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    • 3. 发明授权
    • Fill pattern inspection
    • 填充图案检查
    • US06654488B1
    • 2003-11-25
    • US09346468
    • 1999-07-01
    • J. Richard BehunJacek G. Smolinski
    • J. Richard BehunJacek G. Smolinski
    • G06K900
    • G03F1/84G03F7/70616G06T7/0004G06T2207/10056G06T2207/30148
    • Fill pattern inspection system and method where the fill patterns are inspected to a different criteria than the primary pattern or not inspected at all. The fill pattern images are marked such that they may be identified by easily recognizable shapes or designations to avoid unnecessary inspections and repairs in the fill areas. Alternatively, subresolution markers are placed in an image data for locating fill pattern areas. A software tool is also programmed to automatically detect the subresolution markers during inspection and to inspect the regions on a plate which correspond to the subresolution markers in the image data at a different level of criteria than one which is employed for primary pattern inspection.
    • 填充图案检查系统和方法,其中填充图案被检查到与主要图案不同的标准或根本不被检查。 填充图案图像被标记为使得它们可以通过容易识别的形状或指定来识别,以避免在填充区域中进行不必要的检查和修理。 或者,将分辨率标记放置在用于定位填充图案区域的图像数据中。 软件工具也被编程为在检查过程中自动检测分辨率标记,并以与用于初级图形检查的标准不同的标准水平来检查与图像数据中的分辨率标记对应的板上的区域。