会员体验
专利管家(专利管理)
工作空间(专利管理)
风险监控(情报监控)
数据分析(专利分析)
侵权分析(诉讼无效)
联系我们
交流群
官方交流:
QQ群: 891211   
微信请扫码    >>>
现在联系顾问~
热词
    • 8. 发明授权
    • Rotary resonant three-dimensional electric field sensor
    • 旋转谐振三维电场传感器
    • US09513323B2
    • 2016-12-06
    • US14385410
    • 2013-03-15
    • INSTITUTE OF ELECTRONICS, CHINESE ACADEMY OF SCIENCES
    • Shanhong XiaYu WangDongming FangChunrong Peng
    • G01R29/08G01R29/12
    • G01R29/08G01R29/12
    • A rotary resonant three-dimensional electric field sensor is disclosed. The rotary resonant three-dimensional electric field sensor includes: a substrate (1); an X-direction electric field measurement unit (4), a Y-direction electric field measurement unit (5), and a Z-direction electric field measurement unit (6), set on the substrate (1), each of which including: a sensing electrode (8, 10, 13) fixed on the substrate (1), and a shielding electrode (7, 9, 12) vibrating relatively to the sensing electrode (8, 10, 13); and at least one set of driving mechanical structures (11, 18), is configured to generate a driving force so as to cause the shielding electrode (7, 9) to vibrate relatively to a corresponding sensing electrode (8, 10, 13), and the vibration is transferred to the shielding is electrodes (7, 9, 12) of the other two electric field measurement units (4, 5, 6).
    • 公开了一种旋转谐振三维电场传感器。 旋转谐振三维电场传感器包括:基板(1); 设置在基板(1)上的X方向电场测量单元(4),Y方向电场测量单元(5)和Z方向电场测量单元(6),每个都包括: 固定在所述基板(1)上的检测电极(8,10,13)以及相对于所述检测电极(8,10,13)振动的屏蔽电极(7,9,12)。 并且至少一组驱动机械结构(11,18)被配置为产生驱动力,以使得屏蔽电极(7,9)相对于相应的感测电极(8,10,13)振动, 并且振动传递到屏蔽层是另外两个电场测量单元(4,5,6)的电极(7,9,12)。