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    • 6. 发明申请
    • METHOD FOR MANUFACTURING LIQUID EJECTING HEAD
    • 制造液体喷射头的方法
    • US20130029056A1
    • 2013-01-31
    • US13545390
    • 2012-07-10
    • Kazuhiro AsaiMasaki OhsumiYoshinori Tagawa
    • Kazuhiro AsaiMasaki OhsumiYoshinori Tagawa
    • B05D1/00B05D3/06B05D3/12B29C39/12
    • B29C39/12B41J2/1603B41J2/1628B41J2/1629B41J2/1631B41J2/1632B41J2/1639B41J2/1645
    • A method for manufacturing a liquid ejecting head including an orifice plate having an ejecting orifice and a liquid channel, and a substrate having a liquid ejecting energy generating element and a liquid supply port, the method including: (1) forming a liquid channel mold of a soluble resin dissolved in (6) on the substrate; (2) coating the liquid channel mold with a photosensitive resin layer having a refractive index of n at an exposure wavelength used in (4); (3) forming an antireflective film having a refractive index of √n−0.2 or more to √n+0.2 or less at the exposure wavelength used in (4) on the photosensitive resin layer; (4) exposing and developing the photosensitive resin layer and antireflective film to form the ejecting orifice; (5) forming the liquid supply port on the substrate; and (6) dissolving and removing the liquid channel mold from the liquid supply port.
    • 一种液体喷射头的制造方法,其特征在于,包括具有排出孔和液体通道的孔板,以及具有液体喷射能量产生元件和液体供给口的基板,所述方法包括:(1)形成液体流道模具 溶解在基底上的(6)中的可溶性树脂; (2)在(4)中使用的曝光波长下,用折射率为n的感光性树脂层涂布液体通道模具; (3)在感光性树脂层上的(4)中使用的曝光波长下,形成折射率为-0n以上0.2nm以下的抗反射膜; (4)曝光和显影感光树脂层和抗反射膜以形成喷射孔; (5)在基板上形成液体供给口; 和(6)从液体供给口溶解和除去液体通道模具。