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1. 发明授权

US09632043B2 Method for accurately determining the thickness and/or elemental composition of small features on thin-substrates using micro-XRF 有权
公开(公告)号：US09632043B2
公开(公告)日：2017-04-25
申请号：US14708323
申请日：2015-05-11
申请人： JORDAN VALLEY SEMICONDUCTORS LTD.
发明人： Isaac Mazor , Fouad Atrash , Alex Tokar , Olga Ostrovsky
IPC分类号： G01N23/00 , G01N23/207 , G01N23/223 , H01L21/66
CPC分类号： G01N23/2076 , G01N23/223 , G01N2223/6116 , H01L22/12
摘要： A method for X-ray Fluorescence (XRF) analysis includes directing an X-ray beam onto a sample and measuring an XRF signal excited from the sample, in a reference measurement in which the sample includes one or more first layers formed on a substrate, and in a target measurement after one or more second layers are formed on the substrate in addition to the first layers, so as to produce a reference XRF spectrum and a target XRF spectrum, respectively. A contribution of the first layers to the target XRF spectrum is reduced using the reference XRF spectrum. A parameter of at least one of the second layers is estimated using the target XRF spectrum in which the contribution of the first layers has been reduced.

2. 发明授权

US09606073B2 X-ray scatterometry apparatus 有权
公开(公告)号：US09606073B2
公开(公告)日：2017-03-28
申请号：US14735162
申请日：2015-06-10
申请人： JORDAN VALLEY SEMICONDUCTORS LTD.
发明人： Isaac Mazor , Alex Krokhmal , Alex Dikopoltsev , Matthew Wormington
IPC分类号： G01N23/201
CPC分类号： G01N23/201 , G01N2223/6116
摘要： Apparatus, including a sample-support that retains a sample in a plane having an axis, the plane defining first and second regions separated by the plane. A source-mount in the first region rotates about the axis, and an X-ray source on the source-mount directs first and second incident beams of X-rays to impinge on the sample at first and second angles along beam axes that are orthogonal to the axis. A detector-mount in the second region moves in a plane orthogonal to the axis and an X-ray detector on the detector-mount receives first and second diffracted beams of X-rays transmitted through the sample in response to the first and second incident beams, and outputs first and second signals, respectively, in response to the received first and second diffracted beams. A processor analyzes the first and the second signals so as to determine a profile of a surface of the sample.

3. 发明授权

US09269468B2 X-ray beam conditioning 有权
标题翻译： X光束调理
公开(公告)号：US09269468B2
公开(公告)日：2016-02-23
申请号：US13872196
申请日：2013-04-29
申请人： Jordan Valley Semiconductors Ltd.
发明人： Paul Anthony Ryan , John Leonard Wall , John Spence
IPC分类号： G21K1/06 , G01N23/20
CPC分类号： G21K1/06 , G01N23/20 , G01N2223/308 , G01N2223/315 , G01N2223/316
摘要： An X-ray optical device includes a crystal containing a channel, which passes through the crystal and has multiple internal faces. A mount is configured to hold the crystal in a fixed location relative to a source of an X-ray beam and to shift the crystal automatically between two predefined dispositions: a first disposition in which the X-ray beam passes through the channel while diffracting from one or more of the internal faces, and a second disposition in which the X-ray beam passes through the channel without diffraction by the crystal.
摘要翻译： X射线光学装置包括含有通过晶体并具有多个内表面的通道的晶体。安装件被配置为将晶体保持在相对于X射线束的源的固定位置，并且在两个预定义的配置之间自动移动晶体：第一配置，其中X射线束通过通道，同时衍射一个或多个内表面，以及第二配置，其中X射线束通过通道而不被晶体衍射。

