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1. 发明授权

US5920972A Interconnection method for a multilayer transducer array 失效
标题翻译：多层换能器阵列的互连方法
公开(公告)号：US5920972A
公开(公告)日：1999-07-13
申请号：US883778
申请日：1997-06-27
申请人： Grazyna Palczewska , Inessa Persatieva , Ron Ho
发明人： Grazyna Palczewska , Inessa Persatieva , Ron Ho
IPC分类号： B06B1/06 , H05K1/18 , H01L41/22
CPC分类号： B06B1/064 , H05K1/182 , H05K1/189 , Y10T29/42
摘要： A method of providing connections to an arrangement of multilayer transducer elements of an ultrasonic transducer array includes patterning an electrically conductive layer on a substrate to define a number of traces and a wide-area continuous region. At least a portion of the substrate is then removed to expose both of the upper and lower surfaces of the wide-area conductive region. The exposed upper and lower surfaces are captured between first and second piezoelectric layers such that the conductive layer electrically contacts both of the piezoelectric layers. The captured wide-area continuous region and at least one of the piezoelectric layers are diced to define the array of transducer elements. The traces that are formed during the patterning step are arranged such that there is a one-to-one correspondence between the traces and the electrodes that are defined by segmenting the wide-area continuous region during the dicing step.
摘要翻译：提供到超声换能器阵列的多层换能器元件的布置的连接的方法包括对衬底上的导电层进行图案化以限定多个迹线和广域连续区域。然后去除衬底的至少一部分以暴露广域导电区域的上表面和下表面。暴露的上表面和下表面被捕获在第一和第二压电层之间，使得导电层电接触两个压电层。捕获的广域连续区域和至少一个压电层被切割以限定换能器元件的阵列。在图案化步骤期间形成的迹线被布置成使得在切割步骤期间通过分割广域连续区域来限定迹线和电极之间存在一一对应的关系。

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