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    • 2. 发明授权
    • Infrared absorption layer structure and its formation method, and an uncooled infrared detector using this structure
    • 红外吸收层结构及其形成方法,以及使用该结构的非冷却红外探测器
    • US07268349B2
    • 2007-09-11
    • US10953696
    • 2004-09-29
    • Sung MoonHyun-Joon ShinYong-Hee Han
    • Sung MoonHyun-Joon ShinYong-Hee Han
    • G01J5/00
    • G01J5/10G01J5/0853
    • The present invention relates to uncooled infrared detector with infrared absorption structure in which the supporting layer, detection layer, protecting layer, and dielectric layer construct λ/4 resonating absorbtion structure as a single body. In order to enhance the characteristic of uncooled infrared detector, it is essential for the infrared absorption layer to absorb incident infrared with high efficiency. The present invention is characterized in that the infrared detector with unified absorption layer includes an infrared detection film, a device protecting layer, a supporting layer for thermally isolated structure, and a dielectric layer, etc. in its absorption structure. Due to this characteristic, highly efficient infrared absorption is possible with much less thermal mass than the absorption layer for the structure of existing metal/dielectric/metal structure and regardless of the distortion of floating structure caused by fabrication fault rather than air cavity λ/4 structure.
    • 本发明涉及具有红外吸收结构的非制冷红外探测器,其中支撑层,检测层,保护层和介电层构成了λ/ 4共振吸收结构作为单体。 为了提高非制冷红外探测器的特性,红外吸收层必须高效吸收入射红外线。 本发明的特征在于,具有统一吸收层的红外检测器在其吸收结构中包括红外检测膜,器件保护层,用于隔热结构的支撑层和介电层等。 由于这一特性,与现有金属/电介质/金属结构的结构的吸收层相比,无论由制造故障而不是空气腔λ/ 4引起的浮动结构的变形,热效应都比高效的红外吸收是可能的 结构体。
    • 3. 发明申请
    • Infrared absorption layer structure and its formation method, and an uncooled infrared detector using this structure
    • 红外吸收层结构及其形成方法,以及使用该结构的非冷却红外探测器
    • US20060060784A1
    • 2006-03-23
    • US10953696
    • 2004-09-29
    • Sung MoonHyun-Joon ShinYong-Hee Han
    • Sung MoonHyun-Joon ShinYong-Hee Han
    • G01J5/00
    • G01J5/10G01J5/0853
    • The present invention relates to uncooled infrared detector with infrared absorption structure in which the supporting layer, detection layer, protecting layer, and dielectric layer construct λ/4 resonating absorbtion structure as a single body. In order to enhance the characteristic of uncooled infrared detector, it is essential for the infrared absorption layer to absorb incident infrared with high efficiency. The present invention is characterized in that the infrared detector with unified absorption layer includes an infrared detection film, a device protecting layer, a supporting layer for thermally isolated structure, and a dielectric layer, etc. in its absorption structure. Due to this characteristic, highly efficient infrared absorption is possible with much less thermal mass than the absorption layer for the structure of existing metal/dielectric/metal structure and regardless of the distortion of floating structure caused by fabrication fault rather than air cavity λ/4 structure.
