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    • 4. 发明授权
    • Composition for stripping photoresist and method of preparing the same
    • 剥离光刻胶的组合物及其制备方法
    • US07037852B2
    • 2006-05-02
    • US10384711
    • 2003-03-11
    • Dong-jin ParkJin-sung KimPil-kwon JunJin-ho HwangIl-hyun Sohn
    • Dong-jin ParkJin-sung KimPil-kwon JunJin-ho HwangIl-hyun Sohn
    • H01L21/461B08B6/00C09K13/00
    • H01L21/02071G03F7/422G03F7/425H01L21/31133
    • A composition for stripping photoresist, methods of preparing and forming the same, a method of manufacturing a semiconductor device using the composition, and a method of removing a photoresist pattern from an underlying layer using the composition, where the composition may include an ethoxy N-hydroxyalkyl alkanamide represented by the formula, CH3CH2—O—R3—CO—N—R1R2OH, an alkanolamine and a polar material. Raw materials of alkyl alkoxy alkanoate, represented by a chemical formula of R4—O—R3—COOR5, and alkanolamine, represented by a chemical formula of NHR1R2OH, may be mixed to form a mixture, which is stirred and cooled to obtain the composition. The composition may balance exfoliation and dissolution of photoresist patterns, and may potentially eliminate thread-type residues from remaining on a surface of an underlying layer after removing the photoresist patterns.
    • 用于剥离光刻胶的组合物,其制备和形成该组合物的方法,使用该组合物制造半导体器件的方法以及使用该组合物从下层除去光致抗蚀剂图案的方法,其中所述组合物可以包括乙氧基N- 由下式表示的羟基烷基链烷酰胺CH 3 3 -OR 3 -CO-NR 1 R< SUB< > 2 OH,链烷醇胺和极性材料。 烷基烷氧基链烷酸酯的原料,由化学式R 4 -SOR 3 -COOR 5 N表示,链烷醇胺由化学式 可以将NHR 1 R 2 OH的配方混合以形成混合物,将其搅拌并冷却以获得组合物。 组合物可以平衡光刻胶图案的剥离和溶解,并且可能在去除光致抗蚀剂图案之后可能消除线型残留物残留在下层的表面上。