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    • 1. 发明授权
    • Method of manufacturing flash memory device
    • 制造闪存设备的方法
    • US07468298B2
    • 2008-12-23
    • US11489392
    • 2006-07-19
    • Jung Woong Lee
    • Jung Woong Lee
    • H01L21/338
    • H01L29/42324H01L21/76232H01L27/115H01L27/11521
    • A method of manufacturing a flash memory device, wherein, when a first polysilicon layer is formed, a doped polysilicon layer and an amorphous polysilicon layer are formed so that they are laminated. A process of forming a sidewall oxide film and an oxide film and a thermal treatment process are performed to form the profile of the first polysilicon layer negatively. It is therefore possible to prevent the remnants of the first polysilicon layer below the isolation film. Accordingly, a failure in which the floating gates adjacent in the direction of the isolation film are connected by the remnants of the first polysilicon layer can be prevented.
    • 一种制造闪速存储器件的方法,其中当形成第一多晶硅层时,形成掺杂多晶硅层和非晶多晶硅层,使得它们被层压。 进行形成侧壁氧化膜和氧化膜的工艺以及热处理工艺,以形成第一多晶硅层的轮廓。 因此,可以防止隔离膜下面的第一多晶硅层的残留物。 因此,可以防止在隔离膜的方向上相邻的浮置栅极与第一多晶硅层的残留物相连接的故障。
    • 3. 发明授权
    • Method for manufacturing flash memory device
    • 闪存器件制造方法
    • US06987046B2
    • 2006-01-17
    • US10882451
    • 2004-06-30
    • In Kwon YangByoung Ki LeeJung Woong Lee
    • In Kwon YangByoung Ki LeeJung Woong Lee
    • H01L21/8238H01L21/336H01L21/8234
    • H01L27/11521H01L21/32139H01L27/115
    • The present invention discloses a method for manufacturing a flash memory device including the steps of: sequentially forming a first polysilicon film for a floating gate electrode, a first oxide film, a polysilicon film for a hard mask and a second oxide film on a semiconductor substrate; etching and patterning the second oxide film and the polysilicon film for the hard mask, by forming photoresist patterns on a predetermined region of the second oxide film, and removing the photoresist patterns; forming spacers on the sidewalls of the polysilicon film for the hard mask, by forming and etching a polysilicon film for forming spacers on the whole surface of the resulting structure; removing the exposed first oxide film and a predetermined thickness of second oxide film formed on the patterned polysilicon film for the hard mask; forming floating gate electrode patterns by performing first and second etching processes by using the patterned polysilicon film for the hard mask and the spacers as an etch mask; performing a cleaning process on the whole surface of the resulting structure, and removing the residual second oxide film at the same time; and forming control gate electrode patterns, by sequentially forming and patterning an ONO film, a second polysilicon film for a control gate electrode, a metal silicide film and a hard mask on the resulting structure on which the floating gate electrode patterns have been formed.
    • 本发明公开了一种闪速存储器件的制造方法,包括以下步骤:顺序地形成用于浮置栅极的第一多晶硅膜,第一氧化膜,用于硬掩模的多晶硅膜和半导体衬底上的第二氧化物膜 ; 通过在第二氧化膜的预定区域上形成光致抗蚀剂图案,去除光致抗蚀剂图案,蚀刻和图案化第二氧化物膜和用于硬掩模的多晶硅膜; 在用于硬掩模的多晶硅膜的侧壁上形成间隔物,通过在所得结构的整个表面上形成和蚀刻用于形成间隔物的多晶硅膜; 去除暴露的第一氧化物膜和形成在用于硬掩模的图案化多晶硅膜上的预定厚度的第二氧化膜; 通过使用用于硬掩模的图案化多晶硅膜和间隔物作为蚀刻掩模,通过执行第一和第二蚀刻工艺来形成浮栅电极图案; 在所得结构的整个表面上进行清洁处理,同时去除残留的第二氧化膜; 以及通过在其上形成有浮栅电极图案的所得结构上顺序地形成和图案化ONO膜,用于控制栅电极的第二多晶硅膜,金属硅化物膜和硬掩模来形成控制栅电极图案。
    • 7. 发明申请
    • PLANE HEATING ELEMENT USING CERAMIC GLASS
    • 使用陶瓷玻璃的平面加热元件
    • US20130175257A1
    • 2013-07-11
    • US13823295
    • 2011-09-08
    • Won-Bae LeeKi-Bum ParkSeong-Yong ParkJung-Woong LeeSang-Gil DoIn-Bum Jeong
    • Won-Bae LeeKi-Bum ParkSeong-Yong ParkJung-Woong LeeSang-Gil DoIn-Bum Jeong
    • H05B3/00
    • H05B3/0004H05B3/265H05B2203/002H05B2203/013
    • The present invention relates to a plane heating element which is supplied with power to generate heat. The plane heating element may include a support layer made of ceramic glass, a heat-generating layer which is formed by printing heat-generating paste on the upper surface of the support layer, and an insulating layer which is formed by applying insulating paste on the upper surface of the heat-generating layer. The heat generating paste may be dried and plasticized, and receives predetermined power to generate heat. The insulating paste may be dried and plasticized and may be configured to insulate the and prevent oxidation of the heat-generating layer. The present invention provides a strong adhesion with respect to a glass substrate and makes it possible to increase temperature up to a target level in a short time, and thus can be used as an effective printing method in various electric and electronic product fields.
    • 本发明涉及一种被供电以产生热量的平面加热元件。 平面加热元件可以包括由陶瓷玻璃制成的支撑层,通过在支撑层的上表面上印刷发热膏形成的发热层和通过在绝缘层上施加绝缘膏形成的绝缘层 发热层的上表面。 发热膏可以被干燥和塑化,并且接收预定的功率以产生热量。 绝缘膏可以被干燥和塑化,并且可以被配置为绝热并防止发热层的氧化。 本发明提供了对玻璃基板的强粘合性,并且能够在短时间内将温度升高到目标水平,因此可以用作各种电气和电子产品领域中的有效印刷方法。