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    • 4. 发明申请
    • Seal Plate, Seal Member that is Used in Seal Plate, and Method for Manufacturing the Same
    • 用于密封板的密封板,密封件及其制造方法
    • US20110169229A1
    • 2011-07-14
    • US13119473
    • 2009-09-15
    • Masato HamadeTsutomu YoshidaNobuhiro YoshidaKazuaki Tsuji
    • Masato HamadeTsutomu YoshidaNobuhiro YoshidaKazuaki Tsuji
    • F16J15/02B60J10/00
    • F16J15/104F16J15/102F16K3/0218F16K3/0227F16K51/02Y10T156/1043
    • In a vacuum gate valve, a seal member for sealing a gate opening part is bonded to an outer edge part of a planar seal plate that is disposed in such a manner that the planar seal plate is opposed to a valve seat surface of the gate opening part and comes into contact with the valve seat surface. The seal member includes a vacuum seal part that is located on a side farther from the gate opening part and maintains the sealability of the gate opening part when the gate opening part is closed, and also includes a radical seal part that is located on a side closer to the gate opening part and that prevents the seal member from being affected by a treatment gas in the gate opening part when the gate opening part is closed. The vacuum seal part is made of a rubber elastic body, and the radical seal part is configured by providing a radical resistant body that is provided with an excellent radical resistance on the rubber elastic body.
    • 在真空闸阀中,用于密封闸门开口部的密封构件被接合到平面密封板的外边缘部分,该平面密封板的设置方式使得平面密封板与门开口的阀座表面相对 并与阀座表面接触。 密封构件包括真空密封部,该真空密封部位于离开门开口部更远的一侧,并且当开口部闭合时保持开口部的密封性,还包括位于侧面的自由度密封部 更靠近闸门开口部分,并且当门打开部分关闭时防止密封件受到门开口部分中的处理气体的影响。 真空密封部分由橡胶弹性体制成,并且通过在橡胶弹性体上设置具有优异的自由基阻力的自由基体,构成自由基密封部。