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    • 4. 发明授权
    • Semiconductor memory device and method of manufacturing the same
    • 半导体存储器件及其制造方法
    • US07585787B2
    • 2009-09-08
    • US11648595
    • 2007-01-03
    • Tae-Ho ChaGil-Heyun ChoiByung-Hee KimHee-Sook ParkJang-Hee LeeGeum-Jung Seong
    • Tae-Ho ChaGil-Heyun ChoiByung-Hee KimHee-Sook ParkJang-Hee LeeGeum-Jung Seong
    • H01L21/469
    • H01L29/4941H01L27/105H01L27/115H01L27/11521H01L27/11526H01L27/11536H01L27/11568H01L29/513
    • A semiconductor memory device, e.g., a charge trapping type non-volatile memory device, may include a charge trapping structure formed in a first area of a substrate and a gate structure formed in a second area of the substrate. The charge trapping structure may include a tunnel oxide layer pattern, a charge trapping layer pattern and a dielectric layer pattern of aluminum-containing tertiary metal oxide. The gate structure may include a gate oxide layer pattern, a polysilicon layer pattern and an ohmic layer pattern of aluminum-containing tertiary metal silicide. A first electrode and a second electrode may be formed on the charge trapping structure. A lower electrode and an upper electrode may be provided on the gate structure. The dielectric layer pattern may have a higher dielectric constant, and the ohmic layer pattern may have improved thermal stability, thereby enhancing programming and erasing operations of the charge trapping type non-volatile memory device.
    • 半导体存储器件,例如电荷俘获型非易失性存储器件,可以包括形成在衬底的第一区域中的电荷俘获结构和形成在衬底的第二区域中的栅极结构。 电荷捕获结构可以包括隧道氧化物层图案,电荷俘获层图案和含铝三级金属氧化物的介电层图案。 栅极结构可以包括栅极氧化物层图案,多晶硅层图案和含铝三次金属硅化物的欧姆层图案。 第一电极和第二电极可以形成在电荷捕获结构上。 可以在栅极结构上设置下电极和上电极。 电介质层图案可以具有更高的介电常数,并且欧姆层图案可以具有改善的热稳定性,从而增强电荷俘获型非易失性存储器件的编程和擦除操作。
    • 9. 发明授权
    • Rotatable shrouded valve for improving a scavenging of 2-stroke engine
    • 可旋转护罩,用于改善二冲程发动机的清扫
    • US5529036A
    • 1996-06-25
    • US383374
    • 1995-02-03
    • Young-Il JeongJang-Hee LeeKern-Yong Kang
    • Young-Il JeongJang-Hee LeeKern-Yong Kang
    • F01L1/38F01L3/06F02B31/00F02B75/02
    • F01L3/06F02B2075/025F02B2275/48Y02T10/125Y02T10/146
    • This invention relates to a scavenging shroud mechanism for improving scavenging of a 2-stroke engine, and more particularly to a scavenging shroud mechanism for improving scavenging of a 2-stroke engine which is constructed such that a scavenging shroud mechanism is provided to a scavenging valve whereby compressed air sucked into an interior of a combustion chamber makes a tumble phenomenon along with cylinder wall surface and thereby pushes out already burned burnt gas and simultaneously is capable of efficiently feeding new air so that efficient reverse loop scavenging system is made. The scavenging shroud mechanism has a baffle 2, shroud guide notch 3 and a shroud neck 4, and a fixed supporting pin 6 and a supporting guide 5 provided on the inner side of the intake manifold 9. A shroud guide notch 3 is provided in the baffle 2 so as to permit the scavenging shroud mechanism 1 to up and down-ward movement but not right and left rotational movement.
    • 本发明涉及一种用于改善二冲程发动机的清扫的清扫护罩机构,更具体地涉及一种用于改善二冲程发动机的扫气的扫气护罩机构,其被构造成使清扫护罩机构设置在扫气阀 吸入燃烧室内部的压缩空气与气缸壁面一起发生翻滚现象,从而推出已经燃烧的燃烧气体,同时能够有效地供给新的空气,从而形成有效的反向回路清除系统。 清扫护罩机构具有挡板2,护罩引导槽3和护罩颈部4,以及设置在进气歧管9的内侧的固定支撑销6和支撑引导件5.护罩引导槽3设置在 挡板2,以便允许扫气罩机构1向上和向下移动,但不允许左右旋转运动。
    • 10. 发明申请
    • SEMICONDUCTOR MANUFACTURING APPARATUS AND METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE USING THE SAME
    • 半导体制造装置及使用该半导体器件的半导体器件的制造方法
    • US20160064193A1
    • 2016-03-03
    • US14734183
    • 2015-06-09
    • Hogon KIMHyunsu KIMJang-Hee LEEGilheyun CHOIJongwon HONG
    • Hogon KIMHyunsu KIMJang-Hee LEEGilheyun CHOIJongwon HONG
    • H01J37/32
    • H01J37/32165H01J37/32091H01J37/32174
    • A semiconductor manufacturing apparatus includes a lower electrode, an upper electrode, first and second high-frequency power sources, and a controller. The lower electrode is disposed in a process chamber, and the upper electrode is disposed over the lower electrode in the process chamber. The first high-frequency power source is connected to one of the lower electrode and the upper electrode, and the second high-frequency power source is connected to one of the lower electrode and the upper electrode. The controller is connected to the first and second high-frequency power sources. The first high-frequency power source generates a first high-frequency power used to perform a first capacitively coupled plasma (CCP) process. The second high-frequency power source generates a second high-frequency power used to perform a second CCP process. The controller controls the second high-frequency power source to interrupt the second high-frequency power during the first CCP process.
    • 半导体制造装置包括下电极,上电极,第一高频电源和第二高频电源以及控制器。 下电极设置在处理室中,上电极设置在处理室中的下电极之上。 第一高频电源连接到下电极和上电极中的一个,第二高频电源连接到下电极和上电极之一。 控制器连接到第一和第二高频电源。 第一高频电源产生用于执行第一电容耦合等离子体(CCP)过程的第一高频功率。 第二高频电源产生用于执行第二CCP处理的第二高频电源。 控制器控制第二高频电源,以在第一CCP过程中中断第二高频电源。