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    • 2. 发明授权
    • Method of forming recessed oxide isolation with reduced steepness of the
birds' neck
    • 形成凹陷氧化物隔离的方法,具有降低的脖子陡度
    • US4630356A
    • 1986-12-23
    • US777800
    • 1985-09-19
    • Rosemary ChristieBao-Tai HwangSan-Mei KuJanet M. Sickler
    • Rosemary ChristieBao-Tai HwangSan-Mei KuJanet M. Sickler
    • H01L21/76H01L21/306H01L21/308H01L21/316H01L21/762H01L21/467H01L21/94
    • H01L21/7621H01L21/3081
    • Disclosed is a method of forming in a monocrystalline silicon body an optimum recessed oxide isolation structure with reduced steepness of the bird's neck. Starting from a monocrystalline silicon body, there is formed thereon a layered structure of first silicon dioxide, polycrystalline silicon, second silicon dioxide and silicon nitride, in that order. The layers are patterned to form openings in the structure at the areas where it is desired to form the oxide isolation pattern within the silicon body. The exposed areas of the silicon body are anisotropically reactive ion etched to an initial portion of the desired depth obtaining the corresponding portion of the trench having substantially vertical walls. Then by chemical etching the trench is extended to a final portion of the desired depth obtaining inwardly sloped walls in the final portion. The body is then thermally oxidized until the desired oxide isolation penetrates to the desired depth within the silicon body.
    • 公开了一种在单晶硅体中形成具有降低的脖子陡度的最佳凹陷氧化物隔离结构的方法。 从单晶硅体开始,依次形成第一二氧化硅,多晶硅,第二二氧化硅和氮化硅的分层结构。 这些层被图案化以在期望在硅体内形成氧化物隔离图案的区域的结构中形成开口。 硅体的暴露区域是各向异性反应离子蚀刻到期望深度的初始部分,获得具有基本垂直壁的沟槽的相应部分。 然后通过化学蚀刻将沟槽延伸到所需深度的最后部分,从而获得最终部分中的向内倾斜的壁。 然后将身体热氧化直到所需的氧化物隔离渗入硅体内所需的深度。