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1. 发明申请

US20110106287A1 Wiring forming system and wiring forming method for forming wiring on wiring board 审中-公开
标题翻译：用于在布线板上形成布线的布线形成系统和布线形成方法
公开(公告)号：US20110106287A1
公开(公告)日：2011-05-05
申请号：US12929169
申请日：2011-01-05
申请人： Masatoshi Akagawa , Kazunari Sekigawa , Shinichi Kabayashi
发明人： Masatoshi Akagawa , Kazunari Sekigawa , Shinichi Kabayashi
IPC分类号： G06F19/00
CPC分类号： H05K1/0269 , H01L2924/0002 , H05K3/0005 , H05K3/0082 , H05K3/064 , H05K3/125 , H05K2203/013 , H05K2203/107 , H05K2203/162 , H01L2924/00
摘要： A wiring forming system comprises: maskless exposure unit which directly exposes an unexposed board by using exposure data generated based on design data relating to an wiring board; post-development inspect unit which tests the board after development, by using the exposure data and the image data of the board exposed and developed by the maskless exposure unit; etching unit which etches the developed board; and post-etching inspect unit which tests an etching pattern formed on the etched board, by using etching inspect data generated based on the design data and the image data of the board etched by the etching unit.
摘要翻译：布线形成系统包括：无掩模曝光单元，其通过使用基于与布线板相关的设计数据生成的曝光数据来直接曝光未曝光的印刷电路板; 开发后检查单元，通过使用曝光数据和由无掩模曝光单元曝光和显影的板的图像数据进行开发后测试板; 蚀刻单元，蚀刻开发板; 以及蚀刻后检查单元，其通过使用基于设计数据生成的蚀刻检查数据和由蚀刻单元蚀刻的板的图像数据来测试形成在蚀刻板上的蚀刻图案。

2. 发明授权

US07307691B2 Maskless direct exposure system and user interface 有权
标题翻译：无掩膜直接曝光系统和用户界面
公开(公告)号：US07307691B2
公开(公告)日：2007-12-11
申请号：US10974327
申请日：2004-10-27
申请人： Kazunari Sekigawa , Toshinori Koyama , Kazutaka Kobayashi , Masatoshi Akagawa
发明人： Kazunari Sekigawa , Toshinori Koyama , Kazutaka Kobayashi , Masatoshi Akagawa
IPC分类号： G03B27/46 , G03B27/42
CPC分类号： G03F7/70283 , G03F7/70291 , H05K3/0002 , H05K3/0005 , H05K3/0082
摘要： A direct exposure system comprises: a data mask that is a data object including drawing data; and a control mask that is a data object including at least one logical layer in which information about exposure conditions applied according to regions on a substrate is specified, and performs a direct exposure process using integrated data generated by combining the data mask with the control mask.
摘要翻译：直接曝光系统包括：作为包括绘图数据的数据对象的数据掩模; 以及作为包括至少一个逻辑层的控制掩模，所述至少一个逻辑层指定了根据基板上的区域应用的关于曝光条件的信息，并且使用通过将数据掩模与控制掩模组合而生成的积分数据进行直接曝光处理。

3. 发明授权

US07262832B2 Exposure apparatus and exposure method for performing high-speed and efficient direct exposure 有权
标题翻译：用于进行高速直接曝光的曝光装置和曝光方法
公开(公告)号：US07262832B2
公开(公告)日：2007-08-28
申请号：US11259810
申请日：2005-10-26
申请人： Kazunari Sekigawa
发明人： Kazunari Sekigawa
IPC分类号： G03B27/54 , G03B27/42
CPC分类号： G03F7/70291 , G03F7/70283 , G03F7/70508
摘要： In an exposure apparatus, in which exposure data necessary for direct exposure is sequentially supplied to an exposure engine having a plurality of exposure devices and, based on the supplied exposure data, the exposure engine forms an exposure pattern on an exposure target substrate which moves relative to the exposure engine, lights respectively produced from the exposure device groups based on the identical exposure data supplied to each of the plurality of exposure device groups, are projected via optics so as to be superimposed one on top of another on the same area on the exposure target substrate.
摘要翻译：在曝光装置中，其中直接曝光所需的曝光数据被顺序提供给具有多个曝光装置的曝光引擎，并且基于所提供的曝光数据，曝光引擎在曝光目标基板上形成相对于相对移动的曝光图案对于曝光引擎，基于提供给多个曝光装置组中的每一个的相同的曝光数据，从曝光装置组分别产生的光通过光学元件投影，以便在另一个上叠加在另一个上的相同区域上曝光目标基板。

