro Takemura , Tetsuo Komai , Kotaro Kawamura , Takeshi Tsuji , Kazutaka Okuda , Rikiya Nakamura , Keiichi Ishikawa , Tomonori Ohashi , Yasutaka Muroga , Tadakazu Nishikawa , Yuji Shirao , Hiroyuki Yamada
发明人： Yoshiro Takemura , Tetsuo Komai , Kotaro Kawamura , Takeshi Tsuji , Kazutaka Okuda , Rikiya Nakamura , Keiichi Ishikawa , Tomonori Ohashi , Yasutaka Muroga , Tadakazu Nishikawa , Yuji Shirao , Hiroyuki Yamada
IPC分类号： F23G7/06 , F23D14/10
CPC分类号： F23L7/007 , F23C2900/9901 , F23G5/32 , F23G7/065 , F23G2209/142 , F23M11/04 , Y02E20/322 , Y02E20/344
摘要： The present invention provides a burner for use in a combustion-type waste gas treatment system for combusting waste gases emitted from semiconductor manufacturing system, particularly, a deposition gas containing SiH4 and a halogen-base gas, simultaneously at a high efficiency of destruction, making it difficult for a powder of SiO2 to be attached and deposited, performing a low-NOx combustion, and maintaining a desired level of safety. The combustion-type waste gas treatment system has a flame stabilizing zone (15), which is open toward a combustion chamber (11), surrounded by a peripheral wall (12), and closed by a plate (14) remotely from the combustion chamber. A waste gas, an auxiliary combustible agent, and air are introduced into and mixed with each other in the flame stabilizing zone (15), and the mixed gases are ejected toward the combustion chamber (11) perpendicularly to the plate (14).
摘要翻译：本发明提供了一种用于燃烧型废气处理系统的燃烧器，用于燃烧由半导体制造系统排出的废气，特别是含有SiH 4和沉积气体的卤素基气体在高效率的破坏下，使SiO 2粉末难以附着和沉积，进行低NOx燃烧，并保持所需的安全等级。燃烧型废气处理系统具有朝向燃烧室（11）开口的阻燃稳定区（15），被周壁（12）包围，并且被远离燃烧室的板（14）封闭。废气，辅助可燃剂和空气在火焰稳定区（15）中引入并混合，并且混合气体垂直于板（14）朝向燃烧室（11）喷射。

4. 发明申请

US20050271988A1 Combustion type waste gas treatment system 审中-公开
标题翻译：燃烧式废气处理系统
公开(公告)号：US20050271988A1
公开(公告)日：2005-12-08
申请号：US11206104
申请日：2005-08-18
申请人： Tetsuo Komai , Kohtaro Kawamura , Takeshi Tsuji , Rikiya Nakamura , Kazutaka Okuda , Keiichi Ishikawa , Tomonori Ohashi , Yoshiro Takemura , Yasutaka Muroga , Tadakazu Nishikawa , Yuji Shirao
发明人： Tetsuo Komai , Kohtaro Kawamura , Takeshi Tsuji , Rikiya Nakamura , Kazutaka Okuda , Keiichi Ishikawa , Tomonori Ohashi , Yoshiro Takemura , Yasutaka Muroga , Tadakazu Nishikawa , Yuji Shirao
IPC分类号： F23J15/02 , A62C99/00 , F23G5/32 , F23G7/06 , F23L7/00 , F23D14/00 , F23D1/00
CPC分类号： F23C5/32 , F23D14/04 , F23G5/32 , F23G7/065 , F23G2209/142 , F23L7/007 , Y02E20/344
摘要： A combustion type waste gas treatment system capable of oxidatively decomposing a hazardous combustible waste gas while heating efficiently with a structure which allows the waste gas to mix with an auxiliary burning gas efficiently without the occurrence of backfire in a waste gas inlet pipe. The combustion type waste gas treatment system has a burner part and a combustion chamber. Combustion flames are formed to extend from the burner part toward the combustion chamber, and a combustible waste gas is introduced into the combustion flames from waste gas inlet pipes thereby oxidatively decomposing the waste gas. A flow velocity accelerating device makes the flow velocity of the combustible waste gas flowing through the waste gas inlet pipe higher than the burning velocity of the combustible waste gas.
摘要翻译：一种燃烧式废气处理系统，其能够在使废气与辅助燃烧气体高效混合的结构的同时有效地氧化分解有害的可燃性废气，而不会在废气导入管中发生回火。燃烧式废气处理系统具有燃烧器部分和燃烧室。燃烧火焰形成为从燃烧器部分朝向燃烧室延伸，并且可燃废气从废气入口管道引入燃烧火焰中，从而氧化分解废气。流速加速装置使流过废气入口管的可燃废气的流速高于可燃废气的燃烧速度。

