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    • 1. 发明授权
    • Optical space communication
    • 光学空间通信
    • US5680241A
    • 1997-10-21
    • US614263
    • 1996-03-12
    • Tetsuo SakanakaKanjo Orino
    • Tetsuo SakanakaKanjo Orino
    • H04B10/10H04B10/00
    • H04B10/1121
    • An optical space communication method is for communication with a laser as a radiative source and with a light signal therefrom propagating in the atmosphere. In the method, the communication is performed under the following conditions. In case a transmission distance of optical space communication is between 100 m inclusive and 200 m, the laser is a laser with an oscillation wavelength L (nm) in a wavelength range of between 967 run inclusive and 1110 nm or in a wavelength range of between 1165 nm inclusive and 1315 nm, whereas in case the transmission distance is not less than 200 m, the laser is a laser with an oscillation wavelength L (run) in a wavelength range of between 986 nm inclusive and 1090 nm or in a wavelength range of between 1225 nm inclusive and 1295 nm. At any position in a transmission path between a transmitter exit and a receiver entrance, an irradiance is set to at most 6.47.multidot.10.sup.(L-700)/500 (W/m.sup.2) where the oscillation wavelength L (nm) of the laser is in a wavelength range of 950 nm to 1050 nm while to at most 32.3 (W/m.sup.2) where the oscillation wavelength L is in a wavelength range of 1050 nm to 1400 nm.
    • 光学空间通信方法用于与激光作为辐射源通信,并且其光信号在大气中传播。 在该方法中,在以下条件下进行通信。 在光学空间通信的传输距离在100微米到200微米之间的情况下,激光器是在波长范围为967nm至1110nm之间或在波长范围内的振荡波长L(nm)的激光器 1165nm和1315nm,而在传输距离不小于200μm的情况下,激光是在986nm至1090nm之间或在波长范围内具有振荡波长L(游程)的激光器 在1225nm和1295nm之间。 在发射器出口和接收器入口之间的传输路径中的任何位置,辐射度被设定为激光器的振荡波长L(nm)为至多6.47×10(L-700)/ 500(W / m 2) 波长范围为950nm至1050nm,而至多32.3(W / m 2),其中振荡波长L在1050nm至1400nm的波长范围内。
    • 2. 发明授权
    • Optical transmitter-receiver
    • 光收发器
    • US5627669A
    • 1997-05-06
    • US975018
    • 1992-11-12
    • Kanjo OrinoTetsuo SakanakaYasusaburo DeguraTakehide Hamuro
    • Kanjo OrinoTetsuo SakanakaYasusaburo DeguraTakehide Hamuro
    • H04B10/118H04B10/00
    • H04B10/118
    • This specification discloses a communication apparatus provided with light emitting means for generating transmission light modulated by an information signal, light receiving means for receiving modulated reception light, an optical member for reflecting one of the transmission light and the reception light and transmitting the other therethrough, a reflecting member for reflecting the transmission light emerging from the optical member to the transmission side and reflecting the reception light to the optical member, light splitting means for splitting part of the reception light obtained through the optical member, detecting means for detecting the positional state of the light obtained from the light splitting means, and driving means for rotatively driving the reflecting member about two axes in accordance with the positional state of the light detected by the detecting means. The specification further discloses an apparatus which has a lens unit having positive refractive power disposed between the light emitting means and the light splitting means and in which at least one lens constituting the lens unit is moved to thereby vary the state of the light beam.
    • 本说明书公开了一种通信装置,其具备发送装置,用于产生由信息信号调制的透射光,用于接收调制的接收光的光接收装置,用于反射发射光和接收光之一的光学部件, 用于将从光学构件出射的透射光反射到发射侧并将接收光反射到光学构件的反射构件,用于分离通过光学构件获得的接收光的一部分的分光装置,用于检测位置状态的检测装置 以及驱动装置,用于根据由检测装置检测的光的位置状态围绕两个轴旋转地驱动反射部件。 本说明书还公开了一种装置,其具有设置在发光装置和分光装置之间的具有正折射力的透镜单元,其中构成透镜单元的至少一个透镜被移动,从而改变光束的状态。
    • 3. 发明授权
    • Illumination optical system and exposure apparatus having the same
    • 照明光学系统和具有该光学系统的曝光装置
    • US07499145B2
    • 2009-03-03
    • US10959350
    • 2004-10-06
    • Kanjo Orino
    • Kanjo Orino
    • G03B27/54
    • G03F7/70183
    • An illumination optical system for illuminating an object surface using light from a light source, the illumination optical system includes, a first optical system that includes a movable unit that is movable along an optical axis, said first optical system guiding the light to the object surface and varying an irradiation area on a certain plane, and a second optical system that can be located on and removed from an optical path of said first optical system, the second optical system varies, when located on the optical path of said first optical system, the irradiation area on the certain plane in cooperation with said first optical system, while maintaining a shape of a light intensity distribution on the certain plane, relative to the irradiation area irradiated only by said first optical system.