4. 发明授权

US06463569B1 Method for designing a layout of a large scale integrated (LSI) circuit and a recording medium incorporating therein a program for such data processing 失效
标题翻译：用于设计大规模集成（LSI）电路的布局的方法和其中并入有用于这种数据处理的程序的记录介质
公开(公告)号：US06463569B1
公开(公告)日：2002-10-08
申请号：US09598497
申请日：2000-06-22
申请人： Kazunari Sekigawa
发明人： Kazunari Sekigawa
IPC分类号： G06F1750
CPC分类号： G06F17/5068
摘要： The present invention provides a method of data processing for calculating and storing in a memory to deform a data structure of layout designing data in which cells having geometry information and also having reference information to refer to geometry information of another cell are hierarchically combined with each other.
摘要翻译：本发明提供一种数据处理方法，用于计算和存储在存储器中以使布局设计数据的数据结构变形，其中具有几何信息的单元以及具有参考信息以引用另一个单元的几何信息彼此分层结合。

5. 发明授权

US08134444B2 Inductor and manufacturing method thereof 有权
标题翻译：电感及其制造方法
公开(公告)号：US08134444B2
公开(公告)日：2012-03-13
申请号：US12895915
申请日：2010-10-01
申请人： Michio Horiuchi , Yukio Shimizu , Kazunari Sekigawa , Tsuyoshi Kobayashi
发明人： Michio Horiuchi , Yukio Shimizu , Kazunari Sekigawa , Tsuyoshi Kobayashi
IPC分类号： H01F17/04 , H01R4/58
CPC分类号： H01F17/0013 , H01F41/041 , H01F2017/002 , Y10T29/4902
摘要： An inductor includes a core substrate including minute column-like electrical conductors extending between a front surface and a back surface of the core substrate. Each column-like electrical conductor is insulated from adjacent column-like electrical conductors by being surrounded by an insulating material. Insulation layers are formed on the front surface and the back surface of the core substrate, respectively. At least two connection electrical conductors extend through each of the insulation layers. Each connection electrical conductor is electrically connected to a plurality of the column-like electrical conductors. Wirings are formed on each of the insulation layers to connect said connection electrical conductors to each other electrically. The wirings, the connection electrical conductors and the column-like electrical conductors are connected to form a coil in a three-dimensional manner.
摘要翻译：电感器包括芯基板，其包括在芯基板的前表面和后表面之间延伸的微小列状电导体。每个柱状电导体被绝缘材料包围，与相邻的柱状电导体绝缘。绝缘层分别形成在芯基板的前表面和后表面上。至少两个连接电导体延伸穿过每个绝缘层。每个连接电导体电连接到多个柱状电导体。在每个绝缘层上形成布线，以将所述连接电导体彼此电连接。连线，连接电导体和列状电导体被连接以形成三维方式的线圈。

6. 发明授权

US07605941B2 Drawing apparatus and drawing-data-generation apparatus therefor as well as drawing method and drawing-data-generation method therefor to efficiently perform stable drawing operations 有权
标题翻译：绘图装置和绘图数据生成装置以及绘制方法和绘制数据生成方法，以有效地执行稳定的绘图操作
公开(公告)号：US07605941B2
公开(公告)日：2009-10-20
申请号：US11064087
申请日：2005-02-24
申请人： Kazunari Sekigawa
发明人： Kazunari Sekigawa
IPC分类号： G06K15/00 , G06T11/20
CPC分类号： G03F7/70508
摘要： A drawing apparatus in which drawing data, which is required to perform a drawing operation on drawing blocks on a surface that can be drawn at one time by drawing heads moving relatively to said drawn surface, is sequentially generated based on design data and temporarily stored in a memory and, then, sequentially supplied to drawing engines comprises computing means for computing drawing start instruction data to start the relative movement and the drawing operation of the drawing heads after a delay from the start of production of the drawing data so that at least the drawing data is stored in the memory.
摘要翻译：根据设计数据依次生成绘制数据，该绘制装置是通过绘制相对于所述绘制表面移动的头部一次绘制的表面上的绘制块进行绘制操作所需要的绘图数据，并且暂时存储在存储器，然后依次提供给绘图引擎，包括计算装置，用于计算绘图开始指令数据，以便从绘图数据的制作开始延迟开始绘图头的相对移动和绘制操作，使得至少绘图数据存储在存储器中。

7. 发明授权

US07266802B2 Drawing apparatus and drawing method 有权
标题翻译：绘图装置和绘图方法
公开(公告)号：US07266802B2
公开(公告)日：2007-09-04
申请号：US11191021
申请日：2005-07-28
申请人： Kazunari Sekigawa
发明人： Kazunari Sekigawa
IPC分类号： G06F17/50 , G06F19/00 , G21G5/00 , G21K5/00 , G03C5/00
CPC分类号： G06T7/0006 , G03F7/70291 , G03F7/70508
摘要： A drawing apparatus, for forming a desired drawing pattern by drawing the pattern directly on a drawing target surface using a drawing engine equipped with a plurality of drawing devices arranged along a direction of relative movement of the drawing target surface, the drawing engine being designed so that the design spacing of the thus arranged drawing devices is equal to a product of a unit pixel spacing in drawing data and an integer, comprises: correcting means for generating corrected drawing data by correcting the drawing data based on the difference between the design spacing and the actual spacing of the drawing devices; and supplying means for supplying the drawing engine with the corrected drawing data just necessary for direct drawing to a drawing block that the drawing engine can draw at a time on the drawing target surface, each time the drawing target substrate moves in relative fashion by a distance corresponding to an actual pixel spacing that is obtained by dividing the actual spacing of the drawing devices by that integer.
摘要翻译：一种绘图装置，用于通过使用配备有沿着绘图对象表面的相对移动方向布置的多个绘图装置的绘图引擎将绘制图案直接绘制在绘制目标表面上来形成期望的绘制图案，绘图引擎被设计为这样布置的绘图装置的设计间距等于绘图数据中的单位像素间距和整数的乘积，包括：校正装置，用于通过基于设计间距和绘图装置的实际间距; 以及提供装置，用于向绘图引擎提供校正的绘图数据，该直接绘图数据直接绘制到绘图引擎可以在绘制目标表面上一次绘制的绘图块，每次绘制目标衬底相对移动距离对应于通过将绘图装置的实际间隔除以该整数而获得的实际像素间隔。