5. 发明授权

US06946022B2 Scrubber and exhaust gas treatment apparatus 有权
标题翻译：洗涤器和排气处理装置
公开(公告)号：US06946022B2
公开(公告)日：2005-09-20
申请号：US10375908
申请日：2003-02-28
申请人： Kazutaka Okuda , Kotaro Kawamura
发明人： Kazutaka Okuda , Kotaro Kawamura
IPC分类号： F23J15/04 , B01D47/06 , B01D47/08 , B01D47/18 , F23J15/02 , B01F3/04
CPC分类号： B01D47/18 , B01D47/08 , F23J15/022 , F23J2217/50
摘要： A scrubber removes dust from an exhaust gas. The scrubber includes a casing having an exhaust gas inlet and an exhaust gas outlet, an impeller housed in the casing and supported by a shaft, and a cleaning liquid supply tube for ejecting a cleaning liquid by which the dust contained in the exhaust gas is captured. The scrubber further includes a plurality of protrusions provided around the impeller such that the exhaust gas and the cleaning liquid which are discharged from the impeller impinge upon the protrusions.
摘要翻译：洗涤器从废气中除去灰尘。洗涤器包括具有排气入口和废气出口的壳体，容纳在壳体中并由轴支撑的叶轮以及用于喷射捕集在废气中的灰尘的清洗液的清洗液供给管。洗涤器还包括围绕叶轮设置的多个突起，使得从叶轮排出的废气和清洁液体撞击在突起上。

6. 发明授权

US06797045B2 Scrubber 有权
标题翻译：洗涤器
公开(公告)号：US06797045B2
公开(公告)日：2004-09-28
申请号：US10290315
申请日：2002-11-08
申请人： Kazutaka Okuda , Kohtaro Kawamura , Takeshi Tsuji , Yuji Shirao , Yoshihiro Ueda
发明人： Kazutaka Okuda , Kohtaro Kawamura , Takeshi Tsuji , Yuji Shirao , Yoshihiro Ueda
IPC分类号： B01D4716
CPC分类号： B01D53/78 , B01D47/08 , B01D47/18 , B01D2257/204 , B01D2257/2066 , F23J15/022
摘要： A scrubber including a casing having an exhaust gas inlet and an exhaust gas outlet. An impeller is mounted in the casing, and the impeller is rotatable about its own axis. An exhaust gas can be introduced into the center of the impeller through the exhaust gas inlet of the casing. A cleaning liquid discharge nozzle is positioned at the center of the impeller for spraying a cleaning liquid in the impeller. Also, a baffle member is spaced apart from and surrounds the impeller. A mixture of the exhaust gas and the cleaning liquid exiting the impeller impinges on the baffle member. The cleaning liquid discharge nozzle is provided inside and rigidly connected to the impeller so as to rotate together with the impeller. The nozzle has a plurality of cleaning liquid discharge orifices extending radially through a cylindrical wall thereof to discharge a cleaning liquid into the impeller.
摘要翻译：一种洗涤器，包括具有排气入口和排气出口的壳体。叶轮安装在壳体中，叶轮可以围绕其自身的轴线旋转。可以通过壳体的废气入口将废气引入叶轮的中心。清洁液体排放喷嘴位于叶轮的中心，用于将清洁液体喷射在叶轮中。此外，挡板构件与叶轮间隔开并围绕叶轮。排出的废气和离开叶轮的清洗液的混合物撞击挡板部件。清洗液排出喷嘴设置在内部并刚性地连接到叶轮，以便与叶轮一起旋转。喷嘴具有多个清洁液体排出孔，其径向延伸穿过其圆柱形壁，以将清洁液体排放到叶轮中。