    • 一种用于使用来自光源的光照射物体表面的照明光学系统,所述照明光学系统包括:第一光学系统,其包括可沿着光轴移动的可移动单元,所述第一光学系统将光引导到所述物体表面 并且改变某一平面上的照射区域,以及可位于所述第一光学系统的光路上并从其移除的第二光学系统,当位于所述第一光学系统的光路上时,所述第二光学系统变化, 与所述第一光学系统配合的某一平面上的照射区域,同时相对于仅由所述第一光学系统照射的照射区域保持在该平面上的光强度分布的形状。
    • 4. 发明申请
    • Illumination optical system, exposure apparatus, and device manufacturing method using the same
    • 照明光学系统,曝光装置和使用其的装置制造方法
    • US20050230599A1
    • 2005-10-20
    • US11105866
    • 2005-04-13
    • Kanjo Orino
    • Kanjo Orino
    • G02B13/24G02B13/14G02B13/18G02B13/22G02B15/167G03F7/20H01L21/027G01N21/86
    • G03F7/70058
    • Disclosed is an illumination optical system having an imaging optical system for imaging a predetermined object plane upon an image plane, by use of light supplied from an integrator that functions to produce a plurality of light sources using light from a light source. In one preferred form of the invention, the imaging optical system includes, in an order from a light incidence side thereof, a first lens group having a positive power, a second lens group having a negative power, and a third lens group having a positive power, wherein the second lens group includes a concave lens at a light exit side thereof and wherein the third lens group includes a convex lens at a light entrance side thereof. The position of intersection between an optical axis of the imaging optical system and a principal ray of abaxial light is defined between the second lens group and the third lens group.
    • 公开了一种具有成像光学系统的照明光学系统,该成像光学系统通过使用从利用来自光源的光产生多个光源的积分器提供的光来在图像平面上成像预定物体平面。 在本发明的一个优选形式中,成像光学系统从其入射侧依次包括具有正光焦度的第一透镜组,具有负光焦度的第二透镜组和具有负光焦度的第三透镜组 功率,其中所述第二透镜组在其光出射侧包括凹透镜,并且其中所述第三透镜组在其光入射侧包括凸透镜。 在第二透镜组和第三透镜组之间限定成像光学系统的光轴与主轴之间的相交位置。
    • 5. 发明申请
    • Illumination optical system and exposure apparatus having the same
    • 照明光学系统和具有该光学系统的曝光装置
    • US20050094997A1
    • 2005-05-05
    • US10959350
    • 2004-10-06
    • Kanjo Orino
    • Kanjo Orino
    • G02B19/00G02B15/04G02B15/10G02B15/167G03F7/20H01L21/027H04B10/08
    • G03F7/70183
    • An illumination optical system for illuminating an object surface using light from a light source, the illumination optical system includes, a first optical system that includes a movable unit that is movable along an optical axis, said first optical system guiding the light to the object surface and varying an irradiation area on a certain plane, and a second optical system that can be located on and removed from an optical path of said first optical system, the second optical system varies, when located on the optical path of said first optical system, the irradiation area on the certain plane in cooperation with said first optical system, while maintaining a shape of a light intensity distribution on the certain plane, relative to the irradiation area irradiated only by said first optical system.