    • 本发明涉及具有红外吸收结构的非制冷红外探测器,其中支撑层,检测层,保护层和介电层构成了λ/ 4共振吸收结构作为单体。 为了提高非制冷红外探测器的特性,红外吸收层必须高效吸收入射红外线。 本发明的特征在于,具有统一吸收层的红外检测器在其吸收结构中包括红外检测膜,器件保护层,用于隔热结构的支撑层和介电层等。 由于这一特性,与现有金属/电介质/金属结构的结构的吸收层相比,无论由制造故障而不是空气腔λ/ 4引起的浮动结构的变形,热效应都比高效的红外吸收是可能的 结构体。
    • 4. 发明申请
    • Oxide thin film for bolometer and infrared detector using the oxide thin film
    • 氧化薄膜用于测辐射热计和红外探测器使用氧化物薄膜
    • US20050167592A1
    • 2005-08-04
    • US10953700
    • 2004-09-29
    • Sung MoonHyun-Joon ShinYong-Hee Han
    • Sung MoonHyun-Joon ShinYong-Hee Han
    • G01J5/20H01C7/00H01C7/04H01C17/12H01L31/09G01J5/00
    • G01J5/046G01J5/20H01C7/006H01C7/047H01C17/12
    • The present invention relates to an oxide thin film for a bolometer-type uncooled infrared detector having high sensitivity. A vanadium tungsten oxide (V—W—Ox), i.e. a tungsten-doped vanadium oxide, is provided as an oxide film for a bolometer. An oxide for bolometer having characteristics of low resistance of 5 to 200 kΩ and variable TCR between −1.5 and −4.1%/° C. can be obtained by an oxidation of vanadium-tungsten metal film at a low temperature around 300° C., with changing a tungsten content and oxidation time. And a reproducible thin film can be fabricated by low price equipment for thin film deposition, without expensive ion beam or laser apparatus. Accordingly, an oxide for bolometer having characteristics of resistance lower than 100 kΩ and TCR higher than −3%/° C. can be obtained with reproducibility, whereby an uncooled-type infrared detector having high sensitivity can be fabricated.
    • 本发明涉及一种具有高灵敏度的测辐射热计型非制冷红外探测器的氧化物薄膜。 提供钒钨氧化物(V-W-O x S),即钨掺杂的氧化钒作为辐射热计的氧化膜。 通过在约300℃的低温下氧化钒 - 钨金属膜可以获得具有5至200kOmega的低电阻特性和-1.5至-4.1%/℃之间的可变TCR的测辐射热计的氧化物, 改变钨含量和氧化时间。 并且可重现的薄膜可以通过低成本的薄膜沉积设备制造,而不需要昂贵的离子束或激光设备。 因此,可以以再现性获得具有低于100kOmega和TCR高于-3%/℃的特性的测辐射热计的氧化物,由此可以制造具有高灵敏度的非冷却型红外检测器。
    • 6. 发明授权
    • Optical stimulus probe with reflecting surface
    • 具有反射面的光学刺激探头
    • US08886278B2
    • 2014-11-11
    • US13175236
    • 2011-07-01
    • JinSeok KimEui-Sung YoonHyun-Joon ShinJun-Kyo Francis Suh
    • JinSeok KimEui-Sung YoonHyun-Joon ShinJun-Kyo Francis Suh
    • A61B5/04A61N1/04A61B5/0484A61B5/00
    • A61B5/04842A61B5/0059
    • An optical stimulation probe has a probe body inserted into a subject, an electrode formed on the probe body and collecting a response signal from the subject, a light irradiator attached to the probe body and irradiating an optical signal and a reflecting surface formed on the probe body on the path of the optical signal. The reflecting surface changes the course of the optical signal irradiated from the light irradiator to the direction where the electrode faces by reflecting the optical signal. The electrode may be formed on a side portion of the probe body such that it faces a direction perpendicular to a length direction of the probe body, and the optical signal reflected by the reflecting surface may travel along a direction perpendicular to the length direction of the probe body, such that the direction where the electrode faces and the direction along which the reflected optical signal travels are parallel to each other.
