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    • 3. 发明授权
    • Projection exposure apparatus and projection optical system
    • 投影曝光装置和投影光学系统
    • US07477355B2
    • 2009-01-13
    • US11256164
    • 2005-10-24
    • Jean-Noel FehrHans-Juergen MannJohannes Zellner
    • Jean-Noel FehrHans-Juergen MannJohannes Zellner
    • G03B27/54G03B27/52G02B7/02
    • G02B17/0657G03F7/70233G03F7/70825G03F7/70891G03F7/7095G03F7/70958
    • A projection exposure apparatus for transferring an image of a patterned reticle onto a substrate comprises an illumination optical system for generating and directing an exposure beam onto the reticle, and a projection optical system provided between the reticle and the substrate. The projection optical system has a plurality of imaging mirrors each having a mirror support made of a support material. The support materials are subject to thermal expansion during projection that induces imaging aberrations at substrate level. The support materials are selected such that an aberration merit function, which is indicative of the overall amount of at least one type of the thermally induced aberrations, is minimized by mutual compensation of contributions of the mirrors to the one type of thermally induced aberrations. As a result, the mirror supports will then generally be different and have, when heated during exposure, different coefficients of thermal expansion.
    • 用于将图案化的掩模版图像转印到基板上的投影曝光装置包括用于产生并将曝光光束引导到掩模版上的照明光学系统,以及设置在掩模版和基板之间的投影光学系统。 投影光学系统具有多个成像镜,每个成像镜具有由支撑材料制成的反射镜支架。 支撑材料在投影期间经受热膨胀,其在基底水平引起成像像差。 选择支撑材料,使得通过相互补偿反射镜对一种类型的热诱导像差的贡献来最小化指示至少一种类型的热诱导像差的总量的像差优点函数。 结果,反射镜支撑件通常将是不同的,并且当在曝光期间加热时具有不同的热膨胀系数。
    • 4. 发明申请
    • METHOD OF MONITORING PRESSURE OF A GAS SPECIES AND APPARATUS TO DO SO
    • 监测气体物质和装置的压力的方法
    • US20080054532A1
    • 2008-03-06
    • US11930544
    • 2007-10-31
    • Martin LehmannJean-Noel FehrMartin LiechtiUrban Schnell
    • Martin LehmannJean-Noel FehrMartin LiechtiUrban Schnell
    • B29C44/60
    • G01L11/02G01N21/15G01N21/3504G01N21/39
    • A method of monitoring pressure of a gas species up to at most a predetermined maximum pressure value is disclosed. The method includes exposing the gas species to transmission of laser light, periodically modulating the wavelength of the laser light over a wavelength band including at least one absorption line of the gas species, optoelectrically converting the transmitted laser light, thereby generating an electric output signal, performing at least one of first filtering the electric output signal with a filter characteristic having a lower cut-off frequency not lower than a transition frequency and of second filtering the electric output signal with a bandpass filter characteristic having an upper cut-off frequency not higher than the transition frequency and a lower cut-off frequency above the modulation frequency of the periodic wavelength modulation. The output of at least one of the filterings is evaluated as a pressure indicative signal.
    • 公开了一种监测气体种类的压力至多达到预定最大压力值的方法。 该方法包括将气体物质暴露于透射激光,周期性地调制激光的波长在包括气体种类的至少一个吸收线的波长带上,光电转换透射的激光,从而产生电输出信号, 执行以具有不低于转换频率的较低截止频率的滤波器特性对所述电输出信号进行第一滤波中的至少一个,并且以具有不高于上限截止频率的带通滤波器特性对所述电输出信号进行第二滤波 超过转换频率和低于周期性波长调制调制频率的较低截止频率。 至少一个过滤器的输出被评估为压力指示信号。
    • 9. 发明申请
    • METHOD OF MONITORING PRESSURE OF A GAS SPECIES AND APPARATUS TO DO SO
    • 监测气体物质和装置的压力的方法
    • US20100005893A1
    • 2010-01-14
    • US12565262
    • 2009-09-23
    • Martin LehmannJean-Noel FehrMartin LiechtiUrban Schnell
    • Martin LehmannJean-Noel FehrMartin LiechtiUrban Schnell
    • G01N21/61
    • G01L11/02G01N21/15G01N21/3504G01N21/39
    • A method of monitoring pressure of a gas species up to at most a predetermined maximum pressure value is disclosed. The method includes exposing the gas species to transmission of laser light, periodically modulating the wavelength of the laser light over a wavelength band including at least one absorption line of the gas species, optoelectrically converting the transmitted laser light, thereby generating an electric output signal, performing at least one of first filtering the electric output signal with a filter characteristic having a lower cut-off frequency not lower than a transition frequency and of second filtering the electric output signal with a bandpass filter characteristic having an upper cut-off frequency not higher than the transition frequency and a lower cut-off frequency above the modulation frequency of the periodic wavelength modulation. The output of at least one of the filterings is evaluated as a pressure indicative signal.
    • 公开了一种监测气体种类的压力至多达到预定最大压力值的方法。 该方法包括将气体物质暴露于透射激光,周期性地调制激光的波长在包括气体种类的至少一个吸收线的波长带上,光电转换透射的激光,从而产生电输出信号, 执行以具有不低于转换频率的较低截止频率的滤波器特性对所述电输出信号进行第一滤波中的至少一个,并且以具有不高于上限截止频率的带通滤波器特性对所述电输出信号进行第二滤波 超过转换频率和低于周期性波长调制调制频率的较低截止频率。 至少一个过滤器的输出被评估为压力指示信号。
    • 10. 发明授权
    • Method of monitoring pressure of a gas species and apparatus to do so
    • 监测气体种类和装置的压力的方法
    • US07600431B2
    • 2009-10-13
    • US12256867
    • 2008-10-23
    • Martin LehmannJean-Noel FehrMartin LiechtiUrban Schnell
    • Martin LehmannJean-Noel FehrMartin LiechtiUrban Schnell
    • G01N21/61
    • G01L11/02G01N21/15G01N21/3504G01N21/39
    • A method of monitoring pressure of a gas species up to at most a predetermined maximum pressure value is disclosed. The method includes exposing the gas species to transmission of laser light, periodically modulating the wavelength of the laser light over a wavelength band including at least one absorption line of the gas species, optoelectrically converting the transmitted laser light, thereby generating an electric output signal, performing at least one of first filtering the electric output signal with a filter characteristic having a lower cut-off frequency not lower than a transition frequency and of second filtering the electric output signal with a bandpass filter characteristic having an upper cut-off frequency not higher than the transition frequency and a lower cut-off frequency above the modulation frequency of the periodic wavelength modulation. The output of at least one of the filterings is evaluated as a pressure indicative signal.
    • 公开了一种监测气体种类的压力至多达到预定最大压力值的方法。 该方法包括将气体物质暴露于透射激光,周期性地调制激光的波长在包括气体种类的至少一个吸收线的波长带上,光电转换透射的激光,从而产生电输出信号, 执行以具有不低于转换频率的较低截止频率的滤波器特性对所述电输出信号进行第一滤波中的至少一个,并且以具有不高于上限截止频率的带通滤波器特性对所述电输出信号进行第二滤波 超过转换频率和低于周期性波长调制调制频率的较低截止频率。 至少一个过滤器的输出被评估为压力指示信号。