    • 一种用于使用来自光源的光照射物体表面的照明光学系统,所述照明光学系统包括:第一光学系统,其包括可沿着光轴移动的可移动单元,所述第一光学系统将光引导到所述物体表面 并且改变某一平面上的照射区域,以及可位于所述第一光学系统的光路上并从其移除的第二光学系统,当位于所述第一光学系统的光路上时,所述第二光学系统变化, 与所述第一光学系统配合的某一平面上的照射区域,同时相对于仅由所述第一光学系统照射的照射区域保持在该平面上的光强度分布的形状。
    • 6. 发明授权
    • Illumination optical system and exposure apparatus having the same
    • 照明光学系统和具有该光学系统的曝光装置
    • US08154707B2
    • 2012-04-10
    • US12330910
    • 2008-12-09
    • Kanjo Orino
    • Kanjo Orino
    • G03B27/54G02B15/02
    • G03F7/70183
    • An illumination optical system for illuminating an object surface using light from a light source, the illumination optical system includes, a first optical system that includes a movable unit that is movable along an optical axis, said first optical system guiding the light to the object surface and varying an irradiation area on a certain plane, and a second optical system that can be located on and removed from an optical path of said first optical system, the second optical system varies, when located on the optical path of said first optical system, the irradiation area on the certain plane in cooperation with said first optical system, while maintaining a shape of a light intensity distribution on the certain plane, relative to the irradiation area irradiated only by said first optical system.
    • 一种用于使用来自光源的光照射物体表面的照明光学系统,所述照明光学系统包括:第一光学系统,其包括可沿着光轴移动的可移动单元,所述第一光学系统将光引导到所述物体表面 并且改变某一平面上的照射区域,以及可位于所述第一光学系统的光路上并从其移除的第二光学系统,当位于所述第一光学系统的光路上时,所述第二光学系统变化, 与所述第一光学系统配合的某一平面上的照射区域,同时相对于仅由所述第一光学系统照射的照射区域保持在该平面上的光强度分布的形状。
    • 7. 发明授权
    • Illumination optical system, exposure apparatus, and device manufacturing method using the same
    • 照明光学系统,曝光装置和使用其的装置制造方法
    • US07170686B2
    • 2007-01-30
    • US11105866
    • 2005-04-13
    • Kanjo Orino
    • Kanjo Orino
    • G02B9/00G02B15/14G03B27/54G03B27/52G02B13/30
    • G03F7/70058
    • Disclosed is an illumination optical system having an imaging optical system for imaging a predetermined object plane upon an image plane, by use of light supplied from an integrator that functions to produce a plurality of light sources using light from a light source. In one preferred form of the invention, the imaging optical system includes, in an order from a light incidence side thereof, a first lens group having a positive power, a second lens group having a negative power, and a third lens group having a positive power, wherein the second lens group includes a concave lens at a light exit side thereof and wherein the third lens group includes a convex lens at a light entrance side thereof. The position of intersection between an optical axis of the imaging optical system and a principal ray of abaxial light is defined between the second lens group and the third lens group.
    • 公开了一种具有成像光学系统的照明光学系统,该成像光学系统通过使用从利用来自光源的光产生多个光源的积分器提供的光来在图像平面上成像预定物体平面。 在本发明的一个优选形式中,成像光学系统从其入射侧依次包括具有正光焦度的第一透镜组,具有负光焦度的第二透镜组和具有负光焦度的第三透镜组 功率,其中所述第二透镜组在其光出射侧包括凹透镜,并且其中所述第三透镜组在其光入射侧包括凸透镜。 在第二透镜组和第三透镜组之间限定成像光学系统的光轴与主轴之间的相交位置。
    • 10. 发明申请
    • ILLUMINATION OPTICAL SYSTEM AND EXPOSURE APPARATUS HAVING THE SAME
    • 照明光学系统和具有该光学系统的曝光装置
    • US20090091735A1
    • 2009-04-09
    • US12330910
    • 2008-12-09
    • Kanjo ORINO
    • Kanjo ORINO
    • G03B27/54
    • G03F7/70183
    • An illumination optical system for illuminating an object surface using light from a light source, the illumination optical system includes, a first optical system that includes a movable unit that is movable along an optical axis, said first optical system guiding the light to the object surface and varying an irradiation area on a certain plane, and a second optical system that can be located on and removed from an optical path of said first optical system, the second optical system varies, when located on the optical path of said first optical system, the irradiation area on the certain plane in cooperation with said first optical system, while maintaining a shape of a light intensity distribution on the certain plane, relative to the irradiation area irradiated only by said first optical system.
    • 一种用于使用来自光源的光照射物体表面的照明光学系统,所述照明光学系统包括:第一光学系统,其包括可沿着光轴移动的可移动单元,所述第一光学系统将光引导到所述物体表面 并且改变某一平面上的照射区域,以及可位于所述第一光学系统的光路上并从其移除的第二光学系统,当位于所述第一光学系统的光路上时,所述第二光学系统变化, 与所述第一光学系统配合的某一平面上的照射区域,同时相对于仅由所述第一光学系统照射的照射区域保持在该平面上的光强度分布的形状。