7. 发明授权

US06736635B1 Combustor for exhaust gas treatment 有权
标题翻译：燃烧器用于废气处理
公开(公告)号：US06736635B1
公开(公告)日：2004-05-18
申请号：US10111382
申请日：2002-05-01
申请人： Yoshiro Takemura , Tetsuo Komai , Kotaro Kawamura , Takeshi Tsuji , Kazutaka Okuda , Rikiya Nakamura , Keiichi Ishikawa , Tomonori Ohashi , Yasutaka Muroga , Tadakazu Nishikawa , Yuji Shirao , Hiroyuki Yamada
发明人： Yoshiro Takemura , Tetsuo Komai , Kotaro Kawamura , Takeshi Tsuji , Kazutaka Okuda , Rikiya Nakamura , Keiichi Ishikawa , Tomonori Ohashi , Yasutaka Muroga , Tadakazu Nishikawa , Yuji Shirao , Hiroyuki Yamada
IPC分类号： F23G706
CPC分类号： F23L7/007 , F23C2900/9901 , F23G5/32 , F23G7/065 , F23G2209/142 , F23M11/04 , Y02E20/322 , Y02E20/344
摘要： The present invention provides a burner for use in a combustion-type waste gas treatment system for combusting waste gases emitted from semiconductor manufacturing system, particularly, a deposition gas containing SiH4 and a halogen-base gas, simultaneously at a high efficiency of destruction, making it difficult for a powder of SiO2 to be attached and deposited, performing a low-NOx combustion, and maintaining a desired level of safety. The combustion-type waste gas treatment system has a flame stabilizing zone (15), which is open toward a combustion chamber (11), surrounded by a peripheral wall (12), and closed by a plate (14) remotely from the combustion chamber. A waste gas, an auxiliary combustible agent, and air are introduced into and mixed with each other in the flame stabilizing zone (15), and the mixed gases are ejected toward the combustion chamber (11) perpendicularly to the plate (14).
摘要翻译：本发明提供了一种用于燃烧型废气处理系统的燃烧器，用于以高效率的破坏同时燃烧从半导体制造系统排出的废气，特别是含有SiH 4和卤素基气体的沉积气体， SiO 2粉末难以附着和沉积，进行低NOx燃烧，并保持所需的安全水平。燃烧型废气处理系统具有朝向燃烧室（11）开口的阻燃稳定区（15），被周壁（12）包围，并且被远离燃烧室的板（14）封闭。废气，辅助可燃剂和空气在火焰稳定区（15）中引入并混合，并且混合气体垂直于板（14）朝向燃烧室（11）喷射。

8. 发明申请

US20060032378A1 Scrubber and exhaust gas treatment apparatus 有权
公开(公告)号：US20060032378A1
公开(公告)日：2006-02-16
申请号：US11203151
申请日：2005-08-15
申请人： Kazutaka Okuda , Kotaro Kawamura
发明人： Kazutaka Okuda , Kotaro Kawamura
IPC分类号： B01D47/00
CPC分类号： B01D47/18 , B01D47/08 , F23J15/022 , F23J2217/50
摘要： A scrubber removes dust from an exhaust gas. The scrubber includes a casing having an exhaust gas inlet and an exhaust gas outlet, an impeller housed in the casing and supported by a shaft, and a cleaning liquid supply tube for ejecting a cleaning liquid by which the dust contained in the exhaust gas is captured. The scrubber further includes a plurality of protrusions provided around the impeller such that the exhaust gas and the cleaning liquid which are discharged from the impeller impinge upon the protrusions.

