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1. 发明授权

US5804813A Differential confocal microscopy 失效
标题翻译：差分共焦显微镜
公开(公告)号：US5804813A
公开(公告)日：1998-09-08
申请号：US659647
申请日：1996-06-06
申请人： Jyh Pyng Wang , Chau-Hwang Lee
发明人： Jyh Pyng Wang , Chau-Hwang Lee
IPC分类号： G02B21/00 , G02B21/06 , G02B21/26
CPC分类号： G02B21/0072 , G02B21/006 , G02B21/0084
摘要： The linear slope range of the axial response curve of confocal imaging is utilized to obtain nanometer depth resolution, a sample which is at the top of a piezo-electric translator (PZT) 6, using a highly spatial-coherent light source, high numerical aperture focusing devices, a pinhole, and an optical detector to produce the axial response of confocal imaging Before the measurement, the calibration of height and resolution must be done by fitting the linear slope range of the axial response curve to a straight fitting line. While measuring surface profiles, the sample height is first finely adjusted to the linear slope range, and a two-dimensional scanning is then performed on the plane vertical to the detecting light beam. The signal of optical detector which represents the variation of the surface height, is then recorded. In this way, a three-dimensional image of the sample surface profile can be obtained with nanometer depth resolution. As the system does not require any feed-back control circuit to lock the position of the sample to be detected, it operates in open-loop and has the ability of real-time image display.
摘要翻译：利用共焦成像的轴向响应曲线的线性斜率范围获得纳米深度分辨率，一个位于压电转换器（PZT）6顶部的样本，使用高空间相干光源，高数值孔径聚焦装置，针孔和光学检测器以产生共焦成像的轴向响应在测量之前，必须通过将轴向响应曲线的线性斜率范围拟合成直线拟合线来进行高度和分辨率的校准。在测量表面轮廓时，首先将样品高度精细调整到线性斜率范围，然后在垂直于检测光束的平面上进行二维扫描。然后记录表示表面高度变化的光学检测器的信号。以这种方式，可以用纳米深度分辨率获得样品表面轮廓的三维图像。由于系统不需要任何反馈控制电路来锁定待检测样品的位置，因此它可以开环工作，具有实时图像显示的能力。

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