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    • 9. 发明授权
    • In-line gas purity monitoring and control system
    • 在线气体纯度监控系统
    • US07438079B2
    • 2008-10-21
    • US11051099
    • 2005-02-04
    • Joseph Perry CohenFrank Kenneth SchweighardtDavid John Farese
    • Joseph Perry CohenFrank Kenneth SchweighardtDavid John Farese
    • G05D11/00
    • G05D11/138B01F3/028B01F15/00207Y02E60/366Y10T137/0329Y10T137/2499Y10T137/2509
    • Method for supplying a high purity gas product comprising providing a first gas stream including a major component and at least one impurity component, determining the concentration of the at least one impurity component, and comparing the concentration so determined with a reference concentration for that component. When the value of the concentration so determined is less than or equal to the reference concentration, the first gas stream is utilized to provide the high purity gas product. When the value of the concentration so determined is greater than the reference concentration, a second gas stream comprising the major component is provided and the first and second gas streams are mixed to yield a mixed gas stream having a concentration of the at least one impurity component that is less than the reference concentration. The mixed gas stream is utilized to provide the high purity gas product.
    • 用于提供高纯度气体产物的方法,包括提供包括主要组分和至少一种杂质组分的第一气流,确定至少一种杂质组分的浓度,并将所确定的浓度与该组分的参考浓度进行比较。 当如此确定的浓度的值小于或等于参考浓度时,第一气流用于提供高纯度气体产物。 当如此确定的浓度的值大于参考浓度时,提供包含主要组分的第二气流,并且混合第一和第二气流以产生具有至少一种杂质组分浓度的混合气流 小于参考浓度。 混合气流用于提供高纯度气体产品。