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    • 2. 发明授权
    • Vertical probe array arranged to provide space transformation
    • 垂直探针阵列安排提供空间转换
    • US08324923B2
    • 2012-12-04
    • US13118952
    • 2011-05-31
    • January Kister
    • January Kister
    • G01R31/26
    • G01R1/07307G01R1/06733
    • Improved probing of closely spaced contact pads is provided by an array of vertical probes having all of the probe tips aligned along a single contact line, while the probe bases are arranged in an array having two or more rows parallel to the contact line. With this arrangement of probes, the probe base thickness can be made greater than the contact pad spacing along the contact line, thereby advantageously increasing the lateral stiffness of the probes. The probe tip thickness is less than the contact pad spacing, so probes suitable for practicing the invention have a wide base section and a narrow tip section.
    • 通过具有所有探针尖端沿着单个接触线对准的垂直探针的阵列提供紧密间隔的接触垫的改进的探测,而探针基底布置成平行于接触线的两行或更多行的阵列。 利用这种探针的布置,可以使探针基底厚度大于沿着接触线的接触垫间距,从而有利地增加探针的横向刚度。 探针尖端厚度小于接触垫间距,因此适用于实施本发明的探针具有宽的基部和窄的尖端部分。
    • 4. 发明授权
    • Probes with offset arm and suspension structure
    • 带悬臂和悬挂结构的探头
    • US08203353B2
    • 2012-06-19
    • US12777827
    • 2010-05-11
    • January Kister
    • January Kister
    • G01R1/067G01R31/20
    • G01R1/06733G01R1/06738G01R3/00
    • A probe having a conductive body and a contacting tip that is terminated by one or more blunt skates for engaging a conductive pad of a device under test (DUT) for performing electrical testing. The contacting tip has a certain width and the blunt skate is narrower than the tip width. The skate is aligned along a scrub direction and also has a certain curvature along the scrub direction such that it may undergo both a scrub motion and a self-cleaning rotation upon application of a contact force between the skate and the conductive pad. While the scrub motion clears oxide from the pad to establish electrical contact, the rotation removes debris from the skate and thus preserves a low contact resistance between the skate and the pad. The use of probes with one or more blunt skates and methods of using such self-cleaning probes are especially advantageous when testing DUTs with low-K conductive pads or other mechanically fragile pads that tend to be damaged by large contact force concentration.
    • 一种探针,其具有导电体和接触尖端,所述接触尖端由一个或多个钝头溜冰鞋端接,用于接合待测器件(DUT)的导电焊盘,用于进行电气测试。 接触尖端具有一定的宽度,并且钝溜冰鞋比尖端宽度窄。 溜冰鞋沿着洗涤方向对准,并且沿擦洗方向也具有一定的曲率,使得它可以在施加滑板和导电垫之间的接触力的同时进行擦洗运动和自清洁旋转。 当擦洗动作从衬垫中清除氧化物以建立电接触时,旋转从溜冰鞋去除碎屑,从而保持溜冰鞋和衬垫之间的低接触电阻。 使用具有一个或多个钝头溜冰鞋的探头以及使用这种自清洁探针的方法在使用低K导电垫或其他易受大接触力浓度损伤的机械脆性垫进行测试时尤为有利。
    • 5. 发明申请
    • LOW PROFILE PROBE HAVING IMPROVED MECHANICAL SCRUB AND REDUCED CONTACT INDUCTANCE
    • 具有改进的机械滑块和减少接触电感的低剖面探头
    • US20110273198A1
    • 2011-11-10
    • US13108368
    • 2011-05-16
    • January Kister
    • January Kister
    • G01R31/20
    • G01R1/06733
    • A vertically folded probe is provided that can provide improved scrub performance in cases where the probe height is limited. More specifically, such a probe includes a base and a tip, and an arm extending from the base to the tip as a single continuous member. The probe arm is vertically folded, such that it includes three or more vertical arm portions. The vertical arm portions have substantial vertical overlap, and are laterally displaced from each other. When such a probe is vertically brought down onto a device under test, the probe deforms. During probe deformation, at least two of the vertical arm portions come into contact with each other. Such contact between the arm portions can advantageously increase the lateral scrub motion at the probe tip, and can also advantageously reduce the probe inductance.
    • 提供垂直折叠的探针,其可以在探针高度受限的情况下提供改善的擦洗性能。 更具体地,这种探针包括基部和尖端,以及从基部到尖端作为单个连续部件延伸的臂。 探针臂垂直折叠,使得其包括三个或更多个垂直臂部分。 垂直臂部具有相当大的垂直重叠,并且彼此横向移位。 当这种探针垂直向下放置在被测设备上时,探头变形。 在探针变形期间,至少两个垂直臂部彼此接触。 臂部之间的这种接触可以有利地增加探针尖端处的横向擦洗运动,并且还可以有利地减小探针电感。
    • 6. 发明申请
    • Vertical probe array arranged to provide space transformation
    • 垂直探针阵列安排提供空间转换
    • US20080252325A1
    • 2008-10-16
    • US11786107
    • 2007-04-10
    • January Kister
    • January Kister
    • G01R31/02
    • G01R1/07307G01R1/06733
    • Improved probing of closely spaced contact pads is provided by an array of vertical probes having all of the probe tips aligned along a single contact line, while the probe bases are arranged in an array having two or more rows parallel to the contact line. With this arrangement of probes, the probe base thickness can be made greater than the contact pad spacing along the contact line, thereby advantageously increasing the lateral stiffness of the probes. The probe tip thickness is less than the contact pad spacing, so probes suitable for practicing the invention have a wide base section and a narrow tip section.
