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    • 3. 发明授权
    • Apparatus for generating remote plasma
    • 用于产生远程等离子体的装置
    • US08207470B2
    • 2012-06-26
    • US12547163
    • 2009-08-25
    • Hyeong-Tag JeonSang-Hyun WooHyung-Chul KimChin-Wook Chung
    • Hyeong-Tag JeonSang-Hyun WooHyung-Chul KimChin-Wook Chung
    • B23K10/00
    • H01J37/32532H01J37/32082H01J37/32357
    • Provided is an apparatus for generating remote plasma, which can improve thin-film quality by preventing an arc at a bias electrode. The apparatus includes a radio frequency (RF) electrode installed inside an upper portion of a chamber, a bias electrode installed apart from the RF electrode, and including a plurality of through holes through which plasma passes, wherein a bias power is supplied to the bias electrode, a plasma generating unit formed between the RF electrode and the bias electrode, wherein a plasma gas is supplied to the plasma generating unit, and a ground electrode installed under and spaced apart from the bias electrode, and including plasma through holes corresponding to the through holes of the bias electrode, wherein a pulsed DC bias of a second voltage level, which has a first voltage level periodically, is applied to the bias electrode.
    • 提供一种用于产生远程等离子体的装置,其可以通过防止偏置电极处的电弧来提高薄膜质量。 该装置包括安装在室的上部内的射频(RF)电极,与RF电极分开安装的偏置电极,并且包括多个通过等离子体通过的通孔,其中偏置功率被提供给偏置 电极,形成在RF电极和偏置电极之间的等离子体产生单元,其中等离子体气体被供应到等离子体产生单元,以及接地电极,安装在偏置电极之下并与偏置电极隔开,并且包括对应于等离子体的等离子体通孔 偏置电极的通孔,其中周期性地具有第一电压电平的第二电压电平的脉冲DC偏压施加到偏置电极。
    • 9. 发明申请
    • TOUCH PANEL AND METHOD FOR FABRICATING THE SAME
    • 触控面板及其制作方法
    • US20120262385A1
    • 2012-10-18
    • US13308282
    • 2011-11-30
    • Seung-Hyun KIMHyung-Chul KimTae-Yeon Yoo
    • Seung-Hyun KIMHyung-Chul KimTae-Yeon Yoo
    • G06F3/041H05K3/10H05K3/06B05D5/12
    • G06F3/044G06F2203/04103
    • A touch panel is made by forming a routing and pad pattern group on a substrate to include first and second routing lines, first pad electrodes connected to the first routing line, and second pad electrodes connected to the second routing line, by using a first mask; forming a sensor electrode pattern group on the substrate having the routing and pad pattern group formed thereon to include first sensor electrodes formed in a first direction, second sensor electrodes formed in a second direction, and connection portions that each connects adjacent first sensor electrodes, by using a second mask; forming a first insulating layer to include contact holes to expose portions of the second sensor electrodes, respectively, by using a third mask; and forming bridges that each connects adjacent second sensor electrodes through the contact holes and a second insulating layer on the bridges, by using a fourth mask.
    • 通过在衬底上形成布线和焊盘图案组以包括第一和第二布线线,连接到第一布线线的第一焊盘电极和连接到第二布线线的第二焊盘电极,通过使用第一掩模 ; 在其上形成有路由和焊盘图案组的基板上形成传感器电极图案组,以包括沿第一方向形成的第一传感器电极,在第二方向上形成的第二传感器电极和连接相邻的第一传感器电极的连接部分, 使用第二个掩模; 形成第一绝缘层,以分别包括通过使用第三掩模来暴露第二传感器电极的部分的接触孔; 以及通过使用第四掩模形成每个通过接触孔连接邻近的第二传感器电极的桥和桥上的第二绝缘层。