9. 发明授权

US06948929B2 Combustion type waste gas treatment system 有权
标题翻译：燃烧式废气处理系统
公开(公告)号：US06948929B2
公开(公告)日：2005-09-27
申请号：US09962117
申请日：2001-09-26
申请人： Tetsuo Komai , Kohtaro Kawamura , Takeshi Tsuji , Rikiya Nakamura , Kazutaka Okuda , Keiichi Ishikawa , Tomonori Ohashi , Yoshiro Takemura , Yasutaka Muroga , Tadakazu Nishikawa , Yuji Shirao
发明人： Tetsuo Komai , Kohtaro Kawamura , Takeshi Tsuji , Rikiya Nakamura , Kazutaka Okuda , Keiichi Ishikawa , Tomonori Ohashi , Yoshiro Takemura , Yasutaka Muroga , Tadakazu Nishikawa , Yuji Shirao
IPC分类号： F23J15/02 , A62C99/00 , F23G5/32 , F23G7/06 , F23L7/00 , F23D14/62
CPC分类号： F23C5/32 , F23D14/04 , F23G5/32 , F23G7/065 , F23G2209/142 , F23L7/007 , Y02E20/344
摘要： A combustion type waste gas treatment system is capable of oxidatively decomposing a hazardous combustible waste gas while heating efficiently with a structure which allows the waste gas to mix with an auxiliary burning gas efficiently without the occurrence of backfire in a waste gas inlet pipe. The combustion type waste gas treatment system has a burner part and a combustion chamber. Combustion flames are formed to extend from the burner part toward the combustion chamber, and a combustible waste gas is introduced into the combustion flames from waste gas inlet pipes thereby oxidatively decomposing the waste gas. A flow velocity accelerating device makes the flow velocity of the combustible waste gas flowing through the waste gas inlet pipe higher than the burning velocity of the combustible waste gas.
摘要翻译：燃烧式废气处理系统能够在使废气与辅助燃烧气体混合的结构有效地加热的同时，有效地分解危险的可燃性废气，而不会在废气导入管中发生回火。燃烧式废气处理系统具有燃烧器部分和燃烧室。燃烧火焰形成为从燃烧器部分朝向燃烧室延伸，并且可燃废气从废气入口管道引入燃烧火焰中，从而氧化分解废气。流速加速装置使流过废气入口管的可燃废气的流速高于可燃废气的燃烧速度。

10. 发明授权

US07607914B2 Combustion type waste gas treatment system 有权
标题翻译：燃烧式废气处理系统
公开(公告)号：US07607914B2
公开(公告)日：2009-10-27
申请号：US11709811
申请日：2007-02-23
申请人： Tetsuo Komai , Kohtaro Kawamura , Takeshi Tsuji , Rikiya Nakamura , Kazutaka Okuda , Keiichi Ishikawa , Tomonori Ohashi , Yoshiro Takemura , Yasutaka Muroga , Tadakazu Nishikawa , Yuji Shirao
发明人： Tetsuo Komai , Kohtaro Kawamura , Takeshi Tsuji , Rikiya Nakamura , Kazutaka Okuda , Keiichi Ishikawa , Tomonori Ohashi , Yoshiro Takemura , Yasutaka Muroga , Tadakazu Nishikawa , Yuji Shirao
IPC分类号： F23D14/62
CPC分类号： F23C5/32 , F23D14/04 , F23G5/32 , F23G7/065 , F23G2209/142 , F23L7/007 , Y02E20/344
摘要： A combustion type waste gas treatment system capable of oxidatively decomposing a hazardous combustible waste gas while heating efficiently with a structure which allows the waste gas to mix with an auxiliary burning gas efficiently without the occurrence of backfire in a waste gas inlet pipe. The combustion type waste gas treatment system has a burner part and a combustion chamber. Combustion flames are formed to extend from the burner part toward the combustion chamber, and a combustible waste gas is introduced into the combustion flames from waste gas inlet pipes thereby oxidatively decomposing the waste gas. A flow velocity accelerating device makes the flow velocity of the combustible waste gas flowing through the waste gas inlet pipe higher than the burning velocity of the combustible waste gas.
摘要翻译：一种燃烧式废气处理系统，其能够在使废气与辅助燃烧气体高效混合的结构的同时有效地氧化分解有害的可燃性废气，而不会在废气导入管中发生回火。燃烧式废气处理系统具有燃烧器部分和燃烧室。燃烧火焰形成为从燃烧器部分朝向燃烧室延伸，并且可燃废气从废气入口管道引入燃烧火焰中，从而氧化分解废气。流速加速装置使流过废气入口管的可燃废气的流速高于可燃废气的燃烧速度。

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