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1. 发明授权

US07014786B2 Methods and apparatus for forming submicron patterns on films 失效
公开(公告)号：US07014786B2
公开(公告)日：2006-03-21
申请号：US10144961
申请日：2002-05-14
申请人： Erik Schaffer , Jurgen Mlynek , Ullrich Steiner , Thomas Thurn-Albrecht , Thomas P. Russell
发明人： Erik Schaffer , Jurgen Mlynek , Ullrich Steiner , Thomas Thurn-Albrecht , Thomas P. Russell
IPC分类号： B44C1/22
CPC分类号： G03F7/0002 , B82Y10/00 , B82Y40/00 , H01L21/31058 , H05K3/0011 , Y10T428/24521
摘要： A method for forming a patterned film on a substrate, the method including: providing a first flowable medium on the substrate and a second flowable medium on the first flowable medium, the first and second flowable media having different dielectric properties and defining an interface there between; applying an electric field to the interface for a time sufficient to produce a structure in the first flowable medium along the interface: and hardening the structure in the first flowable medium to form the patterned film.

2. 发明授权

US5999547A Tunable optical parametric oscillator 失效
标题翻译：可调光参量振荡器
公开(公告)号：US5999547A
公开(公告)日：1999-12-07
申请号：US17964
申请日：1998-02-02
申请人： Klaus Schneider , Stephan Schiller , Jurgen Mlynek , Patrick Kramper
发明人： Klaus Schneider , Stephan Schiller , Jurgen Mlynek , Patrick Kramper
IPC分类号： G02F1/35 , G02F1/39 , H01S3/108
CPC分类号： G02F1/39 , G02F2001/3546
摘要： An optical parameter oscillator system is proposed for use in a continuous wave pump laser system having a single-frequency pump source. The system comprises a single-resonance resonator having a nonlinear medium to produce a first and second parametrically generated wave in response to the pump wave from the single-frequency pump source. The system includes means for controlling the cavity length of the resonator, means for controlling the pump frequency of the pump source and means for controlling the temperature of the nonlinear medium. The system provides for a reliable singly-resonant optical parametric oscillator capable of emitting laser light with high spectral purity and frequency stability over a wide spectral range and is resistant to mode hopping.
摘要翻译：提出了一种用于具有单频泵浦源的连续波泵激光系统中的光参数振荡器系统。该系统包括具有非线性介质的单谐振谐振器，以响应于来自单频泵浦源的泵浦波而产生第一和第二参数产生的波。该系统包括用于控制谐振器的腔体长度的装置，用于控制泵浦源的泵浦频率的装置和用于控制非线性介质的温度的装置。该系统提供了一种可靠的单谐振光学参量振荡器，能够在宽光谱范围内发射具有高光谱纯度和频率稳定性的激光，并且能够抵抗模式跳变。

3. 发明授权

US06391217B2 Methods and apparatus for forming submicron patterns on films 失效
标题翻译：在薄膜上形成亚微米图案的方法和装置
公开(公告)号：US06391217B2
公开(公告)日：2002-05-21
申请号：US09746667
申请日：2000-12-22
申请人： Erik Schäffer , Jurgen Mlynek , Ullrich Steiner , Thomas Thurn-Albrecht , Thomas P. Russell
发明人： Erik Schäffer , Jurgen Mlynek , Ullrich Steiner , Thomas Thurn-Albrecht , Thomas P. Russell
IPC分类号： B44C122
CPC分类号： G03F7/0002 , B82Y10/00 , B82Y40/00 , H01L21/31058 , H05K3/0011 , Y10T428/24521
摘要： A method for forming a patterned film on a substrate, the method including: providing a first flowable medium on the substrate and a second flowable medium on the first flowable medium, the first and second flowable media having different dielectric properties and defining an interface there between; applying an electric field to the interface for a time sufficient to produce a structure in the first flowable medium along the interface; and hardening the structure in the first flowable medium to form the patterned film.
摘要翻译：一种在衬底上形成图案化膜的方法，所述方法包括：在所述衬底上提供第一可流动介质和在所述第一可流动介质上提供第二可流动介质，所述第一和第二可流动介质具有不同的介电特性并且在其之间界定界面 ; 将电场施加到所述界面足够的时间以产生沿所述界面的所述第一可流动介质中的结构; 并硬化第一可流动介质中的结构以形成图案化膜。

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