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    • 4. 发明授权
    • Method for making dual silicide and germanide semiconductors
    • 制造双硅化物和锗化硅半导体的方法
    • US08603882B2
    • 2013-12-10
    • US13107679
    • 2011-05-13
    • Szu-Hung ChenHung-Min ChenYu-Sheng LaiWen-Fa WuFu-Liang Yang
    • Szu-Hung ChenHung-Min ChenYu-Sheng LaiWen-Fa WuFu-Liang Yang
    • H01L21/336
    • H01L29/6653H01L29/665H01L29/7833
    • A method for making a dual silicide or germanide semiconductor comprises steps of providing a semiconductor substrate, forming a gate, forming source/drain regions, forming a first silicide, reducing spacers thickness and forming a second silicide. Forming a gate comprises forming an insulating layer over the semiconductor substrate, and forming the gate over the insulating layer. Forming source/drain regions comprises forming lightly doped source/drain regions in the semiconductor substrate adjacent to the insulating layer, forming spacers adjacent to the gate and over part of the lightly doped source/drain regions, and forming heavily doped source/drain regions in the semiconductor substrate. The first silicide is formed on an exposed surface of lightly and heavily doped source/drain regions. The second silicide is formed on an exposed surface of lightly doped source/drain regions. A first germanide and second germanide may replace the first silicide and the second silicide.
    • 制造双硅化物或锗化硅半导体的方法包括提供半导体衬底,形成栅极,形成源极/漏极区域,形成第一硅化物,减少间隔物厚度和形成第二硅化物的步骤。 形成栅极包括在半导体衬底上形成绝缘层,并在绝缘层上形成栅极。 形成源极/漏极区域包括在与绝缘层相邻的半导体衬底中形成轻掺杂源极/漏极区域,在栅极和轻掺杂源极/漏极区域的一部分上形成间隔物,并且形成重掺杂的源极/漏极区域 半导体衬底。 第一硅化物形成在轻掺杂和重掺杂的源/漏区的暴露表面上。 第二硅化物形成在轻掺杂源极/漏极区域的暴露表面上。 第一个锗化物和第二个锗化物可以替代第一个硅化物和第二个硅化物。
    • 5. 发明申请
    • METHOD FOR MAKING DUAL SILICIDE AND GERMANIDE SEMICONDUCTORS
    • 制备双硅氧烷和锗化物半导体的方法
    • US20120190163A1
    • 2012-07-26
    • US13107679
    • 2011-05-13
    • Szu-Hung ChenHung-Min ChenYu-Sheng LaiWen-Fa WuFu-Liang Yang
    • Szu-Hung ChenHung-Min ChenYu-Sheng LaiWen-Fa WuFu-Liang Yang
    • H01L21/336
    • H01L29/6653H01L29/665H01L29/7833
    • A method for making a dual silicide or germanide semiconductor comprises steps of providing a semiconductor substrate, forming a gate, forming source/drain regions, forming a first silicide, reducing spacers thickness and forming a second silicide. Forming a gate comprises forming an insulating layer over the semiconductor substrate, and forming the gate over the insulating layer. Forming source/drain regions comprises forming lightly doped source/drain regions in the semiconductor substrate adjacent to the insulating layer, forming spacers adjacent to the gate and over part of the lightly doped source/drain regions, and forming heavily doped source/drain regions in the semiconductor substrate. The first silicide is formed on an exposed surface of lightly and heavily doped source/drain regions. The second silicide is formed on an exposed surface of lightly doped source/drain regions. A first germanide and second germanide may replace the first silicide and the second silicide.
    • 制造双硅化物或锗化硅半导体的方法包括提供半导体衬底,形成栅极,形成源极/漏极区域,形成第一硅化物,减少间隔物厚度和形成第二硅化物的步骤。 形成栅极包括在半导体衬底上形成绝缘层,并在绝缘层上形成栅极。 形成源极/漏极区域包括在与绝缘层相邻的半导体衬底中形成轻掺杂源极/漏极区域,在栅极和轻掺杂源极/漏极区域的一部分上形成间隔物,并且形成重掺杂的源极/漏极区域 半导体衬底。 第一硅化物形成在轻掺杂和重掺杂的源/漏区的暴露表面上。 第二硅化物形成在轻掺杂源极/漏极区域的暴露表面上。 第一个锗化物和第二个锗化物可以替代第一个硅化物和第二个硅化物。