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    • 9. 发明授权
    • ESD structure
    • ESD结构
    • US07709907B2
    • 2010-05-04
    • US11267175
    • 2005-11-07
    • Stephen Joseph GaulMichael D. ChurchJames Edwin Vinson
    • Stephen Joseph GaulMichael D. ChurchJames Edwin Vinson
    • H01L27/088
    • H01L29/78H01L27/0251
    • An IGFET that minimizes the effect of the dislocation at the edge of the device region by displacing the lateral edges of the source and drain regions from the adjacent edge of the opening and the dislocation. This minimizes the lateral diffusion of the source and drain impurities and the formation of metal silicides into the dislocation region. The spacing of the lateral edges of the source and drain regions from the adjacent edge of the opening and the dislocation region is produced by providing additional lateral opposed second gate regions or oxide barrier layer extending from the oxide layer into the adjacent regions of the substrate region and the first gate region extending therebetween. Both the first gate region and the two second gate regions or barrier layer are used in the self-aligned processing of the source and drain regions. The first gate region defines the length of the channel, while the two opposed second gate regions or barrier layer define the width of the channel region. The second gate portion or barrier extends sufficiently into the substrate region to space the width of the channel from the adjacent edge of the opening in the oxide.
    • IGFET,其通过从源极和漏极区域的相邻边缘和位错移位源极和漏极区域的侧边缘来最小化器件区域边缘处位错的影响。 这使源极和漏极杂质的横向扩散和金属硅化物形成到位错区域最小化。 源极和漏极区域与开口的相邻边缘和位错区域的横向边缘的间隔通过提供从氧化物层延伸到衬底区域的相邻区域中的附加横向相对的第二栅极区域或氧化物阻挡层而产生 并且其间延伸的第一栅极区域。 在源极和漏极区域的自对准处理中都使用第一栅极区域和两个第二栅极区域或势垒层。 第一栅极区域限定沟道的长度,而两个相对的第二栅极区域或阻挡层限定沟道区域的宽度。 第二栅极部分或屏障充分延伸到衬底区域中,以使通道的宽度与氧化物中的开口的相邻边缘相隔离。