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    • 8. 发明申请
    • EUV condenser with non-imaging optics
    • 具有非成像光学元件的EUV冷凝器
    • US20050008870A1
    • 2005-01-13
    • US10877992
    • 2004-06-29
    • James McGuire
    • James McGuire
    • G02B17/06G02B19/00G03F7/20H01L21/027G02B17/00
    • G03F7/70075G03F7/70108G03F7/702G03F7/70233Y10T428/3154
    • An illumination system and condenser for use in photolithography in the extreme ultraviolet wavelength region has a first non-imaging optic element collecting electromagnetic radiation from a source and creates a desired radiance distribution. A second non-imaging optic element receives the electromagnetic radiation from the first non-imaging optic element and redirects and images the electromagnetic radiation. The electromagnetic radiation from the second non-imaging optic element is suitable for being received by other conventional optical surfaces to provide a desired radiance distribution with a desired angular distribution and desired shape. Facets are used to provide the desired illumination over the desired illumination field. Reflective facets may be placed on the second non-imaging optic, which can reduce the number of mirrors and increase efficiency. The condenser and illumination system are used in combination with a projection optic to project the image of a reticle or mask onto a photosensitive substrate, such as a semiconductor wafer. The condenser of the present invention provides an efficient condenser in a compact package and provides desirable illumination properties for imaging relatively small feature sizes of less than 0.13 microns.
    • 在极紫外波长区域中用于光刻的照明系统和聚光器具有从源收集电磁辐射的第一非成像光学元件并产生所需的辐射分布。 第二非成像光学元件接收来自第一非成像光学元件的电磁辐射并且重定向并成像电磁辐射。 来自第二非成像光学元件的电磁辐射适合于被其它常规光学表面接收以提供具有所需角度分布和期望形状的所需辐射度分布。 方面用于在期望的照明场上提供期望的照明。 反射面可以放置在第二非成像光学元件上,这可以减少反射镜的数量并提高效率。 聚光器和照明系统与投影光学元件组合使用,以将掩模版或掩模的图像投射到诸如半导体晶片的感光基底上。 本发明的冷凝器提供了一种紧凑型封装中的有效冷凝器,并提供了所需的照明特性,用于成像小于0.13微米的相对小的特征尺寸。
    • 10. 发明申请
    • Personal Display Using an Off-Axis Illuminator
    • 使用离轴照明器进行个人显示
    • US20070177275A1
    • 2007-08-02
    • US11649454
    • 2007-01-04
    • James McGuire
    • James McGuire
    • G02B27/14G02F1/1335
    • G02B27/0172G02B5/04G02B13/22G02B17/08G02B17/0892G02B27/1033G02B27/1066G02B27/144G02B27/145G02B27/149G02B27/283G02B2027/0178
    • Certain embodiments include a head mounted display for displaying images that can be viewed by a wearer when the display is worn on the wearer's head. The display can include a spatial light modulator having an array of pixels selectively adjustable for producing spatial patterns. The array of pixels can define a substantially planar reflective surface on the spatial light modulator. The display can further include a light source. The display can also include illumination optics disposed to receive light from the light source and direct light onto the planar reflective surface of the spatial light modulator at an angle with respect to the surface normal of the planar reflective surface. The display can include imaging optics disposed with respect to the spatial light modulator to receive light from the spatial light modulator. The display can further include a curved reflector disposed to reflect light from the imaging optics so as to form a virtual image such that the image may be viewed by an eye of the wearer. The display can also include headgear for supporting the spatial light modulator, imaging optics, and reflector. In certain embodiments, only rays of light incident on the planar reflective surface of the spatial light modulator at an angle with respect to the surface normal of the planar reflective surface contribute to the virtual image viewable by the eye.
    • 某些实施例包括头戴显示器,用于在显示器佩戴在佩戴者的头部上时显示佩戴者可以看到的图像。 显示器可以包括空间光调制器,其具有可选择地可调节的用于产生空间图案的像素阵列。 像素阵列可以在空间光调制器上限定基本上平面的反射表面。 显示器还可以包括光源。 显示器还可以包括照明光学器件,其设置成接收来自光源的光,并以相对于平面反射表面的表面法线成一定角度将光引导到空间光调制器的平面反射表面上。 显示器可以包括相对于空间光调制器布置的成像光学器件,以接收来自空间光调制器的光。 显示器还可以包括弯曲反射器,其设置成反射来自成像光学器件的光,以便形成虚像,使得图像可以被佩戴者的眼睛看到。 显示器还可以包括用于支撑空间光调制器,成像光学器件和反射器的头带。 在某些实施例中,仅以相对于平面反射表面的表面法线成一定角度入射到空间光调制器的平面反射表面上的光线有助于由眼睛观看的虚像。