8. 发明申请

US20060253295A1 Billing apparatus for direct drawing apparatus 审中-公开
标题翻译：直接拉丝装置的计费装置
公开(公告)号：US20060253295A1
公开(公告)日：2006-11-09
申请号：US11408556
申请日：2006-04-20
申请人： Kazunari Sekigawa , Masatoshi Akagawa
发明人： Kazunari Sekigawa , Masatoshi Akagawa
IPC分类号： G06Q99/00
CPC分类号： G06Q30/04 , G06Q10/06
摘要： A billing apparatus, for a direct drawing apparatus in which drawing data generated based on layout design data and necessary for drawing is supplied to a drawing engine in real time during the drawing and, based on the drawing data, the drawing engine forms a drawing pattern on a drawing target moving relative to the drawing engine, comprises: counting means for counting the number of frames in the drawing data supplied to the drawing engine, one drawing data frame being constructed by packetizing data of an amount necessary for a drawing head in the drawing engine to perform one drawing operation; and billing charge determining means for determining a billing charge based on the number of frames counted by the counting means.
摘要翻译：一种用于直接绘图装置的计费装置，其中在绘图期间实时地将基于布局设计数据生成的绘制数据和绘制所需的绘图引擎实时地提供给绘图装置，并且基于绘图数据，绘图引擎形成绘图模式在相对于绘图引擎移动的绘制目标上，包括：计数装置，用于对提供给绘图引擎的绘制数据中的帧数进行计数，一个绘图数据帧是通过将绘制头所需的数据的数据打包在绘图引擎执行一个绘图操作; 以及记帐费用确定装置，用于基于由计数装置计数的帧数来确定记帐费。

9. 发明申请

US20060114440A1 Direct exposure apparatus and direct exposure method 有权
公开(公告)号：US20060114440A1
公开(公告)日：2006-06-01
申请号：US11291658
申请日：2005-11-30
申请人： Kazunari Sekigawa , Hiroaki Samizu , Takahiro Inoue
发明人： Kazunari Sekigawa , Hiroaki Samizu , Takahiro Inoue
IPC分类号： G03B27/72
CPC分类号： G03F7/70666 , G03F7/70141
摘要： A direct exposure apparatus having a light source for projecting light onto an exposure target or, more specifically, an exposure target substrate, comprises: measuring means for measuring the illuminance distribution of light on an area corresponding to the exposure surface of the exposure target substrate; and control means for controlling, based on the measurement result supplied from the measuring means, the light source so that the intended illuminance distribution can be obtained.

10. 发明申请

US20060091323A1 Exposure apparatus and exposure method for performing high-speed and efficient direct exposure 有权
标题翻译：用于进行高速直接曝光的曝光装置和曝光方法
公开(公告)号：US20060091323A1
公开(公告)日：2006-05-04
申请号：US11259810
申请日：2005-10-26
申请人： Kazunari Sekigawa
发明人： Kazunari Sekigawa
IPC分类号： G21G5/00 , A61N5/00
CPC分类号： G03F7/70291 , G03F7/70283 , G03F7/70508
摘要： An exposure apparatus, in which exposure data necessary for direct exposure is sequentially supplied to an exposure engine having a plurality of exposure devices and, based on the thus supplied exposure data, the exposure engine forms an exposure pattern on an exposure target substrate moving relative to the exposure engine, comprising: data supplying means for supplying the same exposure data to each of a plurality of exposure device groups formed by dividing the plurality of exposure devices in the exposure engine into groups; and optics via which lights respectively produced from the exposure device groups based on the exposure data supplied from the data supplying means are projected so as to be superimposed one on top of another on the same area on the exposure target substrate.
摘要翻译：一种曝光装置，其中将直接曝光所需的曝光数据依次提供给具有多个曝光装置的曝光引擎，并且基于由此提供的曝光数据，曝光引擎在曝光目标基板上相对于曝光引擎，包括：数据提供装置，用于将通过将曝光引擎中的多个曝光装置分割成组而形成的多个曝光装置组中的每一个提供相同的曝光数据; 以及基于从数据提供装置提供的曝光数据从曝光装置组分别产生的光的投射光以便在曝光对象基板上的同一区域上叠加在另一个上。

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