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    • 4. 发明授权
    • Method of forming fine patterns on semiconductor device
    • 在半导体器件上形成精细图案的方法
    • US06571384B2
    • 2003-05-27
    • US09847290
    • 2001-05-03
    • Hye-Soo ShinSuk-Joo LeeJeung-Woo LeeDae-Youp Lee
    • Hye-Soo ShinSuk-Joo LeeJeung-Woo LeeDae-Youp Lee
    • G06F1750
    • H01L21/32139Y10S438/975
    • A method of forming fine patterns in a semiconductor device through a double photo lithography process. A layer to be etched and a hard mask layer are sequentially formed on a semiconductor substrate. A first photo resist pattern is formed on the hard mask layer. A first hard mask layer pattern is formed by etching the hard mask layer using the first photo resist pattern. After the first photo resist pattern is removed, a second photo resist pattern is formed on the resultant structure. A second hard mask layer pattern is formed by etching the first hard mask layer pattern using the second photo resist pattern. The layer to be etched is then etched using the second hard mask layer pattern after the second photo resist pattern has been removed, resulting in patterns have line edges without rounding.
    • 一种通过双光刻工艺在半导体器件中形成精细图案的方法。 在半导体衬底上依次形成待蚀刻的层和硬掩模层。 第一光刻胶图案形成在硬掩模层上。 通过使用第一光致抗蚀剂图案蚀刻硬掩模层来形成第一硬掩模层图案。 在去除第一光致抗蚀剂图案之后,在所得结构上形成第二光致抗蚀剂图案。 通过使用第二光刻胶图案蚀刻第一硬掩模层图案来形成第二硬掩模层图案。 然后在去除第二光致抗蚀剂图案之后,使用第二硬掩模层图案蚀刻待蚀刻的层,导致图案具有没有圆化的线边。
    • 7. 发明授权
    • Method of forming a pattern using a photoresist without exposing the photoresist and silicidation method incorporating the same
    • 使用光致抗蚀剂形成图案而不使光致抗蚀剂暴露的方法和包含该光致抗蚀剂的硅化方法
    • US06673706B2
    • 2004-01-06
    • US10023982
    • 2001-12-21
    • Ji-yong YooDae-youp LeeJeung-woo LeeSuk-joo LeeJae-han Lee
    • Ji-yong YooDae-youp LeeJeung-woo LeeSuk-joo LeeJae-han Lee
    • H01L213205
    • H01L21/0274G03F7/0035H01L21/76802H01L21/76829
    • A photoresist pattern is formed, without being exposed, by using photoresist having a residual layer proportion characteristic by which the photoresist dissolves at a suitable rate in a developing solution. First, a target layer to be patterned and a photoresist layer are sequentially formed on a substrate having a pattern that defines a step on the substrate. Some of the photoresist layer is treated with the developing solution, to thereby form a photoresist pattern whose upper surface is situated beneath the step and hence, exposes part of the target layer. Next, the exposed part of the target layer, and the photoresist pattern are removed. A silicidation process may be carried out thereafter on the area(s) from which the target layer has been removed. The method is relatively simple because it does not involve an exposure process. Furthermore, the method can be used to manufacture devices having very fine linewidths, i.e., a small design rule, because it is not subject to the misalignment errors which can occur during a conventional exposure process.
    • 通过使用具有残留层比例特性的光致抗蚀剂形成光致抗蚀剂图案,其中光致抗蚀剂以合适的速率溶解在显影溶液中。 首先,在具有限定基板上的台阶的图案的基板上依次形成待图案化的目标层和光致抗蚀剂层。 用显影液处理一些光致抗蚀剂层,从而形成上表面位于台阶之下的光致抗蚀剂图案,从而露出目标层的一部分。 接下来,去除目标层的曝光部分和光刻胶图案。 此后可以在去除了目标层的区域上进行硅化处理。 该方法相对简单,因为它不涉及曝光过程。 此外,该方法可以用于制造具有非常细线宽的装置,即小的设计规则,因为它不会受到常规曝光过程中可能发生的未对准误差的影响。
    • 8. 发明申请
    • Membrane-electrode binder having dual electrode, method of manufacturing the binder, and fuel cell comprising the same
    • 具有双电极的膜 - 电极粘合剂,粘合剂的制造方法和包含该粘合剂的燃料电池
    • US20100279197A1
    • 2010-11-04
    • US12004273
    • 2007-12-19
    • Hyoung-Juhn KimJeung-woo LeeTae-Hoon LimJonghee HanHeung Yong HaEun Ae ChoSung Pil Yoon
    • Hyoung-Juhn KimJeung-woo LeeTae-Hoon LimJonghee HanHeung Yong HaEun Ae ChoSung Pil Yoon
    • H01M8/10H01M8/00
    • H01M4/8657H01M4/8668H01M4/8807H01M4/881H01M4/8821H01M4/8828H01M4/921H01M4/926H01M8/0234H01M8/1004Y02P70/56
    • A membrane-electrode binder for a fuel cell, a method of manufacturing the binder, and a fuel cell comprising the binder are provided, in which the membrane-electrode binder comprises a dual electrode constituted by a first electrode and a second electrode in a two-layer form, and a polymer electrolyte membrane disposed on the dual electrode, the dual electrode comprising an electrode substrate and a catalyst layer formed thereon. In detail, the membrane-electrode binder comprises the dual electrode that is constituted by the first electrode obtained by using a PBI-based binder, the second electrode obtained by using a PTFE-based binder, and an inorganic acid doped PBI-based polymer electrolyte membrane disposed on the dual electrode and coming in contact with the first electrode. In the configuration of the dual electrode, the PBI-based binder used for manufacturing the first electrode contributes to enhancing an adhesive strength with the inorganic acid doped PBI-based polymer electrolyte membrane, and the PTFE-based binder used for manufacturing the second electrode contributes to suppressing the emission of an inorganic acid from the inorganic acid doped PBI-based polymer electrolyte membrane, together improving the performance of a fuel cell.
    • 提供了一种用于燃料电池的膜 - 电极粘合剂,粘合剂的制造方法和包含该粘合剂的燃料电池,其中,所述膜 - 电极接合剂包括由第一电极和第二电极构成的双电极 并且设置在双电极上的聚合物电解质膜,所述双电极包括电极基板和形成在其上的催化剂层。 详细地说,膜 - 电极粘合剂包括由通过使用基于PBI的粘合剂获得的第一电极,通过使用PTFE基粘合剂获得的第二电极和无机酸掺杂的PBI基聚合物电解质构成的双电极 膜设置在双电极上并与第一电极接触。 在双电极的结构中,用于制造第一电极的PBI基粘合剂有助于提高与无机酸掺杂的PBI基聚合物电解质膜的粘合强度,并且用于制造第二电极的PTFE基粘合剂有助于 为了抑制无机酸掺杂的PBI系聚合物电解质膜的无机酸的排出,共同提高燃料电池的性能。