4. 发明申请

US20150369759A1 X-RAY SCATTEROMETRY APPARATUS 有权
标题翻译： X射线扫描仪
公开(公告)号：US20150369759A1
公开(公告)日：2015-12-24
申请号：US14735162
申请日：2015-06-10
申请人： JORDAN VALLEY SEMICONDUCTORS LTD.
发明人： Isaac Mazor , Alex Krokhmal , Alex Dikopoltsev , Matthew Wormington
IPC分类号： G01N23/201 , G01N23/205 , G01N23/20
CPC分类号： G01N23/201 , G01N2223/6116
摘要： Apparatus, including a sample-support that retains a sample in a plane having an axis, the plane defining first and second regions separated by the plane. A source-mount in the first region rotates about the axis, and an X-ray source on the source-mount directs first and second incident beams of X-rays to impinge on the sample at first and second angles along beam axes that are orthogonal to the axis. A detector-mount in the second region moves in a plane orthogonal to the axis and an X-ray detector on the detector-mount receives first and second diffracted beams of X-rays transmitted through the sample in response to the first and second incident beams, and outputs first and second signals, respectively, in response to the received first and second diffracted beams. A processor analyzes the first and the second signals so as to determine a profile of a surface of the sample.
摘要翻译：一种装置，包括将样品保持在具有轴的平面中的样品支撑体，所述平面限定由平面分隔的第一和第二区域。第一区域中的源极安装围绕轴线旋转，源极安装座上的X射线源引导X射线的第一和第二入射光束沿着正交的束轴以第一和第二角度以第一和第二角度撞击在样品上到轴。第二区域中的检测器安装件在与轴线正交的平面中移动，并且检测器安装座上的X射线检测器响应于第一和第二入射光束接收通过样品传输的第一和第二衍射光束的X射线并且响应于接收到的第一和第二衍射光束分别输出第一和第二信号。处理器分析第一和第二信号，以便确定样品表面的轮廓。

5. 发明申请

US20140286473A1 ESTIMATION OF XRF INTENSITY FROM AN ARRAY OF MICRO-BUMPS 有权
标题翻译：从微阵列的XRF强度的估计
公开(公告)号：US20140286473A1
公开(公告)日：2014-09-25
申请号：US14222635
申请日：2014-03-23
申请人： JORDAN VALLEY SEMICONDUCTORS LTD.
发明人： Alex Tokar , Alex Dikopoltsev , Isaac Mazor , Matthew Wormington
IPC分类号： G01N23/223
CPC分类号： G01N23/223 , G01N2223/076
摘要： A method for inspection includes capturing an optical image of one or more features on a surface of a sample and irradiating an area of the sample containing at least one of the features with an X-ray beam. An intensity of X-ray fluorescence emitted from the sample in response to the irradiating X-ray beam is measured. The optical image is processed so as to extract geometrical parameters of the at least one of the features and to compute a correction factor responsively to the geometrical parameters. The correction factor is applied to the measured intensity in order to derive a property of the at least one of the features.
摘要翻译：检查方法包括：在样品的表面上捕获一个或多个特征的光学图像，并用X射线束照射含有至少一个特征的样品的区域。测量响应于照射X射线束从样品发射的X射线荧光的强度。处理光学图像以便提取至少一个特征的几何参数并且计算响应于几何参数的校正因子。校正因子被应用于测量的强度，以便导出至少一个特征的属性。

6. 发明授权

US09829448B2 Measurement of small features using XRF 有权
公开(公告)号：US09829448B2
公开(公告)日：2017-11-28
申请号：US14922220
申请日：2015-10-26
申请人： JORDAN VALLEY SEMICONDUCTORS LTD.
发明人： Matthew Wormington , Isaac Mazor , Alex Tokar , Alex Dikopoltsev
IPC分类号： G01N23/223 , G01B15/02
CPC分类号： G01N23/223 , G01B15/02 , G01N2223/303
摘要： A method for X-ray measurement includes, in a calibration phase, scanning a first X-ray beam, having a first beam profile, across a feature of interest on a calibration sample and measuring first X-ray fluorescence (XRF) emitted from the feature and from background areas of the calibration sample surrounding the feature. Responsively to the first XRF and the first beam profile, a relative emission factor is computed. In a test phase, a second X-ray beam, having a second beam profile, different from the first beam profile, is directed to impinge on the feature of interest on a test sample and second XRF emitted from the test sample is measured in response to the second X-ray beam. A property of the feature of interest on the test sample is computed by applying the relative emission factor together with the second beam profile to the measured second XRF.

7. 发明授权

US09748070B1 X-ray tube anode 有权
公开(公告)号：US09748070B1
公开(公告)日：2017-08-29
申请号：US14849647
申请日：2015-09-10
申请人： Jordan Valley Semiconductors Ltd.
发明人： John Leonard Wall
IPC分类号： H01J35/10 , H01J35/08 , H01J35/18
CPC分类号： H01J35/106 , H01J35/08 , H01J35/14 , H01J35/18 , H01J2235/086 , H01J2235/088 , H01J2235/1204 , H01J2235/1262 , H01J2235/186
摘要： An X-ray tube includes a cathode and an anode. The cathode is configured to generate an electron beam. The anode has at least one hole that faces the electron beam, the hole having sidewalls and a floor. The electron beam impinges on one or more of the sidewalls of the at least one hole so as to emit a first X-ray beam at angles that are not orthogonal to a surface of the anode. The electron beam also impinges on the floor of the at least one hole so as to emit a second X-ray beam, at least some of which is emitted at an angle that is orthogonal to the surface of the anode.

