会员体验
专利管家(专利管理)
工作空间(专利管理)
风险监控(情报监控)
数据分析(专利分析)
侵权分析(诉讼无效)
联系我们
交流群
官方交流:
QQ群: 891211   
微信请扫码    >>>
现在联系顾问~
热词
    • 2. 发明授权
    • Infrared sensor and method for compensating temperature thereof
    • 红外传感器及其温度补偿方法
    • US6043493A
    • 2000-03-28
    • US10513
    • 1998-01-21
    • In Sik KimTae Yoon KimYoung Cho ShimJun Bae Lee
    • In Sik KimTae Yoon KimYoung Cho ShimJun Bae Lee
    • G01J5/00G01J5/06G01J5/08G01J5/10G01J5/16
    • G01J5/16G01J5/06G01J5/08G01J5/0815G01J5/0846G01J5/0862G01J5/0893G01J2005/068G01J5/026
    • Infrared sensor that can make a temperature compensation by itself, and method for compensating a temperature thereof, are disclosed. The infrared sensor preferably includes a substrate, a diaphragm formed on the substrate, and a first thermopile sensor formed on a region of the diaphragm for sensing an infrared radiation emitted from a measured object and infrared radiations emitted from regions other than the measured object. A second thermopile sensor is formed on a region of the diaphragm and connected to the first thermopile sensor for sensing the infrared radiations emitted from the regions other than the measured object. A housing protects a front face of the substrate including the first, and second thermopile sensors includes an infrared filter in the housing over the first and second thermopile sensors for transmission of infrared radiations, and a reflector reflects the infrared radiation emitted from the measured object toward the first thermopile sensor. The method for temperature compensation can include the steps of letting an infrared radiation from a measured object be directed to the first thermopile sensor and letting infrared radiations from regions other than the measured object be directed to the first and second thermopile sensors, respectively, sensing the infrared radiations in the first and second thermopile sensors directed thereto, and making a temperature compensation for the infrared radiations from regions other than the measured object using the first and second thermopile sensors to provide a temperature component of the measured object only.
    • 公开了能够自行进行温度补偿的红外线传感器及其温度补偿方法。 红外线传感器优选地包括基板,形成在基板上的光阑和形成在光阑的区域上的第一热电堆传感器,用于感测从测量对象发射的红外辐射和从测量对象以外的区域发射的红外辐射。 第二热电堆传感器形成在隔膜的一个区域上并连接到第一热电堆传感器,用于感测从测量对象以外的区域发射的红外辐射。 壳体保护基板的前表面,包括第一和第二热电堆传感器在壳体中包括在第一和第二热电堆传感器上的红外滤光器,用于传输红外辐射,并且反射器将从测量对象发射的红外辐射反射到 第一个热电堆传感器。 用于温度补偿的方法可以包括以下步骤:将来自测量对象的红外辐射引导到第一热电堆传感器并且使来自被测物体以外的区域的红外辐射分别被引导到第一和第二热电堆传感器,感测 第一和第二热电堆传感器中的红外辐射被引导到其上,并且使用第一和第二热电堆传感器对来自除被测物体之外的区域的红外辐射进行温度补偿,以仅提供被测物体的温度分量。
    • 5. 发明授权
    • IR sensor and method for fabricating the same
    • IR传感器及其制造方法
    • US06518597B1
    • 2003-02-11
    • US09712933
    • 2000-11-16
    • In Sik Kim
    • In Sik Kim
    • H01L2715
    • H01L35/30G01J5/12H01L35/34
    • Infrared ray sensor and method for fabricating the same, the method including the steps of (a) forming a diaphragm on a substrate, (b) forming and patterning a semiconductor film on the diaphragm to form a first thermoelectric material film, and forming and patterning a conductor film on the diaphragm, to form a metal resistance layer in a region of the first thermoelectric material film and a second thermoelectric material film in a region of the diaphragm, (c) forming a protection film on an entire surface inclusive of the metal resistance layer, (d) forming a black body on the protection film, and (e) removing a back side portion of the substrate, to expose the diaphragm, whereby maintaining a high sensitivity, requiring no additional process, reducing Jhonson noise, and improving yield.
    • 红外线传感器及其制造方法,其特征在于,包括以下步骤:(a)在基板上形成隔膜,(b)在所述隔膜上形成和图案化半导体膜,形成第一热电材料膜,形成图案化 在隔膜上形成导体膜,在第一热电材料膜的区域形成金属电阻层,在隔膜的区域形成第二热电材料膜,(c)在包含金属的整个表面上形成保护膜 电阻层,(d)在保护膜上形成黑体,以及(e)去除衬底的背侧部分以暴露隔膜,从而保持高灵敏度,不需要额外的工艺,降低Jsonson噪声并改善 产量。