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    • 3. 发明授权
    • Plasma immersion ion milling apparatus and method
    • 等离子浸渍离子研磨装置及方法
    • US09190239B2
    • 2015-11-17
    • US13265051
    • 2010-10-27
    • Sung Il ChungHyeon Seok OhS. A. NikiforovPan Kyeom KimHyeon Taeg KimJeong Woo JeonJong Moon Kim
    • Sung Il ChungHyeon Seok OhS. A. NikiforovPan Kyeom KimHyeon Taeg KimJeong Woo JeonJong Moon Kim
    • C23C14/34H01J37/08C23C14/48H01J37/305H01J37/32
    • H01J37/08C23C14/48H01J37/305H01J37/32009
    • Disclosed is an apparatus and method for low-temperature plasma immersion processing of a variety of workpieces using accelerated ions, wherein low-temperature plasma is distributed around a cylindrical workpiece placed in a chamber, the workpiece is enclosed with a housing including a multi-slot extracting electrode to isolate the workpiece from plasma, and a negative potential sufficient to induce sputtering is applied to the workpiece and the electrode, so that ions from plasma are accelerated within the sheath formed between the extracting electrode and plasma, pass through the slot part of the electrode and bombard the workpiece, thus polishing the surface of the workpiece. This apparatus and method is effective for surface smoothing to ones of nm of large cylindrical substrates particularly substrates for micro or nanopattern transfer. This method includes plasma cleaning, surface activating, surface smoothing, dry etching, deposition, plasma immersion ion implantation and deposition within a single or multi chamber.
    • 公开了一种用于使用加速离子对各种工件进行低温等离子体浸没处理的装置和方法,其中低温等离子体分布在放置在腔室中的圆柱形工件周围,工件由包括多槽的壳体封闭 提取电极以将工件与等离子体隔离,并且对工件和电极施加足以引起溅射的负电位,使得来自等离子体的离子在形成在提取电极和等离子体之间的护套内被加速,通过 电极并轰击工件,从而抛光工件的表面。 该装置和方法对于大的圆柱形基底,特别是用于微或纳米图案转印的基底的表面平滑是有效的。 该方法包括等离子体清洗,表面活化,表面平滑化,干蚀刻,沉积,等离子体浸入离子注入和在单室或多室内的沉积。
    • 8. 发明申请
    • METHOD FOR PROVIDING SERVICE THAT USES A CONSUMER'S PURCHASED PRODUCT AS ADVERTISEMENT MEDIA THROUGH DIGITAL CODE TO ALLOW EXPOSERS AND RECOGNIZERS OF DIGITAL CODE TO ACHIEVE PROFIT OF ADVERTISEMENT
    • 提供服务的方法,使用消费者购买的产品作为通过数字代码的广告媒体,允许浏览者和数字代码识别者实现广告利润
    • US20130325634A1
    • 2013-12-05
    • US13486796
    • 2012-06-01
    • Jong-Moon YANGHoon KANG
    • Jong-Moon YANGHoon KANG
    • G06Q30/02
    • G06Q30/0239G06Q30/0225G06Q30/0234
    • A method for providing a service uses a consumer's used product as advertisement media through a digital code allowing exposers and recognizers of the digital code to achieve profit from advertisement. When a Web server selling an article receives a purchase request for the article having a predetermined digital code, the Web server compensates the purchaser and/or a third person, and receives a compensated amount from an advertiser as a terminal used by the purchaser/third person recognizes the digital code added to the article and notifies the Web server. As the purchaser selects the digital code to be carved on the article, the purchaser makes an advertisement instead of the advertiser, and receives in return a reduction in the purchase price and compensation. The Web server can lower the price of the article in return for selling the article with the digital code, or benefit the purchaser through compensation.
    • 提供服务的方法使用消费者使用的产品作为广告媒体,通过数字代码,允许数字代码的曝光者和识别器实现广告的利润。 当销售商品的Web服务器接收到具有预定数字代码的商品的购买请求时,Web服务器补偿购买者和/或第三人,并从广告商接收补偿金额作为购买者/第三方使用的终端 人员识别添加到文章的数字代码并通知Web服务器。 当购买者选择要在该物品上雕刻的数字代码时,购买者进行广告而不是广告商,并且收到购买价格和赔偿的减少。 Web服务器可以降低文章的价格以换取以数字代码销售商品,或通过补偿使买方受益。