8. 发明申请

US20160123909A1 MEASUREMENT OF SMALL FEATURES USING XRF 有权
标题翻译：使用XRF测量小特征
公开(公告)号：US20160123909A1
公开(公告)日：2016-05-05
申请号：US14922220
申请日：2015-10-26
申请人： JORDAN VALLEY SEMICONDUCTORS LTD.
发明人： Matthew Wormington , Isaac Mazor , Alex Tokar , Alex Dikopoltsev
IPC分类号： G01N23/223 , G01B15/02
CPC分类号： G01N23/223 , G01B15/02 , G01N2223/303
摘要： A method for X-ray measurement includes, in a calibration phase, scanning a first X-ray beam, having a first beam profile, across a feature of interest on a calibration sample and measuring first X-ray fluorescence (XRF) emitted from the feature and from background areas of the calibration sample surrounding the feature. Responsively to the first XRF and the first beam profile, a relative emission factor is computed. In a test phase, a second X-ray beam, having a second beam profile, different from the first beam profile, is directed to impinge on the feature of interest on a test sample and second XRF emitted from the test sample is measured in response to the second X-ray beam. A property of the feature of interest on the test sample is computed by applying the relative emission factor together with the second beam profile to the measured second XRF.
摘要翻译：一种用于X射线测量的方法包括：在校准阶段，扫描具有第一光束轮廓的第一X射线束跨越校准样本上的感兴趣特征，并测量从第二射线谱发射的第一X射线荧光（XRF）特征和来自该特征周围的校准样本的背景区域。响应于第一XRF和第一光束轮廓，计算相对排放因子。在测试阶段，具有不同于第一光束轮廓的第二光束轮廓的第二X射线束被引导以撞击测试样本上的感兴趣特征，并且响应地测量从测试样品发射的第二X射线到第二个X射线束。通过将相对放射因子与第二光束轮廓应用于测量的第二XRF来计算测试样品上的感兴趣特征的特性。

9. 发明申请

US20150243469A1 X-RAY SOURCE ASSEMBLY 有权
标题翻译： X射线源组件
公开(公告)号：US20150243469A1
公开(公告)日：2015-08-27
申请号：US14565474
申请日：2014-12-10
申请人： JORDAN VALLEY SEMICONDUCTORS LTD.
发明人： Isaac Mazor , Asher Peled , Alex Brandt , Matthew Wormington
IPC分类号： H01J35/04 , H01J35/02
CPC分类号： G21K1/06 , H01J35/14 , H05G1/52
摘要： An apparatus includes an X-ray tube, X-ray optics, one or more coils and control circuitry. The X-ray tube is configured to direct an electron beam onto an anode so as to emit an X-ray beam. The X-ray optics which configured to receive the X-ray beam emitted from the X-ray tube and to direct the X-ray beam onto a target. The coils are configured to steer the electron beam in the X-ray tube using electrical currents flowing through the coils. The control circuitry is configured to compensate for misalignment between the X-ray tube and the X-ray optics by analyzing the X-ray beam output by the X-ray optics, and setting the electrical currents based on the analyzed X-ray beam.
摘要翻译：一种装置包括X射线管，X射线光学器件，一个或多个线圈和控制电路。 X射线管被配置为将电子束引导到阳极上以发射X射线束。 X射线光学元件，被配置为接收从X射线管发射的X射线束并将X射线束引导到目标上。线圈构造成使用流过线圈的电流来引导X射线管中的电子束。控制电路被配置为通过分析由X射线光学器件输出的X射线束并且基于所分析的X射线束来设定电流来补偿X射线管与X射线光学元件之间的未对准。

10. 发明授权

US08693635B2 X-ray detector assembly with shield 有权
标题翻译：带屏蔽的X射线检测器组件
公开(公告)号：US08693635B2
公开(公告)日：2014-04-08
申请号：US13913444
申请日：2013-06-09
申请人： Jordan Valley Semiconductors Ltd.
发明人： Alexander Krohmal
IPC分类号： G01T7/00 , G01T1/17
CPC分类号： G01T7/00 , G01N23/207 , G01T1/17
摘要： An X-ray detector assembly includes an integrated circuit, which includes an array of detector elements and a readout circuit adjacent to the array and coupled to read charge out of the detector elements. A non-metallic shield is positioned over the readout circuit so as to prevent X-rays from striking the readout circuit.
摘要翻译： X射线检测器组件包括集成电路，其包括检测器元件的阵列和与阵列相邻并耦合以从检测器元件读出电荷的读出电路。非金属屏蔽位于读出电路的上方，以防止X射线撞击读出电路。

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