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1. 发明授权

US06559922B2 Method and apparatus for a non-contact scavenging seal 有权
标题翻译：非接触式清除密封的方法和装置
公开(公告)号：US06559922B2
公开(公告)日：2003-05-06
申请号：US09846386
申请日：2001-05-02
申请人： Eric C. Hansell , Jose V. Herrera , Richard L. Huse , Jorge S. Ivaldi , Stephen G. Krehley , Thomas P. Shamaly
发明人： Eric C. Hansell , Jose V. Herrera , Richard L. Huse , Jorge S. Ivaldi , Stephen G. Krehley , Thomas P. Shamaly
IPC分类号： G03B2752
CPC分类号： G03F7/70933 , F16C29/025 , F16C32/0603 , G03F7/70808 , G03F7/70816 , G03F7/70841 , G03F7/70866 , G03F7/70916
摘要： A method and apparatus for providing a purged optical path between an optical source surface and an optical target surface and for permitting relative movement between the optical source surface and the optical target surface is described. The apparatus includes a body, a central cavity, at least one gas supply bore, and at least one gas removal bore. The body defines first and second opposing surfaces. The first opposing surface is configured for positioning closely adjacent to the optical target surface. The second opposing surface is configured to mate with the optical source surface. The central cavity is formed in the body for passing light through the body, the central cavity being open at the first and second opposing surfaces. The at least one gas supply bore is formed in the body for suppling a flow of a purge gas to the central cavity. The at least one gas removal bore is formed in the body at the first opposing surface to remove gas from a gap formed between the first opposing surface and the optical target surface.
摘要翻译：描述了一种用于在光源表面和光学目标表面之间提供净化的光路并且用于允许光学源表面和光学目标表面之间的相对移动的方法和装置。该装置包括主体，中心腔，至少一个气体供给孔和至少一个气体排出孔。主体限定第一和第二相对表面。第一相对表面构造成用于紧邻光学目标表面定位。第二相对表面被配置为与光源表面配合。中心腔形成在主体中，用于使光通过主体，中心腔在第一和第二相对表面处是敞开的。至少一个气体供应孔形成在主体中，用于向吹扫中心腔提供净化气体流。至少一个气体去除孔在第一相对表面的主体中形成，以从形成在第一相对表面和光学目标表面之间的间隙移除气体。

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