    • 光学刺激探针具有插入到被检体内的探针体,形成在探针体上的电极,收集来自被检体的响应信号,附着在探针体上的光照射器,照射光信号,形成在探针上的反射面 身体在光信号的路径上。 通过反射光信号,反射面改变从光照射器照射的光信号向电极面朝的方向。 电极可以形成在探针体的侧部,使得其面向与探针体的长度方向垂直的方向,并且由反射面反射的光信号可以沿着垂直于探针体的长度方向的方向行进 使得电极面朝的方向和反射的光信号所沿的方向彼此平行。
    • 8. 发明授权
    • Oxide thin film for bolometer and infrared detector using the oxide thin film
    • 氧化薄膜用于测辐射热计和红外探测器使用氧化物薄膜
    • US07250604B2
    • 2007-07-31
    • US10953700
    • 2004-09-29
    • Sung MoonHyun-Joon ShinYong-Hee Han
    • Sung MoonHyun-Joon ShinYong-Hee Han
    • G01J5/00
    • G01J5/046G01J5/20H01C7/006H01C7/047H01C17/12
    • The present invention relates to an oxide thin film for a bolometer-type uncooled infrared detector having high sensitivity. An amorphous vanadium tungsten oxide (V—W—Ox), i.e. a tungsten-doped vanadium oxide, is provided as an oxide film for a bolometer application. An oxide for bolometer having characteristics of low resistance of 5 to 200 k Ω and variable TCR between −1.5 and −4.1%/° C. can be obtained by an oxidation of vanadium-tungsten metal film at a low temperature around 300° C., with changing a tungsten content and oxidation time. And a reproducible thin film can be fabricated by low price equipment for thin film deposition, without expensive ion beam or laser apparatus. Accordingly, an oxide for bolometer having characteristics of resistance lower than 100 kΩ and TCR higher than −3%/° C. can be obtained with reproducibility, whereby an uncooled-type infrared detector having high sensitivity can be fabricated.
    • 本发明涉及一种具有高灵敏度的测辐射热计型非制冷红外探测器的氧化物薄膜。 提供无定形钒氧化钨(V-W-O x S x),即掺杂钨的氧化钒作为测辐射热计应用的氧化膜。 通过在约300℃的低温下氧化钒 - 钨金属膜可以获得具有5至200kΩ低电阻特性和-1.5至-4.1%/℃之间的可变TCR的测辐射热计的氧化物。 ,改变钨含量和氧化时间。 并且可重现的薄膜可以通过低成本的薄膜沉积设备制造,而不需要昂贵的离子束或激光设备。 因此,可以以再现性获得具有低于100kOmega和TCR高于-3%/℃的特性的测辐射热计的氧化物,由此可以制造具有高灵敏度的非冷却型红外检测器。
    • 10. 发明申请
    • Optical Stimulus Probe with Reflecting Surface
    • 具有反射面的光学刺激探头
    • US20120101356A1
    • 2012-04-26
    • US13175236
    • 2011-07-01
    • JinSeok KIMEui-Sung YOONHyun-Joon SHINJun-Kyo Francis SUH
    • JinSeok KIMEui-Sung YOONHyun-Joon SHINJun-Kyo Francis SUH
    • A61B5/04
    • A61B5/04842A61B5/0059
    • An optical stimulation probe has a probe body inserted into a subject, an electrode formed on the probe body and collecting a response signal from the subject, a light irradiator attached to the probe body and irradiating an optical signal and a reflecting surface formed on the probe body on the path of the optical signal. The reflecting surface changes the course of the optical signal irradiated from the light irradiator to the direction where the electrode faces by reflecting the optical signal. The electrode may be formed on a side portion of the probe body such that it faces a direction perpendicular to a length direction of the probe body, and the optical signal reflected by the reflecting surface may travel along a direction perpendicular to the length direction of the probe body, such that the direction where the electrode faces and the direction along which the reflected optical signal travels are parallel to each other.
    • 光学刺激探针具有插入到被检体内的探针体,形成在探针体上的电极,收集来自被检体的响应信号,附着在探针体上的光照射器,照射光信号,形成在探针上的反射面 身体在光信号的路径上。 通过反射光信号,反射面改变从光照射器照射的光信号向电极面朝的方向。 电极可以形成在探针体的侧部,使得其面向与探针体的长度方向垂直的方向,并且由反射面反射的光信号可以沿着垂直于探针体的长度方向的方向行进 使得电极面朝的方向和反射的光信号所沿的方向彼此平行。