    • 通过具有所有探针尖端沿着单个接触线对准的垂直探针的阵列提供紧密间隔的接触垫的改进的探测,而探针基底布置成平行于接触线的两行或更多行的阵列。 利用这种探针的布置,可以使探针基底厚度大于沿着接触线的接触垫间距,从而有利地增加探针的横向刚度。 探针尖端厚度小于接触垫间距,因此适用于实施本发明的探针具有宽的基部和窄的尖端部分。
    • 7. 发明授权
    • Space transformers employing wire bonds for interconnections with fine pitch contacts
    • 空间变压器采用引线键合与细间距触点相互连接
    • US07312617B2
    • 2007-12-25
    • US11385289
    • 2006-03-20
    • January Kister
    • January Kister
    • G01R31/02
    • G01R1/07378G01R1/07357
    • Method and apparatus for electrical testing of a device under test (DUT) that employs a connection board with signal contacts for applying test signals and a space transformer that has low pitch contacts arranged on one or more circumferential shelves that define an enclosure in the space transformer. The apparatus has a substrate with fine pitch contacts positioned such that these are within the enclosure. A set of wire bonds is used for pitch reduction by interconnecting the fine pitch contacts with the low pitch contacts arranged on the shelves. The probes are connected to the fine pitch contacts and are used to apply the test signals to a DUT by contacting its pads. In some embodiments, the fine pitch contacts may be embodied by plugs or by blind metal vias.
    • 一种用于对被测设备(DUT)进行电气测试的方法和装置,该设备采用具有用于施加测试信号的信号触点的连接板和具有低间距触点的空间变压器,所述空间变压器布置在定义空间变压器中的外壳的一个或多个周向架上 。 该装置具有定位为使得它们在外壳内的细间距触点的基板。 通过将细间距触点与布置在搁架上的低音调触点相互连接,一组引线键被用于降低音调。 探头连接到细间距触点,并用于通过接触其焊盘将测试信号施加到DUT。 在一些实施例中,细间距触点可以由插头或盲金属通孔来实现。
    • 9. 发明申请
    • Prefabricated and attached interconnect structure
    • 预制和连接的互连结构
    • US20050052194A1
    • 2005-03-10
    • US10964316
    • 2004-10-12
    • January KisterDavid BeatsonEdward Laurent
    • January KisterDavid BeatsonEdward Laurent
    • G01R1/073G01R31/02
    • G01R1/07357Y10T29/49117
    • A interconnect assembly features a prefabricated interconnect structure metallurgically bonded to a terminal of a larger structure. Fabrication of the interconnect structure's independently and separate from the larger structure enables the use of economic mass fabrication techniques that are well-known for miniature scale sheet metal parts. During fabrication, positioning and attachment, each interconnect structure is combined with and/or held in a carrier structure from which it is separated after attachment to the terminal. The interconnect structure is configured such that an attachment tool may be brought into close proximity to the attachment interface between the interconnect structure and the terminal for a short and direct transmission of bonding energy onto the attachment interface. The attachment interface provides for an electrically conductive and a bending stress opposing mechanical connection between the interconnect structure and the terminal. The interconnect assembly is preferably part of a probe apparatus.
    • 互连组件具有冶金结合到更大结构的端子的预制互连结构。 互连结构的独立结构和较大结构的制造使得能够使用为微型钣金零件而众所周知的经济大规模制造技术。 在制造,定位和附接期间,每个互连结构与载体结构组合和/或保持在载体结构中,在附接到终端之后,载体结构被分离。 互连结构被配置成使得附接工具可以靠近互连结构和端子之间的连接接口,以便将粘合能量短暂且直接地传递到附接界面上。 连接接口提供了导电和弯曲应力,该互连结构与端子之间的机械连接相反。 互连组件优选地是探针装置的一部分。
    • 10. 发明授权
    • Assembly structure for making integrated circuit chip probe cards
    • 集成电路芯片探针卡的组装结构
    • US5884395A
    • 1999-03-23
    • US835078
    • 1997-04-04
    • Krzysztof DabrowieckiJanuary KisterJerzy Lobacz
    • Krzysztof DabrowieckiJanuary KisterJerzy Lobacz
    • G01R1/073H01R43/00B23P19/00
    • G01R1/07342Y10T29/49002Y10T29/49117Y10T29/5313
    • This disclosure proposes an assembly structure for building probe cards to test square integrated circuit chips. The test probe card assembly structure has one or more wings located at 90.degree. angles to each other upon which probes are laid in a parallel manner for attachment to a probe card. This allows construction of the probe card so that probes touch contacts directly. The probe tips do not touch the contacts at an angle .theta., called the fan out angle. The probes also do not differ in their inclination angles .beta.. As a result, the force at which the many probe tips touch the contacts is relatively constant throughout. In addition, the probe tips are less likely to scrub past the surface of the contact onto the insulation surface of the chip and in doing so damage it. The test probe card assembly structure also contains an epoxy groove, which controls epoxy flow so that the position of the probes stays aligned in the correct plane. The epoxy groove also prevents variance in beam length.
    • 本公开提出了一种用于构建探针卡以测试方形集成电路芯片的组装结构。 测试探针卡组件结构具有一个或多个彼此成90°角的翼,探针以平行的方式放置在探针卡上以附接到探针卡。 这样可以构建探针卡,使探针直接接触触点。 探头尖端不会以一个角度θ接触触点,称为扇形角度。 探头的倾斜角度β也没有差别。 结果,许多探针尖端触摸触点的力在整个过程中相对恒定。 此外,探针尖端不太可能通过接触表面擦拭到芯片的绝缘表面上,并且损坏它。 测试探针卡组件结构还包含环氧树脂沟槽,其控制环氧树脂流动,使得探针的位置保持在正确的平面内对准。 环氧树脂槽也可以防止光束长度的变化。