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    • 3. 发明授权
    • Method for determining plasma characteristics
    • 确定等离子体特性的方法
    • US07620511B2
    • 2009-11-17
    • US11758299
    • 2007-06-05
    • Steven C. ShannonDaniel J. HoffmanJeremiah T. P. PenderTarreg Mawari
    • Steven C. ShannonDaniel J. HoffmanJeremiah T. P. PenderTarreg Mawari
    • G01R23/16
    • H05H1/0081H01J37/32174H01J37/32935H01L21/67005
    • Methods for determining characteristics of a plasma are provided. In one embodiment, a method for determining characteristics of a plasma includes obtaining metrics of current and voltage information for first and second waveforms coupled to a plasma at different frequencies, determining at least one characteristic of the plasma using the metrics obtained from each different frequency waveform. In another embodiment, the method includes providing a plasma impedance model of a plasma as a function of frequency, and determining at least one characteristic of a plasma using model. In yet another embodiment, the method includes providing a plasma impedance model of a plasma as a function of frequency, measuring current and voltage for waveforms coupled to the plasma and having at least two different frequencies, and determining ion mass of a plasma from model and the measured current and voltage of the waveforms.
    • 提供了确定等离子体特性的方法。 在一个实施例中,用于确定等离子体特性的方法包括获得与不同频率耦合到等离子体的第一和第二波形的电流和电压信息的度量,使用从每个不同频率波形获得的度量来确定等离子体的至少一个特性 。 在另一个实施例中,该方法包括提供作为频率的函数的等离子体的等离子体阻抗模型,以及使用模型确定等离子体的至少一个特性。 在另一个实施例中,该方法包括提供作为频率的函数的等离子体的等离子体阻抗模型,测量耦合到等离子体并具有至少两个不同频率的波形的电流和电压,以及从模型确定等离子体的离子质量, 测量的电流和电压的波形。
    • 9. 发明授权
    • Method for determining plasma characteristics
    • 确定等离子体特性的方法
    • US07440859B2
    • 2008-10-21
    • US11617802
    • 2006-12-29
    • Steven C. ShannonDaniel J. HoffmanJeremiah T. P. PenderTarreg Mawari
    • Steven C. ShannonDaniel J. HoffmanJeremiah T. P. PenderTarreg Mawari
    • G01R23/16
    • H05H1/0081H01J37/32174H01J37/32935H01L21/67005
    • Methods for determining characteristics of a plasma are provided. In one embodiment, a method for determining characteristics of a plasma includes obtaining metrics of a plasma at two different frequencies, and determining at least one characteristic of the plasma utilizing the metrics. In another embodiment, a method for determining characteristics of a plasma includes obtaining metrics of current and voltage information for first and second waveforms coupled to a plasma at different frequencies, determining at least one characteristic of the plasma using the metrics obtained from each different frequency waveform. In another embodiment, the method includes providing a plasma impedance model of a plasma as a function of frequency, and determining at least one characteristic of a plasma using model.
    • 提供了确定等离子体特性的方法。 在一个实施例中,用于确定等离子体特性的方法包括以两个不同的频率获得等离子体的度量,以及使用该度量来确定等离子体的至少一个特性。 在另一个实施例中,一种用于确定等离子体特性的方法包括获得与不同频率耦合到等离子体的第一波形和第二波形的电流和电压信息的度量,使用从每个不同频率波形获得的度量来确定等离子体的至少一个特性 。 在另一个实施例中,该方法包括提供作为频率的函数的等离子体的等离子体阻抗模型,以及使用模型确定等离子体的至少一个特性。
    • 10. 发明授权
    • Method for determining plasma characteristics
    • 确定等离子体特性的方法
    • US07286948B1
    • 2007-10-23
    • US11424705
    • 2006-06-16
    • Steven C. ShannonDaniel J. HoffmanJeremiah T. P. PenderTarreg Mawari
    • Steven C. ShannonDaniel J. HoffmanJeremiah T. P. PenderTarreg Mawari
    • G01R23/16
    • H05H1/0081H01J37/32174H01J37/32935H01L21/67005
    • Methods for determining characteristics of a plasma are provided. In one embodiment, a method for determining characteristics of a plasma includes obtaining metrics of current and voltage information for first and second waveforms coupled to a plasma at different frequencies, determining at least one characteristic of the plasma using the metrics obtained from each different frequency waveform. In another embodiment, the method includes providing a plasma impedance model of a plasma as a function of frequency, and determining at least one characteristic of a plasma using model. In yet another embodiment, the method includes providing a plasma impedance model of a plasma as a function of frequency, measuring current and voltage for waveforms coupled to the plasma and having at least two different frequencies, and determining ion mass of a plasma from model and the measured current and voltage of the waveforms.
    • 提供了确定等离子体特性的方法。 在一个实施例中,用于确定等离子体特性的方法包括获得与不同频率耦合到等离子体的第一和第二波形的电流和电压信息的度量,使用从每个不同频率波形获得的度量来确定等离子体的至少一个特性 。 在另一个实施例中,该方法包括提供作为频率的函数的等离子体的等离子体阻抗模型,以及使用模型确定等离子体的至少一个特性。 在另一个实施例中,该方法包括提供作为频率的函数的等离子体的等离子体阻抗模型,测量耦合到等离子体并具有至少两个不同频率的波形的电流和电压,以及从模型确定等离子体的离子质量, 测量的电流和电压的波形。