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1. 发明授权

US5644141A Apparatus and method for high-speed characterization of surfaces 失效
标题翻译：表面高速表征的装置和方法
公开(公告)号：US5644141A
公开(公告)日：1997-07-01
申请号：US542141
申请日：1995-10-12
申请人： Jeffery A. Hooker , Stephen M. Simmons
发明人： Jeffery A. Hooker , Stephen M. Simmons
IPC分类号： G01B11/02 , G01B11/24 , G01N21/86
CPC分类号： G01B11/24 , G01B11/024
摘要： This invention permits rapid determination of a three-dimensional contour of an object. The apparatus directs a laser beam onto a point on an object, and the scattered light is received by a position sensitive detector (PSD). The location at which scattered light is received can be related to the displacement of the point on the object, using basic trigonometry. The laser beam is deflected non-mechanically, by passing it through a crystal whose index of refraction is varied in a controlled manner. By proper control of the index of refraction, one can scan the beam across a desired area of the object, without using any moving parts, and can therefore obtain complete information about the contour of the object. The device operates without making any conventional images, and is therefore much faster than comparable devices of the prior art. Also, the laser and beam deflector can be housed in a small optical head which enables the device to reach normally inaccessible areas. The device can compare the test object with a reference object, or it can compare two objects for differences.
摘要翻译：本发明允许快速确定物体的三维轮廓。该装置将激光束引导到物体上的点上，并且由位置敏感检测器（PSD）接收散射光。散射光的接收位置可以使用基本的三角法与物体上的点的位移有关。激光束非机械地偏转，通过使其通过以受控方式变化的折射率的晶体。通过适当地控制折射率，可以在物体的期望区域上扫描光束，而不使用任何移动部件，因此可以获得有关物体轮廓的完整信息。该装置在不进行任何常规图像的情况下操作，因此比现有技术的可比装置快得多。此外，激光和光束偏转器可以容纳在小的光学头中，使得装置能够到达通常不可接近的区域。该设备可以将测试对象与参考对象进行比较，也可以比较两个对象的差异。

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