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1. 发明申请

US20110226069A1 FLEXIBLE FORCE OR PRESSURE SENSOR ARRAY USING SEMICONDUCTOR STRAIN GAUGE, FABRICATION METHOD THEREOF AND MEASUREMENT METHOD THEREOF 有权
标题翻译：使用半导体应变计的柔性力或压力传感器阵列，其制造方法及其测量方法
公开(公告)号：US20110226069A1
公开(公告)日：2011-09-22
申请号：US13051063
申请日：2011-03-18
申请人： Min Seok Kim , Yon-Kyu Park , Dae Im Kang , Han Wook Song , Sungjun Lee , In-Mook Choi
发明人： Min Seok Kim , Yon-Kyu Park , Dae Im Kang , Han Wook Song , Sungjun Lee , In-Mook Choi
IPC分类号： G01L1/22 , H01L21/00
CPC分类号： G01L1/2293
摘要： The force or pressure sensor array of the present invention effectively has both flexibility and elasticity. Since the substrate itself is a kind of a polymer material, the substrate can be bent or expanded. Although silicon, which is a material of the semiconductor strain gauge, is easily broken and solid, mechanical flexibility can be secured if it is fabricated extremely thin. To this end, particularly, disclosed is a flexible force or pressure sensor array using semiconductor strain gauges 110, the sensor array comprising: a substrate 10 including: the semiconductor strain gauges 110 in which a plurality of elements formed in a certain array pattern is deformed by force or pressure, a pair of polymer film layers 120 and 130 having film surfaces contacted facing each other and containing the semiconductor strain gauge 110 between the film surfaces contacted with each other, and a pair of signal line layers formed on top and bottom surfaces of an insulating layer using either of the pair of polymer film layers 120 and 130 as the insulating layer and connected to the elements 111 of the array pattern to form electrodes, for fetching deformation signals outputted due to deformation of the elements 111 to outside; and a pair of elastomer layers 20 and 30 formed on both sides of the substrate 10 to contain the substrate 10 inside.
摘要翻译：本发明的力或压力传感器阵列有效地具有弹性和弹性。由于基板本身是一种聚合物材料，所以可以使基板弯曲或膨胀。虽然作为半导体应变计的材料的硅易于断裂和固体，但如果其制造得非常薄，则可以确保机械的灵活性。为此，特别地公开了使用半导体应变计110的柔性力或压力传感器阵列，该传感器阵列包括：衬底10，其包括：半导体应变计110，其中以一定阵列图案形成的多个元件变形通过力或压力，一对具有彼此面对的并且在彼此接触的膜表面之间接合的半导体应变计110的膜表面的聚合物膜层120和130以及形成在顶表面和底表面上的一对信号线层使用一对聚合物膜层120和130中的任一个作为绝缘层并且连接到阵列图案的元件111以形成电极，用于将由于元件111的变形而输出的变形信号提取到外部; 以及形成在基板10的两侧上的一对弹性体层20和30，以在其内部容纳基板10。

2. 发明授权

US07392686B2 Calibration apparatus for vacuum gauge having combined use of 1 Torr level, 10 Torr level, and 100 Torr level 失效
标题翻译：用于真空计的校准装置，结合使用1乇级别，10乇级别和100乇级别
公开(公告)号：US07392686B2
公开(公告)日：2008-07-01
申请号：US11300625
申请日：2005-12-14
申请人： Sam Yong Woo , In Mook Choi , Boo Shik Kim
发明人： Sam Yong Woo , In Mook Choi , Boo Shik Kim
IPC分类号： G01L27/00
CPC分类号： G01L27/005
摘要： Disclosed herein is a calibration apparatus for vacuum gauge having a combined use for an 1 Torr level, a 10 Torr level, and a 100 Torr level vacuum gauge. According to the present invention, there is provided a calibration apparatus for vacuum gauge, in which a standard pressure gauge 140, 142 is installed within a pressure vessel 120 for calibrating a monitoring pressure gauge 560, the apparatus comprising: a balance mounting shaft 134 installed vertically within the pressure vessel 120 and provided with a plurality of balance mounting bases 138 spaced apart from one another at predetermined intervals along an axial direction, and the standard pressure gauge 140, 142 being connected to lower portion of the balance mounting shaft; a plural sets of balances mounted between the respective balance mounting bases 138, each of which is composed of a plurality of balances; means for elevating each balance of the plural sets of the balances from the balance mounting base 138 separately or mounting the balance on the balance mounting base 138; and means for controlling the operation of the elevating means according to commands received from the outside.
摘要翻译：本文公开了一种用于真空计的校准装置，其具有1乇级别，10乇级别和100乇级真空计的组合使用。根据本发明，提供了一种用于真空计的校准装置，其中标准压力计140,142安装在压力容器120内用于校准监测压力计560，该装置包括：安装的平衡安装轴134 在压力容器120内垂直地设置有多个平行安装基座138，该平衡安装基座138沿着轴向方向以预定间隔彼此间隔开，并且标准压力计140,142连接到平衡安装轴的下部; 安装在相应的平衡安装基座138之间的多组天平，每个平衡安装基座138由多个平衡构成; 用于从天平安装基座138分别升高多组天平的平衡的装置，或将天平安装在平衡安装基座138上; 以及用于根据从外部接收的命令来控制升降装置的操作的装置。

