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1. 发明授权

US06775050B2 Micromirror actuator 失效
标题翻译：微镜执行器
公开(公告)号：US06775050B2
公开(公告)日：2004-08-10
申请号：US10437290
申请日：2003-05-14
申请人： Euisik Yoon , Jun-Bo Yoon , Hyung-Kew Lee , Ji-Hyuk Kim
发明人： Euisik Yoon , Jun-Bo Yoon , Hyung-Kew Lee , Ji-Hyuk Kim
IPC分类号： G02B2600
CPC分类号： G02B26/0841
摘要： Disclosed is a micromirror actuator that includes: a substrate provided with an insulating layer formed thereon; two lower columns spaced from each other by a designated distance, and formed on the insulating layer; a first torsion bar extending over upper surfaces of the lower columns; a second torsion bar formed so that the first and second torsion bars are orthogonal to each other; four electrodes, each disposed in four areas formed by the orthogonal crossing of the first and second torsion bars, formed on the insulating layer; two upper columns formed on an upper surface of the second torsion bar so that the upper surfaces of the upper columns are located at higher positions than the upper surfaces of the electrodes; and a micromirror located on the upper surfaces of the upper columns so that the micromirror is supported by the upper columns.
摘要翻译：公开了一种微镜致动器，其包括：在其上形成有绝缘层的基板; 两个下列彼此间隔开指定距离，并形成在绝缘层上; 延伸在下列的上表面上的第一扭杆; 形成为使得第一和第二扭杆彼此正交的第二扭杆; 四个电极，每个设置在由绝缘层上形成的第一和第二扭杆的正交交叉形成的四个区域中; 两个上柱形成在第二扭杆的上表面上，使得上列的上表面位于比电极的上表面更高的位置; 以及位于上列的上表面上的微镜，使得微反射镜由上列支撑。

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