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    • 1. 发明申请
    • Method For Fabricating Probe Tip
    • 制造探针尖端的方法
    • US20100163518A1
    • 2010-07-01
    • US12601608
    • 2008-05-29
    • Ki Pil HongJong Hyeon ChaeHac Ju Lee
    • Ki Pil HongJong Hyeon ChaeHac Ju Lee
    • C23F1/00
    • G01R3/00G01R1/06738
    • Disclosed is a method for fabricating a probe tip, capable of preventing a rapid increase of a surface size of a front end of the probe tip as the probe tip is worn out by a frequent contact with a wafer chip and, also, capable of improving the precision of the front end of the probe tip. The method for fabricating a probe tip includes forming a front end of the probe tip on a silicon wafer; forming a first protective layer which is patterned to expose a part of the front end of the probe tip; and forming a body of the probe tip in a portion opened by the pattern of the first protective layer.
    • 公开了一种用于制造探针尖端的方法,其能够防止由于与晶片芯片的频繁接触而使探针针尖磨损而导致探针尖端的前端的表面尺寸的快速增加,并且还能够改善 探针尖端前端的精度。 用于制造探针尖端的方法包括在硅晶片上形成探针尖端的前端; 形成第一保护层,其被图案化以暴露探针尖端的前端的一部分; 以及在由所述第一保护层的图案打开的部分中形成所述探针尖端的主体。
    • 2. 发明授权
    • Method for fabricating probe tip
    • 探针头制造方法
    • US08287745B2
    • 2012-10-16
    • US12601608
    • 2008-05-29
    • Ki Pil HongJong Hyeon ChaeHac Ju Lee
    • Ki Pil HongJong Hyeon ChaeHac Ju Lee
    • C23F1/00G01Q70/16
    • G01R3/00G01R1/06738
    • Disclosed is a method for fabricating a probe tip, capable of preventing a rapid increase of a surface size of a front end of the probe tip as the probe tip is worn out by a frequent contact with a wafer chip and, also, capable of improving the precision of the front end of the probe tip. The method for fabricating a probe tip includes forming a front end of the probe tip on a silicon wafer; forming a first protective layer which is patterned to expose a part of the front end of the probe tip; and forming a body of the probe tip in a portion opened by the pattern of the first protective layer.
    • 公开了一种用于制造探针尖端的方法,其能够防止由于与晶片芯片的频繁接触而使探针针尖磨损而导致探针尖端的前端的表面尺寸的快速增加,并且还能够改善 探针尖端前端的精度。 用于制造探针尖端的方法包括在硅晶片上形成探针尖端的前端; 形成第一保护层,其被图案化以暴露探针尖端的前端的一部分; 以及在由所述第一保护层的图案打开的部分中形成所述探针尖端的主体。