3. 发明授权

US08695441B2 Flexible force or pressure sensor array using semiconductor strain gauge, fabrication method thereof and measurement method thereof 有权
标题翻译：使用半导体应变计的柔性力或压力传感器阵列，其制造方法及其测量方法
公开(公告)号：US08695441B2
公开(公告)日：2014-04-15
申请号：US13051063
申请日：2011-03-18
申请人： Min Seok Kim , Yon-Kyu Park , Dae Im Kang , Han Wook Song , Sungjun Lee , In-Mook Choi
发明人： Min Seok Kim , Yon-Kyu Park , Dae Im Kang , Han Wook Song , Sungjun Lee , In-Mook Choi
IPC分类号： G01L1/22
CPC分类号： G01L1/2293
摘要： The force or pressure sensor array of the present invention effectively has both flexibility and elasticity. Since the substrate itself is a kind of a polymer material, the substrate can be bent or expanded. Although silicon, which is a material of the semiconductor strain gauge, is easily broken and solid, mechanical flexibility can be secured if it is fabricated extremely thin. To this end, particularly, disclosed is a flexible force or pressure sensor array using semiconductor strain gauges 110, the sensor array comprising: a substrate 10 including: the semiconductor strain gauges 110 in which a plurality of elements formed in a certain array pattern is deformed by force or pressure, a pair of polymer film layers 120 and 130 having film surfaces contacted facing each other and containing the semiconductor strain gauge 110 between the film surfaces contacted with each other, and a pair of signal line layers formed on top and bottom surfaces of an insulating layer using either of the pair of polymer film layers 120 and 130 as the insulating layer and connected to the elements 111 of the array pattern to form electrodes, for fetching deformation signals outputted due to deformation of the elements 111 to outside; and a pair of elastomer layers 20 and 30 formed on both sides of the substrate 10 to contain the substrate 10 inside.
摘要翻译：本发明的力或压力传感器阵列有效地具有弹性和弹性。由于基板本身是一种聚合物材料，所以可以使基板弯曲或膨胀。虽然作为半导体应变计的材料的硅易于断裂和固体，但如果其制造得非常薄，则可以确保机械的灵活性。为此，特别地公开了使用半导体应变计110的柔性力或压力传感器阵列，该传感器阵列包括：衬底10，其包括：半导体应变计110，其中以一定阵列图案形成的多个元件变形通过力或压力，一对具有彼此面对的并且在彼此接触的膜表面之间接合的半导体应变计110的膜表面的聚合物膜层120和130以及形成在顶表面和底表面上的一对信号线层使用一对聚合物膜层120和130中的任一个作为绝缘层并且连接到阵列图案的元件111以形成电极，用于将由于元件111的变形而输出的变形信号提取到外部; 以及形成在基板10的两侧上的一对弹性体层20和30，以在其内部容纳基板10。

4. 发明授权

US07564246B2 Pressure sensor using field emission of carbon nano-tube 失效
标题翻译：压力传感器使用碳纳米管的场发射
公开(公告)号：US07564246B2
公开(公告)日：2009-07-21
申请号：US11472742
申请日：2006-06-22
申请人： In Mook Choi , Sam Yong Woo , Boo Shik Kim
发明人： In Mook Choi , Sam Yong Woo , Boo Shik Kim
IPC分类号： G01L21/30
CPC分类号： G01L21/30
摘要： Disclosed is an ion gage using a carbon nano-tube, more specifically a pressure sensor using a field emission of the carbon nano-tube. An array of carbon nano-tubes is formed on a metallic layer. A first grid is disposed on the array of the carbon nano-tubes. A second grid is disposed on the first grid in such a manner as to be spaced apart by a certain desired distance from the first grid. A collector is disposed on the second grid in such a manner as to be spaced apart by a certain desired distance from the second grid. Electrons emitted from the carbon nano-tube are collided with gas molecules to be ionized. The ionized cation is sensed by the collector to be outputted as an electrical signal.
摘要翻译：公开了使用碳纳米管的离子计，更具体地，使用碳纳米管的场发射的压力传感器。在金属层上形成碳纳米管阵列。第一栅极设置在碳纳米管的阵列上。第二栅格设置在第一栅格上，以便与第一栅格隔开一定的期望距离。收集器以与第二格栅隔开一段预定距离的方式设置在第二格栅上。从碳纳米管发射的电子与要离子化的气体分子碰撞。电离阳离子由集电极感测，作为电信号输出。

5. 发明申请

US20090072836A1 PRESSURE SENSOR USING FIELD EMISSION OF CARBON NANO-TUBE 失效
标题翻译：使用碳纳米管的场发射的压力传感器
公开(公告)号：US20090072836A1
公开(公告)日：2009-03-19
申请号：US11472742
申请日：2006-06-22
申请人： In Mook Choi , Sam Yong Woo , Boo Shik Kim
发明人： In Mook Choi , Sam Yong Woo , Boo Shik Kim
IPC分类号： G01L21/30
CPC分类号： G01L21/30
摘要： Disclosed is an ion gage using a carbon nano-tube, more specifically a pressure sensor using a field emission of the carbon nano-tube. An array of carbon nano-tubes is formed on a metallic layer. A first grid is disposed on the array of the carbon nano-tubes. A second grid is disposed on the first grid in such a manner as to be spaced apart by a certain desired distance from the first grid. A collector is disposed on the second grid in such a manner as to be spaced apart by a certain desired distance from the second grid. Electrons emitted from the carbon nano-tube are collided with gas molecules to be ionized. The ionized cation is sensed by the collector to be outputted as an electrical signal.
摘要翻译：公开了使用碳纳米管的离子计，更具体地，使用碳纳米管的场发射的压力传感器。在金属层上形成碳纳米管阵列。第一栅极设置在碳纳米管的阵列上。第二栅格设置在第一栅格上，以便与第一栅格隔开一定的期望距离。收集器以与第二格栅隔开一段预定距离的方式设置在第二格栅上。从碳纳米管发射的电子与要离子化的气体分子碰撞。电离阳离子由集电极感测，作为电信号输出。

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